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SEMI E109.1-0704 © SEMI 2002, 2004 8 Variable Name Class Format LocationID DVVAL 20 (A[1–64]) LocationID i SV 20 (A[1–64]) PartitionCapacity DVVAL 51 (U1) PartitionCapacity i SV 51 (U1) PartitionID DVVAL 20 (A[1–64]) Par…

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SEMI E109.1-0704 © SEMI 2002, 2004 7
Function SECS-II Data Item
Used by S3F25 to differentiate between port related
“ChangeServiceStatus,” “CancelReservationatPort,” and
“ReserveAtPort” services. Note: the text between the
quotes is the actual value used in the parameter
PORTACTION.
PORTACTION
Used by S3F27 to specify desired Access mode. ACCESSMODE
Used by S3F35 to differentiate between
“ReticleTransferJob” and “CancelReticleTransferJob”
JOBACTION
6 Variable Data Item Mapping
6.1 This sections shows the specific SECS-II data classes, and formats needed for the SECS-II implementation of
SEMI E109 data items.
Table 5 Variable Data Item Mapping Table
Variable Name Class Format
Access Mode DVVAL 51 (U1)
Access Mode
i
SV 51 (U1)
AlarmInfo DVVAL L,2
1. Alarm number (U4)
2. Alarm Description (A)
AvailPartitionCapacity DVVAL 51 (U1)
AvailPartitionCapacity
i
SV 51 (U1)
BufferCapacityList SV L,n
1.<BufferPartitionInfo
i
>
.
.
n.<BufferPartitionInfo
i
>
BufferPartitionInfo DVVAL L,4
1.<PartitionID>
2.<PartitionType>
3.<AvailPartionCapacity>
4.<PartitionCapacity>
BufferPartitionInfo
i
SV L,4
1.<PartitionID
i
>
2.<PartitionType
i
>
3.<AvailPartionCapacity
i
>
4.<PartitionCapacity
i
>
BypassReadID DVVAL 11 (BOOLEAN)
PodID DVVAL 20 (A[1–64])
PodID
i
SV 20 (A[1–64])
PodLocationMatrix SV L,n
1.L,2
1.<LocationID
1
>
2.<PodID
1
>
.
.
n.L,2
1.<LocationID
n
>
2.<PodID
n
>
SEMI E109.1-0704 © SEMI 2002, 2004 8
Variable Name Class Format
LocationID DVVAL 20 (A[1–64])
LocationID
i
SV 20 (A[1–64])
PartitionCapacity DVVAL 51 (U1)
PartitionCapacity
i
SV 51 (U1)
PartitionID DVVAL 20 (A[1–64])
PartitionID
i
SV 20 (A[1–64])
PartitionType DVVAL 20 (A[1–64])
PartitionType
i
SV 20 (A[1–64])
PortAssociationState DVVAL 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationState
i
SV 51 (U1)
Enumerated
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationStateList SV L,n
1.<PortAssociationState
i
>
.
.
n <PortAssociationState
n
>
PortID DVVAL 51 (U1)
PortID
i
SV 51 (U1)
PortStateInfo DVVAL L,2
1.<PortAssociationState>
2. <PortTransferState>
PortStateInfo
i
SV L,2
1.<PortAssociationState
i
>
2. <PortTransferState
i
>
PortStateInfolist SV L,n
1.<PortStateInfo
1
>
.
.
n.<PortStateInfo
n
>
PortTransferState DVVAL 51 (U1)
PortTransferState
i
SV 51 (U1)
PortTransferStateList SV L,n
1.<PortTransferState
1
>
.
.
n.<PortTransferState
n
>
Reason DVVAL 51 (U1)
ReticleIDVerification ECV 11 (BOOLEAN)
ReticleParticleInspection ECV 11 (BOOLEAN)
SEMI E109.1-0704 © SEMI 2002, 2004 9
Table 6 Reticle Pod Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType 1. “ReticlePod”
“ObjID” 1. <PODID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
“Capacity” 51 (U1) Capacity
Capacity Range: 1..6
Capacity Examples: 1, 6
“ReticlePodAccessingStatus” 51 (U1) ReticlePodAccessingStatus
ReticlePodAccessingStatus enumerated per Variable
ReticlePodAccessingStatus
0: “NOT AVAILABLE”
1: “AVAILABLE”
2: “IN ACCESS”
3: “COMPLETE”
“PodIDStatus” 51 (U1) PodIDStatus
PodIDStatus enumerated per Variable PodIDStatus
0: “ID NOT READ”
1: “WAITING FOR HOST ON ID STATUS”
2: “ID VERIFICATION OK”
3: “ID VERIFICATION FAILED”
“ContentMap” L,n n = Capacity
1. ReticleID
n. ReticleID
“ReticlePodLocationID” 20 (A) ReticlePodLocationID
ReticlePodLocationID conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.
“ReticlePodLockingStatus” 51 (U1) ReticlePodLockingStatus
ReticlePodLockingStatus enumerated per VariableReticlePodLockingStatus
0: “NOT LOCKED”
1: “RELEASED AND LOCKED”
2: “HOLD”
“SlotMap” L,n n = Capacity
1.51 (U1) enumerated
…
n.51 (U1) enumerated
Enumerated
0: “UNDEFINED”
1: “EMPTY”
2: “CORRECTLY OCCUPIED”
“SlotMapStatus” 51 (U1) SlotMapStatus
SlotMapStatus enumerated per Variable SlotMapStatus.
0: “SLOT MAP NOT READ”
1: “WAITING FOR HOST ON SLOT MAP STATUS”
2: “SLOT MAP VERIFICATION OK”
3: “SLOT MAP VERIFICATION FAILED”
Table 7 Reticle Object Attribute Definition
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 1. “Reticle”
“ObjID” 1. <RETICLEID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
Section 6.)
# of Exposures 51 (U1) # of Exposures
QualificationIntervalTime 52 (U2) 0–99999 / 0 is not limit.