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SEMI T6-0697 © SEMI 1997, 2004 24 Segment: DTM Date/Time Reference Level: Detail Loop: CID Usage: Optional Max Use: 10 Purpose: To specify p ertinent dates and times. Syntax Notes: 1 At lease one of DTM02, DTM03, or DTM0…

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SEMI T6-0697 © SEMI 1997, 2004 23
Segment: SPS Sampling Parameters for Summary Statistics
Level: Detail
Loop: CID
Usage: Optional
Max Use: >1
Purpose: To define the sampling parameters associated with summary statistics.
Syntax Notes: 1 If either SPS05 or SPS06 is present, then the other is required.
Semantic Notes: 1 SPS01 is the population size (count) of the class of objects or events to which the statistical
generalizations refer.
2 SPS02 is the sample size, which is the number of observations on which the reported summary
statistics were based.
3 SPS03 is the subgroup size, which is the number of observations in a subgroup of a sample.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
O SPS01 609 Count O N0 1/9
Occurrence counter
O SPS02 609 Count O N0 1/9
Occurrence counter
O SPS03 609 Count O N0 1/9
Occurrence counter
O SPS04 949 Confidence Limit O R 1/4
Percent value expressing the confidence that a true value falls within a certain
confidence interval.
O SPS05 C00101 Composite Unit of Measure X
To identify a composite unit of measure.
C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
Refer to 003051 Data Element Dictionary for acceptable code values.
C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
C00101 through C00103 can be repeated five times using C00103 to C00115.
O SPS06 942 Sample Frequency Value per Unit of
Measurement Code
X N0 1/9
The number of samples collected.
SEMI T6-0697 © SEMI 1997, 2004 24
Segment: DTM Date/Time Reference
Level: Detail
Loop: CID
Usage: Optional
Max Use: 10
Purpose: To specify pertinent dates and times.
Syntax Notes: 1 At lease one of DTM02, DTM03, or DTM06 is required.
2 If either DTM06 or DTM07 is present, then the other is required.
Comments: 1 Report Type Code SR (LIN01 Assigned ID = "PER"): Defines date range covered by summary
data.
2 Report Type Codes CA and RT (LIN01 Assigned ID = "LOT"): May be used to specify a ship date
or other date mutually agreed upon by Buyer and Seller.
3 If date range for all data entities is identical, the DTM Segment at Position Number 040 may be
used to identify a single date.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M DTM01 374 Date/Time Qualifier M ID 3/3
Code specifying type of date or time, or both date and time.
009 Process
011 Shipped
054 Sellers Local
119 Test Performed [Period Range]
157 Test Period Start
158 Test Period Ending
X DTM02 373 Date X DT 6/6
Date (YYMMDD).
O DTM03 337 Time X TM 4/4
Time expressed in 24-hour clock time (HHMM).
O DTM05 624 Century O N0 2/2
The first two characters in the designation of the year (CCYY).
X DTM06 1250 Date Time Period Format Qualifier X ID 2/3
Code indicating the date format, time format, or date and time format.
RD6 Range of Dates Expressed in Format YYMMDD-YYMMDD.
RD8 Range of Dates Expressed in Format CCYYMMDD-CCYYMMDD.
A range of dates expressed in the format CCYYMMDD-
CCYYMMDD where CCYY is the numerical expression of the
century CC and year YY, MM is the numerical expression of the
month within the year, and DD is the numerical expression of the
day within the year; the first occurrence of CCYYMMDD is the
beginning date and the second occurrence is the ending date.
RDM Range of Dates Expressed in Format YYMMDD-MMDD.
X DTM07 1251 Date Time Period X AN 1/35
Expression of a date, a time, or range of dates, times, or dates and times.
SEMI T6-0697 © SEMI 1997, 2004 25
Segment: MEA Measurements
Level: Detail
Loop: MEA
Usage: Optional
Max Use: 1
Purpose: To specify physical measurements or counts, including dimensions, tolerances, variances, and
weights. (See figures in appendix for example of use of C001.)
Syntax Notes: 1 At lease one of MEA03, MEA05, MEA06, or MEA08 is required.
2 If MEA05 is present, then MEA04 is required.
3 If MEA06 is present, then MEA04 is required.
4 If MEA07 is present, then at least one of MEA03, MEA05, or MEA06 is required.
5 Only one of MEA08 or MEA03 may be present.
Semantic Notes: 1 MEA04 defines the unit of measure for MEA03, MEA05, and MEA06.
Comments: 1 When citing dimensional tolerances, any measurement requiring a sign (+ or -), or any
measurement where a positive (+) value cannot be assumed, use MEA05 as the negative (-)
value and MEA06 as the positive (+) value.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
O MEA01 737 Measurement Reference ID Code O ID 2/2
Code identifying the broad category to which a measurement applies.
Examples of possible values for wafers, if used, are indicated.
AV Average Reading
CT Counts
DE Defects
EL Electrical Characteristics
FD Finished Dimensions
Dimensions of the final or end-use product
H
R
Historical Result
I
R
Interpolated Result
A test result value calculated by interpolation between two physical
tests.
LS Lot Status
LT Lot Limits
Limits set on test results from all product contained in a single ship-
ment (which may involve any multiple or fraction of transportation
carrier units) to one customer.
PD Physical Dimensions (Product Ordered)
SF Shelf Life
T
R
Test Results
Indicates that the data to follow are the results test measurements.
O MEA02 738 Measurement Qualifier O ID 1/3
Code identifying a specific product or process characteristic to which a measurement
applies.
Use not recommended for wafers. Included as optional for use with other
commodities/materials.
Refer to 003050 Data Element Dictionary for acceptable code values.