semi合集-English.pdf - 第6801页

SEMI S2-0703a E © SEMI 1991, 2004 30 25.4.2 administrative controls (e.g., written warnin gs, standard ope rating procedures, labeli ng); and 25.4.3 personal protective equipment. 25.5 Equipment utilizing or produ cing p…

SEMI S2-0703a

24.3.2 Non-defeatable safety interlocks should be

provided on barriers preventing maintenance access to

radiation fields in excess of 10 microsieverts (Sv) or 1

millirem per hour.

24.3.3 Administrative Controls — When

administrative controls (e.g., distance, time, standard

operating procedures, labeling) are to be used, the

equipment supplier should provide detailed

documentation explaining the use of the administrative

controls.

24.4 Equipment utilizing or producing ionizing

radiation should be labeled appropriately.

NOTE 117: Label contents are typically controlled by

regulation in the country in which the equipment is to be used.

24.5 The manufacturer should conduct an assessment

to document conformance to the criteria specified in

Sections 24.2.1 through 24.2.2 during normal

equipment operation, maintenance, and service.

24.5.1 A radiation survey should be used to confirm

design compliance and serve as a baseline survey (see

also Table A4-1 of Appendix 4).

24.5.2 Measurements should be taken using recognized

methods with documented sensitivities and accuracy. A

report documenting the survey methods, equipment

operating parameters, instrumentation used, calibration

data, source locations, results, and discussion should be

made available.

24.5.3 If supplemental administrative controls are

recommended based on survey results or calculations, a

discussion should be provided in the operations and

maintenance manuals describing the source locations,

radiation levels, and recommended control measures.

NOTE 118: Ionizing radiation sources must be registered or

licensed according to the regulations of the country of

destination. These radiation sources must conform to the

regulations of central or local government agencies,

whichever is stricter.

NOTE 119: It is recommended that equipment containing

radioactive materials should demonstrate conformance to

licensing with local regulatory agencies prior to shipment.

NOTE 120: Equipment that uses particle acceleration in its

process has the potential for generating ionizing radiation as a

result of nuclear interactions between the accelerated particles

and various materials. These materials can include materials

of construction of the equipment, accumulated residual

process materials in the equipment, and the target materials.

25 Non-Ionizing Radiation and Fields

25.1 This section covers equipment that produces non-

ionizing radiation, except laser sources, in the following

categories:

 static electric and magnetic (0 Hz),

 sub-radio frequency electric and magnetic fields

( < 3 kHz),

 radio frequency (3 kHz–300 GHz),

 infrared radiation (700 nm–1 mm),

 visible Light (400 nm–700 nm), and

 ultraviolet Light (180–400 nm).

25.2 Potentially hazardous non-ionizing radiation

emissions that are accessible to any personnel should be

limited to the lowest practical level. This criterion can

be met by demonstrating conformance to the following

provisions:

EXCEPTION: Emissions of non-ionizing radiation

exceeding the cardiac pacemaker limits in Appendix 5

but less than the levels in Sections 25.2.1 and 25.2.2

should be identified with appropriate labeling. See also

Section 25.5.1.

25.2.1 Accessible levels of non-ionizing radiation

during normal operations are less than the Operator-

Accessible Limit (see Appendix 5);

25.2.2 Accessible levels of non-ionizing radiation

during maintenance and service procedures are less

than the Maintenance- and Service-Accessible Limit

(see Appendix 5).

25.3 Sources of potentially hazardous non-ionizing

radiation should be identified in the operation and

maintenance manuals, and appropriate parameters

listed. Parameters include frequency, wavelength,

power levels, continuous wave or pulsed (see also

Appendix 5). If pulsed, parameters also include the

pulse repetition rate, pulse duration, and description of

the pulse waveform.

EXCEPTION: Visible sources which are intended to be

viewed or which provide illumination (e.g., display

panels, visible alarm indicators), and are not lasers, do

not need to be identified.

NOTE 121: It is recommended that UV/IR generators that

are part of fire protection test apparatus, and are provided

with the equipment, be considered as possible sources of

potentially hazardous non-ionizing radiation.

25.4 Equipment should be designed to minimize access

or exposure to non-ionizing radiation during normal

operation, maintenance, and service. Potential

exposures should be controlled in the following order of

preference:

25.4.1 engineering controls (e.g., enclosure, shielding,

guarding, grounding, interlocks);

SEMI S2-0703a

25.4.2 administrative controls (e.g., written warnings,

standard operating procedures, labeling); and

25.4.3 personal protective equipment.

25.5 Equipment utilizing or producing potentially

hazardous non-ionizing radiation should be labeled.

25.5.1 Hazard warning labels should be provided by

the manufacturer when emission levels are measured

that may impact cardiac pacemakers or magnetizable

prostheses. These warning labels should be located

where the emissions exceed the pacemaker limit. (See

Appendix 5 for pacemaker labeling levels and

references.)

25.6 The manufacturer should conduct an assessment

to document conformance to the criteria specified in

Sections 25.2.1 and 25.2.2. Engineering calculations

may be used as part of this assessment. All

measurements should be taken using recognized

methods with documented sensitivities and accuracy. A

report documenting the survey methods, equipment

operating parameters, instrumentation used, calibration

data, source location(s), and discussion should be

provided. See Appendix 5.

25.6.1 If supplemental administrative controls are

recommended based on survey results or calculations, a

discussion should be provided in the operations and

maintenance manuals describing the source location(s),

radiation levels, and recommended control measures.

25.6.2 Administrative control procedures

recommended for operation, maintenance, or service

activities should be documented in the operations and

maintenance manuals.

26 Lasers

NOTICE: Section 26 below will be withdrawn upon

July 1, 2006 publication and replaced by the new

Section 26 including: figures and tables as shown in

Delayed Revisions Section 1. The EH&S Committee

has voted that implementation of the information is

OPTIONAL before the effective date.

26.1 Equipment should be identified with a laser

product classification based on the laser energy

accessible during operation, per the applicable standard.

NOTE 122: A Class 1 label may be required in some

jurisdictions, but is not currently required in the United States.

26.1.1 The laser energy (or power), wavelength, and

temporal mode (continuous wave or pulsed) should be

identified in the documentation provided to the user.

NOTE 123: The laser product classification for some

equipment will be Class 1 or 2, even though an embedded

laser is of a higher hazard classification.

26.1.1.1 If pulsed, the pulse repetition rate, pulse

duration and description of the pulse waveform should

be identified in the documentation provided to the user.

26.1.1.2 For Class 3b or 4 embedded laser systems, the

above information and the physical location of the laser

sources within the laser product should be identified in

the documentation provided to the user and in the

maintenance manual.

26.1.2 Equipment should not exceed the laser product

classification of Class 2; however, individual lasers

may exceed this classification prior to integration into

the final equipment assembly.

26.2 Equipment, including beam diagnostic or

alignment tools, should be designed to prevent injury

from all lasers during normal operation, and should

minimize risk of injury during maintenance or service.

Potential exposures should be controlled in the

following order of preference:

26.2.1 Engineering controls (e.g., enclosures,

shielding, filters, use of fiber optics to transmit energy,

interlocks).

26.2.2 Temporary enclosures or control measures for

maintenance, service, and non-routine tasks.

26.2.3 Administrative controls (e.g., written warnings,

standard operating procedures, labeling).

26.2.4 Personal protective equipment.

NOTE 124: Temporary enclosures and personal protective

equipment are considered to be administrative controls,

because they require human action to implement.

NOTE 125: Certain classes of laser products are regulated

around the world. Regulations and licensing requirements

may cover activities such as importing, exporting,

distributing, demonstrating, installing, servicing, and using

these laser products.

26.3 The equipment supplier should provide the

following in the operation and maintenance manuals:

 a description of laser-related hazards present

during operation, maintenance, or service, and

methods to minimize the hazard;

 justification for any procedures that require a laser

controlled area and the dimensions of this hazard

zone;

 administrative controls used in maintenance and

service activities; and

 a description of necessary personal protective

equipment.

26.4 The following detailed information should be

available for the evaluator:

SEMI S2-0703a

 justification for when engineering controls are not

feasible to limit exposure during operation or

maintenance tasks, and how administrative controls

provide equivalent protection (see Section 26.2);

and

 documentation showing compliance with an

appropriate international laser product safety or

industry standard, or the national standard for

country of use.

27 Sound Pressure Level

27.1 Equipment should be designed to control

exposures to sound pressure levels equal to or greater

than 80 dBA continuous or intermittent sound pressure

level, and 120 dB instantaneous (impulse) sound

pressure level.

NOTE 126: It is recommended that efforts be made to

decrease sound pressure levels as they approach 80 dBA (i.e.,

77 to 80 dBA), due to the additive sound pressure level effects

of multiple pieces of equipment in the same vicinity.

27.2 The order of preference for controlling exposures

is as follows:

27.2.1 Engineering Controls (e.g., source sound

pressure level reduction, absorption, enclosures,

barriers, acoustic dampening) — At a minimum, the

design of the engineering controls should consider the

sound pressure levels and type, the frequency, and the

appropriate control technologies.

27.2.2 Administrative Controls — Acceptable

administrative controls should be limited to

supplemental hazard warning labels and operating

procedures.

NOTE 127: Noise labeling is typically implemented as signs

located in the users facility.

27.3 Sound level surveys should be conducted by the

manufacturer during equipment development for

equipment that may emit hazardous sound pressure

levels.

27.3.1 The survey should be conducted in accordance

with a recognized standard. In addition, the following

test criteria should be applied:

27.3.1.1 The equipment mode of operation during the

sound pressure level tests should simulate as closely as

possible the actual modes and operating positions that

may be experienced by the equipment user.

27.3.1.2 Measurements should be taken in locations

that best simulate actual positions of operators relative

to the equipment. As a general guideline, the

microphone should be traversed 1 meter from the

equipment, 1.2 meters above the ground to simulate

seated operators, 1.5 meters above the ground to

simulate standing operators, and 3.5 meters (or as far as

possible) away from the nearest walls or sound-

reflecting objects. Measurements are taken 360 degrees

around the equipment wherever possible.

Table 2 Sound Pressure Level Test Criteria

NOTE 128: Background level may be subtracted using an

accepted method. If the sound pressure level difference is less

than 3 dBA, the contribution of the source from the

background cannot be adequately distinguished and the

survey results would not be valid for values over 80 dBA.

Difference between sound

pressure level measured

with noise source operating

and background sound

pressure level (dBA)

Correction to be subtracted

from the sound pressure

level measured with the

noise source operating to

obtain the sound pressure

level due to noise source

alone (dBA)

3 3

4 2.5

5 1.7

6 1.3

7 1

8 0.8

9 0.6

10 0.4

27.3.2 If the measured sound pressure level is less than

70 dBA, the manufacturer should provide to the

evaluator test data documenting sound pressure levels,

survey equipment, equipment calibration, test

conditions and results.

27.3.3 If the measured sound pressure level is greater

than 70 dBA, the test data should include all of the

information in Section 27.3.2, and should also include

the expected duration of personnel exposure.

27.3.4 If measured sound pressure level is greater than

75 dBA, information should be provided in the

equipment maintenance manual describing the sound

pressure level(s) and location(s).

28 Related Documents

28.1 The following documents are sources of

principles and practices of ventilation design.

ACGIH, Hazard Assessment and Control Technology

in Semiconductor Manufacturing, 1989, distributed by

Lewis Publishers, Chelsea, Michigan.

ANSI/AIHA, Standard Z9.5-1992 Laboratory

Ventilation

Burgess, Ellenbecker, Treitman, Ventilation for Control

of the Work Environment, John Wiley, NY, 1989