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SEMI G51-90 © SEMI 1990 6 Detail A Corner Relief Hole (Optiona l) Table 2 Leadfr ame Standard Dimension s LEADS PKG. BODY a b c d 44 10 × 10 4.200 3.800 1.170 1 .170 52 10 × 10 4.200 3.800 1.170 1 .170 52 14 × 14 3.735 3…

SEMI G51-90 © SEMI 19905

Table 1 Leadframe Standard Dimensions

LEAD COUNT 44525264806480

PACKAGE SHAPE SQUARE SQUARE SQUARE SQUARE SQUARE RECT RECT.

NOMINAL PACKAGE WIDTH (mm) 10.0 10.0 14.0 14.0 14.0 14.0 14.0

NOMINAL PACKAGE LENGTH (mm) 10.0 10.0 14.0 14.0 14.0 20.0 20.0

STRIP LENGTH (mm) 171.2 171.2 158.52 158.52 158.52 158.52 158.5

NO. OF UNITS PER STRIP 8866666

TOOLING DIM A (mm) 7.5 7.5 9.45 9.45 9.45 9.45 9.45

(PROGRESS) C (mm) 21.4 21.4 26.42 26.42 26.42 26.42 26.42

F (mm) 1.5 1.5 1.7 1.7 1.7 1.7 1.7

G (mm) 23.2 23.2 26.0 26.0 26.0 33.1 33.1

(STRIP WIDTH) H (mm) 24.7 24.7 27.7 27.7 27.7 34.8 34.8

I (mm) 20.0 20.0 22.82 22.82 22.82 28.8 28.8

J (mm) 20.0 20.0 22.82 22.82 22.82 22.82 22.82

K (mm) 5.18 5.18 7.18 7.18 7.18 7.18 7.18

L (mm) 5.18 5.18 7.18 7.18 7.18 10.18 10.18

DAMBAR WIDTH (mm) 0.4 0.4 0.4 0.4 0.4 0.4 0.4

EXP. SLOT WIDTH (mm)

1) BETWEEN FRAMES 1)0.3 1)0.3 1)0.6 1)0.6 1)0.6 1)0.6 1)0.6

2) END OF SHT BAR 2)0.15 2)0.15 2)0.38 2)0.38 2)0.38 2)0.38 2)0.38

METAL THICKNESS (mm) 0.15 0.15 0.15 0.15 0.15 0.15 0.15

EXTERNAL LEAD Pitch (mm) 0.8 0.65 1.0 0.8 0.65 1.0 0.8

LEADCOUNT 100 120 128 144 160 184 196 232

PACKAGE SHAPE RECT. SQUARE SQUARE SQUARE SQUARE SQUARE RECT. SQUARE

NOMINAL PACKAGE WIDTH (mm) 14.0 28.0 28.0 28.0 28.0 32.0 28.0 40.0

NOMINAL PACKAGE LENGTH (mm) 20.0 28.0 28.8 28.0 28.0 32.0 40.0 40.0

STRIP LENGTH (mm) 158.52 200.0 200.0 200.0 200.0 200.0 200.0 248.0

NO. OF UNITS PER STRIP 6 4 4 4 4 4 4 4

TOOLING DIM A (mm) 9.45 18.8 18.8 18.8 18.8 18.8 18.8 18.8

(PROGRESS) C (mm) 26.42 50.0 50.0 50.0 50.0 50.0 50.0 62.0

F (mm) 1.7 3.5 3.5 3.5 3.5 3.5 3.5 3.5

G (mm) 33.1 57.9 57.9 57.9 57.9 57.9 57.9 57.9

(STRIP WIDTH) (mm)H 34.8 61.4 61.4 61.4 61.4 61.4 61.4 61.4

I (mm) 28.8 37.2 37.2 37.2 37.2 37.6 49. 8 49.2

J (mm) 22.82 37.2 37.2 37.2 37.2 37.6 37.8 49.2

K (mm) 7.18 14.18 14.18 14.18 14.18 16.18 14.18 20.18

L (mm) 10.18 14.18 14.18 14.18 14.18 16.18 20.18 20.18

DAMBAR WIDTH (mm) 0.4 0.4 0.4 0.4 0.4 0.4 0.4 0.4

EXP. SLOT WIDTH (mm)

1) BETWEEN FRAMES 1)0.6 1)3.6 1)3.6 1)3.6 1)3.6 1)3.6 1)0.4 1)3.6

2) END OF SHT BAR 2)0.38 2)2.0 2)2.0 2)2.0 2)2.0 2)2.0 2)0.4 2)2.0

METAL THICKNESS (mm) 0.15 0.15 0.15 0.15 0.15 0.15 0.15 0.15

EXTERNAL LEAD PITCH (mm) 0.65 0.8 0.8 0.65 0.65 0.65 0.65 0.65

SEMI G51-90 © SEMI 1990 6

Detail A

Corner Relief Hole (Optional)

Table 2 Leadframe Standard Dimensions

LEADS PKG. BODY a b c d

44 10 × 10 4.200 3.800 1.170 1.170

52 10 × 10 4.200 3.800 1.170 1.170

52 14 × 14 3.735 3.00 0.995 1.075

64 14 × 14 3.735 3.00 0.995 1.075

80 14 × 14 3.735 3.00 0.995 1.075

64 14 × 40 3.735 3.400 0.995 1.075

80 14 × 20 3.735 3.400 0.995 1.075

100 14 × 20 3.735 3.400 0.995 1.075

120 28 × 28 6.600 8.840 1.610 1.610

128 28 × 28 6.600 8.840 1.610 1.610

144 28 × 28 6.600 8.840 1.610 1.610

160 28 × 28 6.600 8.840 1.610 1.610

184 32 × 32 6.600 8.840 1.610 1.610

196 28 × 40 6.600 8.840 1.610 1.610

232 40 × 40 6.600 8.840 1.610 1.610

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

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applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

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SEMI G52-90 © SEMI 1990, 2004 1

SEMI G52-90 (Reapproved 1104)

STANDARD TEST METHOD FOR MEASUREMENT OF IONIC

CONTAMINATION ON SEMICONDUCTOR LEADFRAMES (PROPOSED)

This test method was technically approved by the Global Assembly & Packaging Committee and is the direct

responsibility of the Japanese Packaging Committee. Current edition approved by the Japanese Regional

Standards Committee on July 23, 2004. Initially available at www.semi.org September 2004; to be published

November 2004. Originally published in 1990.

NOTE 1: Japan, Europe, and US task forces are planning to

develop test methods which will address the different levels

of ionic contamination on leadframes.

1 Scope

1.1 This standard describes the procedure to determine

ionic contamination on leadframes using a water

extraction method. The method is sensitive to Na

, K

, Cl



, NO

, Br



, SO

2

, PO

3

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

2 Referenced Standards

2.1 ASTM Specifications

D 1193 — Specification for Reagent Water

D 4327 — Anions in Water by Ion Chromatography

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

3 Summary of Method

3.1 Ionic contamination is extracted in water at > 95°C

for 30 ± 2 minutes. The contamination is quantitatively

analyzed by ion type using Ion Chromatography and the

result is presented as nanograms/unit area.

4 Significance

4.1 Contamination on leadframes can contribute to

semiconductor device reliability problems. This method

may be used by lead frame manufacturers at outgoing

inspection and by users at incoming inspection.

Correlation of device reliability with contamination

levels may lead to improved leadframe cleaning

processes.

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohocken, Pennsylvania 19428-2959, USA.

Telephone: 610.832.9585, Fax: 610.832.9555, Website:

www.astm.org

5 Terminology

5.1 Definitions

5.1.1 eluent — the solvent used to carry the extracted

ions through the ion exchange chromatograph.

5.1.2 regenerant — a chemical solution containing the

ions originally present in the chromatograph column

prior to a test run and used to prepare the column for a

new test.

5.1.3 retention time — the time required for a

particular ion type to pass from the injection port to the

detector. Retention time is characteristically different

for each ion type.

5.1.4 standard solution — a solution containing a

known concentration of the ion to be measured and

used to calibrate the chromatograph.

6 Equipment

6.1 Ion Chromatograph for Anion and Cation Analysis

— This equipment is to consist of a concentration

pump, guard column, separator column, and a detector

module consisting of a suppressor device to reduce the

background eluent conductivity to a low level and a

conductivity cell. The minimum sensitivity of the

chromatograph for each ion type is defined in Table 1.

6.2 Chart Recorder

6.3 Ion Extraction Vessels — Polypropylene or teflon

containers with sealing caps, or polypropylene/

polyethylene double layered bags.

NOTE 2: The contamination level of these vessels must be

less than one-fifth (1/5) of the expected contamination level

on the leadframes when measured in a control test.

6.4 Hot Bar Bag Sealer

6.5 Water Bath — 300 mmL × 300 mmW × 200 mmH,

filled with DI water, and capable of holding 95°C.

6.6 Volumetric Dispenser (e.g., Pipettes) — 10 ml and

100 ml capacity.

6.7 Quartz Flasks and Pipettes for Cation Standard

Solutions — 100, 250, 500, and 1000 ml capacity

(flasks); 1, 10, and 25 ml capacity (pipettes).