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SEMI E130-1104 © SEMI 2003, 2004 47 R1-1.8 Scenario VIII – Pre-al ign Failure on 1 st Substrate — The prober fails to setup the 1 st substrate of a job (the chuck is unoccupie d ). The user m anually aligns substr ate an…

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SEMI E130-1104 © SEMI 2003, 2004 46
Host Prober
CLEAN-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
CarrierA.02: UNOCCUPIED to OCCUPIED
SubstPJ01.02: AT WORK to AT SOURCE
Pre-align: OCCUPIED to UNOCCUPIED
CarrierA.01: UNOCCUPIED to OCCUPIED
SubstPJ01.01: AT WORK to AT SOURCE
Chuck: OCCUPIED to UNOCCUPIED
Chuck: UNOCCUPIED to OCCUPIED
1
2
3
5
6
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subs t PJ 01.0 2
1
2
3
56
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subs t PJ 01.0 1
Unload SubstPJ01.01 from the Chuck
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Unload SubstPJ01.02 from Pre-align
CLEAN-PROBES()
Chuck: OCCUPIED to UNOCCUPIED()
Unload Cleaning Substrate()
Align and Profile
SubstPJ01.01: AT WORK to AT WORK
Pre-align: OCCUPIED to UNOCCUPIED
Chuck: UNOCCUPIED to OCCUPIED
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PS: SERVICE TASK to AWAITING COMMAND(X:refX, Y:refY, Passed)
Move SubstPJ01.02 to Pre-align()
Pre-align()
SubstPJ01.01: AT SOURCE to AT WORK()
Pre-align: UNOCCUPIED to OCCUPIED()
CarrierA.01: OCCUPIED to UNOCCUPIED()
Move SubstPJ01.01 to Pre-align()
Pre-align()
Move PJ01.01 to Chuck()
Load Cleaning Substrate()
Figure R1-21
Clean Probes Detailed Scenario
R1-1.7.2.3 Post Conditions — The post conditions match the pre-conditions.
SEMI E130-1104 © SEMI 2003, 2004 47
R1-1.8 Scenario VIII – Pre-align Failure on 1
st
Substrate — The prober fails to setup the 1
st
substrate of a job (the
chuck is unoccupied). The user manually aligns substrate and presses Start on the prober console to resume
processing.
Host Prober
PJ01: SETTING UP to PROCESSING()
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL()
Alarm Notification(Pre-align Failed)
Pre-align Failure()
PS: HANDLING MATERIAL to PROCESSING BLOCKED(Pre-align Failed)
User
Manually align Substrate()
Start()
PS: PROCESSING BLOCKED to HANDLING MATERIAL()
Proceed as normal
Alarm Cleared(Pre-align Failed)
Figure R1-22
Pre-Align Failure on 1
st
Substrate Scenario
SEMI E130-1104 © SEMI 2003, 2004 48
R1-1.9 Scenario IX – Pre-align Fails on Subsequent Substrate. User Clears Condition Prior to the Host Issuing the
Next LOAD-SUBSTRATE Command — The prober fails to pre-align a substrate while the host is processing a
substrate on the main chuck. The user manually aligns the substrate and presses Start on the prober console to clear
the alarm. The next LOAD-SUBSTRATE command from the host proceeds as normal.
Host Prober User
Load Substrate()
Move substrate to Pre-align
Pre-align
Load Substrate on Chuck
Align and Profile
Move Next Substrate to Pre-align
PS: AWAITING LOAD to HANDLING MATERIAL()
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-align Failure
Alarm Notification (Pre-align Failed)
Load Substrate()
Process Substrate()
Manually align Substrate
Start
PS: AWAITING COMMAND to HANDLING MATERIAL()
Proceed as normal
Alarm Cleared (Pre-align Failed)
Figure R1-23
Pre-Align Failure 2 – Alarm Cleared by User