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SEMI E101-1104 © SEMI 2000, 2004 5 Equipment EFEM (E quip men t Fron t E nd Module) Subs trate Handler Process Pa rt AGV PG V RG V Carr ier Tr ansp ortat ion (Aut oma tic or Man ual) Ca rrier Ha ndler Loa d Por t Gro u p…

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SEMI E101-1104 © SEMI 2000, 2004 4
6.2.1.10 Dock Plate [0,1] — This is a mechanism that
advances a FOUP up to the door opening/closing
mechanism. It contains a Load Plate that a carrier is
placed on, and it may contain the Dock/Undock
mechanism that advances the carrier into the
equipment, and/or a Carrier Purge Interface.
6.2.1.11 Load Plate [1] — This is the base plate on
which carriers are placed. It consists of a Kinematic
Coupling and may contain Carrier Sensors and/or Info
Pad Sensors.
6.2.1.12 Carrier Sensors [0,1] — These are sensors to
detect whether a carrier is present and/or a carrier is
correctly placed.
6.2.1.13 Info Pad Sensors [0,1] — These are sensors to
detect Info Pads as defined in SEMI E1.9.
6.2.1.14 Carrier Purge Interface [0,1] — This is a
mechanical interface for injecting and withdrawing
gasses.
6.2.1.15 Dock/Undock Mechanism [0,1] — This is the
mechanism that advances a carrier to the FOUP opener
and locks the carrier, or releases it from its locked state.
In the OC (as defined in SEMI E1.9) case, this
mechanism only moves carriers.
6.2.1.16 FOUP Opener [0,1] — This is the mechanism
that opens and closes the FOUP door.
6.2.1.17 Carrier Opener/Loader Maintenance Panel
[0,1] — This is a user interface for maintenance of the
Carrier Opener/Loader.
6.2.1.18 Carrier Slot Mapper [0,1] — This is the
mechanism that detects the presence or the absence of
substrates and their positions in a carrier. It may be
installed on the FOUP Opener, the Carrier
Opener/Loader, the Load Port Unit, or the Substrate
Handler.
6.2.1.19 Carrier ID Reader/Writer [0,1] — This is the
unit that reads and/or writes to an ID tag attached to a
carrier. At most, one Carrier ID Reader/Writer exists
for each Load Port Unit.
6.2.1.20 Status Indicator [0,1] — This is a set of
indicators which shows operating status of the Load
Port Unit.
6.2.1.21 Substrate ID Reader [0,1] — This is the unit
which reads the Identification Label on the Substrate.
6.2.1.22 Aligner [0,1] — This is the unit which aligns
the angular orientation of substrates and may center the
substrate.
6.2.1.23 Substrate Transfer Robot [0,1+] — This is
the unit which transfers substrates between Carrier
Handler, automation components (Aligner, Substrate ID
Reader, etc.) and Process Part.
6.2.2 Model of Internal Buffer Type EFEM (see Figure
6)
6.2.2.1 This section defines functional elements that
exist only in an Internal Buffer Type EFEM.
6.2.2.2 Internal Buffer [1+] — This is where an
individual carrier is stored in an EFEM. It consists of a
Carrier Transfer Robot that transfers carriers and a
Carrier Storage where carriers are stored.
6.2.2.3 Carrier Transfer Robot [1] — This is a robot
that handles carriers in Carrier Storage.
6.2.2.4 Carrier Storage [1+] — This is where an
individual carrier is stored.
SEMI E101-1104 © SEMI 2000, 2004 5
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
Process Part
AGV
PGV
RGV
Carrier
Transportation
(Automatic or
Manual)
Carrier Handler
Load Port Group
Substrate
Transpor-
tation
OHT
Operator
Figure 1
Conceptual Structure of Fixed Buffer Type EFEM in Equipment W hen Substrate Handler Is Installed
Outside Process Part
Equipment
EFEM
(Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier
Transportation
(Automatic or
Manual)
Carrier Handler
Load Port Group
Substrate
Transportation
Operator
Figure 2
Conceptual Structure Location of Fixed Buffer Type EFEM in Equipment When Substrate Handler Is
Included Inside Process Part
SEMI E101-1104 © SEMI 2000, 2004 6
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transpor-
tation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 3
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Installed
Outside Process Part
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transportation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 4
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Included
Inside Process Part