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SEMI F74-1103 © SEMI 2002, 2003 9 COMPONENT VIEW; 1.5” VIBRATI ON/TORQUE TE ST FIXTURE NOTE 1: Leak test port(s) and porting are depen den t on seal system/substrat e design configuration. NOTE 2: Material of Constructio…

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SEMI F74-1103 © SEMI 2002, 2003 8
RELATED INFORMATION 1
SAMPLE PERFORMANCE TESTING FIXTURES
NOTE: This Related Information is not an official part of SEMI F74. The recommendation in this Related
Information are optional and are not required to conform to this standard.
TEST SAMPLE
Figure R1-1
Conventional Performance Testing Sample
SEMI F74-1103 © SEMI 2002, 2003 9
COMPONENT VIEW; 1.5” VIBRATION/TORQUE TEST FIXTURE
NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.
NOTE 2: Material of Construction: 316SS.
NOTE 3: Drawing scale is not specified.
Figure R1-2a
1.5” Surface-Mount Performance Testing Fixture
SEMI F74-1103 © SEMI 2002, 2003 10
FACE SEAL
NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.
NOTE 2: Material of Construction: 316SS.
NOTE 3: Drawing scale is not specified.
Figure R1-2b
1. 5” Surface-Mount Performance Testing Fixture