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SEMI E54.11-0301 © SEMI 2 001 8 8.4.1 Sensor-BI-T H Object Att ribute s — T he attributes prov ided by the Sensor-BI-TH object are defined in SEMI E54.1. There are no additional attributes required for the Sensor-BI-TH o…

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SEMI E54.11-0301 © SEMI 20017
8.3.2.3 Upload Recipe (Optional) — This service is used to read the recipe parameters associated with the endpoint
sensor or a specific Sensor-BI-TH-EP object. The format and type of data comprising recipe data and the
mechanism implemented to assemble recipe data to be read is manufacturer specific. The parameter ‘Recipe Data’
may be a formatted data structure or a list of individual data items. The following table describes the parameters
specified for this service.
Table 11 Upload Recipe Service Parameter Definitions
Parameter Request/
Indication
Response/
Confirmation
Data Type Description
Recipe Data #1 M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #2 M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #3
through
Recipe Data #N-1
M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #N M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
8.3.2.4 Calibrate (Optional) — This service is used to set the calibration parameters associated with the endpoint
sensor or a specific Sensor-BI-TH-EP object. The format and type of data comprising calibration data and the
mechanism implemented to interrupt calibration data and execute a calibration algorithm is manufacturer specific.
The parameter ‘Calibration Data’ may be a formatted data structure or a list of individual data items. The following
table describes the parameters specified for this service.
Table 12 Calibration Service Parameter Definitions
Parameter Request/
Indication
Response/
Confirmation
Data Type Description
Calibration Data #1 C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #2 C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #3
through
Calibration Data
#N-1
C C Manufacturer
Specific
The Calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #N C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
8.3.3 Sensor Actuator Controller Object Behavior
8.3.3.1 The behavior exhibited by the Sensor Actuator Controller object is defined in SEMI E54.1. Additional
behavior is detailed below.
8.3.3.2 The “Reset Endpoint” service will issue an “Endpoint Restart” object service to each Sensor-BI-TH-EP
sensor object.
8.4 Sensor-BI-TH Object — The Sensor-BI object is the device component responsible for coordinating the
behavior common to all Boolean input threshold sensor elements in the EPD device as specified in SEMI E54.1.
SEMI E54.11-0301 © SEMI 2001 8
8.4.1 Sensor-BI-TH Object Attributes — The attributes provided by the Sensor-BI-TH object are defined in SEMI
E54.1. There are no additional attributes required for the Sensor-BI-TH object.
8.4.2 Sensor-BI-TH Object Services — The services provided by the Sensor-BI-TH object are defined in SEMI
E54.1. There are no additional services required for the Sensor-BI-TH object.
8.4.3 Sensor-BI-TH Object Behavior — The behavior exhibited by the Sensor-BI-TH object is defined in SEMI
E54.1. There is no additional behavior required for the Sensor-BI-TH object.
8.5 Sensor-BI-TH-EP Object — T he Sensor-BI-TH-EP (Endpoint) object inherits the attributes, services, and
behavior of the Sensor-BI-TH as defined in SEMI E54.1. The Sensor-BI-TH-EP is the device component
responsible for retrieving a reading, or readings, from the device specific signal-processing sensors, optionally
processing the readings with a manufacturer specified algorithm, or algorithms, and then making the endpoint result
available through the “Value” attribute.
8.5.1 Sensor-BI-TH-EP Object Attributes — The attributes provided by the Sensor-BI-TH object are defined in
SEMI E54.1. The Sensor-BI-TH object attribute content and its attribute extensions to support the Sensor-BI-TH-EP
object are listed in the table below.
Table 13 Sensor-BI, Sensor-BI-TH, and Sensor-BI-TH-EP Object Attributes
Attribute Name Attribute
Identifier
Access
Network
Required Form
Value SbithepA16 R Yes BOOL
Reading Valid SbithA64 R Yes BOOL
State SbithA65 R No Enumerated, Byte
Status SbithA66 R No Enumerated, Byte
Minimum Time EpA1 RW* No UDINT
Maximum Time EpA2 RW* No UDINT
Target Time EpA3 RW* No UDINT
Elapsed Time EpA4 R No UDINT
Time Stamp EpA5 R No Date_And_Time
Recipe Identifier EpA6 RW* No Text String
Step Identifier EpA7 RW* No Text String
Reserved EpA8 –EpA64 — — Reserved for future expansion
Manufacturer Specified > EpA64 — — Manufacturer Specific attributes
NOTE 1: “*” Indicates that the specific attribute is nonvolatile. Nonvolatile requires that the current attribute value be maintained through a
component power cycle.
8.5.1.1 Value — The attribute that maintains the current endpoint event result. The value of the ‘Value’ attribute is
read as a Boolean (True or False) endpoint detection event result.
8.5.1.2 Reading Valid — An attribute which specifies whether the “Value” attribute contains a valid value. This
attribute is Boolean that can take on one of the following values:
0 = INVALID
1 = VALID
NOTE 3: The ‘Reading Valid’ attribute is identified as an optional attribute of the SBITH object class but is identified as a
required attribute for the SBITHEP object class.
8.5.1.3 State — An attribute that records the current state of the endpoint object. This attribute is an enumerated
byte. The possible enumeration and the requirement for support are as follows:
0 = ENDPOINT OFF (required)
1 = ENDPOINT IN PROCESS (required)
2 = ENDPOINT IDLE (optional)
3 = ENDPOINT SUSPENDED (optional)
4 = ENDPOINT FAILURE (optional)
SEMI E54.11-0301 © SEMI 20019
5-63 = Reserved
64-255 = Manufacturer Specified (optional)
8.5.1.4 Status — An attribute which s pecifies whether endpoint detection event reporting is active based upon the
services ‘Endpoint On’, ‘Endpoint Start’, and ‘Endpoint Off or On’. This attribute is an enumerated byte that can
take on one of the following values:
0 = Endpoint Off
1 = Endpoint On
8.5.1.5 Minimum Time — An attribute that specifies the minimum time in milliseconds for an endpoint detection
event. No attempt to report an endpoint detection event will take place until the minimum time specified has
expired.
8.5.1.6 Maximum Time — An attribute that specifies the maximum time in milliseconds for an Endpoint detection
event before an alarm is reported.
8.5.1.7 Target Time — An attribute that specifies the expected time in milliseconds for an Endpoint detection
event.
8.5.1.8 Elapsed Time — An attribute that specifies in milliseconds the amount of time that has elapsed since the
beginning of the current endpoint detection event. This attribute will behave as a count up timer that is frozen when
the endpoint event is detected.
8.5.1.9 Time Stamp — An attribute that specifies the time when the endpoint detection event completed.
8.5.1.10 Recipe Identifier — An attribute that specifies a manufacturer specific endpoint algorithm or algorithms to
be utilized to determine the current endpoint detection event. The interpretation of this attribute is manufacturer
specific.
8.5.1.11 Step Identifier — An attribute that specifies a process recipe step that is associated with the current
endpoint detection recipe and/or event. The interpretation of this attribute is manufacturer specific.
8.5.1.12 Initial and Default Values
Table 14 Sensor-BI and Sensor-BI-EP Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Value FALSE FALSE
Reading Valid 0 0 Invalid Reading
State LVV 0 ENDPOINT OFF
Status 0 Endpoint Off
Minimum Time LVV 0 Milliseconds
Maximum Time LVV 0 Milliseconds
Target Time LVV 0 Milliseconds
Elapsed Time LVV 0 Milliseconds
Time Stamp LVV Manufacture Specified Date_And_Time
Recipe Identifier LVV Manufacture Specified
Step Identifier LVV Manufacturer Specified
8.5.2 Sensor-BI-EP Object Services — The services provided by the Sensor-BI-EP are inherited from the Sensor-
BI object defined in SEMI E54.1. The Sensor-BI-EP object supports the additional services listed in Table 15 below.