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SEMI E54.##-0705 © SEMI 2005 2 4.3 A-LINK Documents 1 A-LINK Publ ic Specification ver. 1.2 — Ba sic Re ference Model fo r Open Systems Interconnection NOTICE: Unless otherwise indicated, all documents cited shall be the…

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SEMI E54.##-0705 © SEMI 2005 1
SEMI E54.17-0705
SPECIFICATION OF SENSOR/ACTUATOR NETWORK FOR A-LINK
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005.
1 Purpose
1.1 This document defines a communication specification based on the A-LINK protocol to enable communications
between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models
on semiconductor manufacturing equipment.
1.2 This document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator
devices.
2 Scope
2.1 This document specifies how Sensor / Actuator / Controller devices interoperate on the network specific for the
A-LINK Public specification referenced in the §4, as a part of equipment’s control system.
2.2 This document defines relation with main part of SEMI E54 including Common Device Model (CDM) and
existing Specific Device Models (SDMs). This document is to be used with the CDM and one or more SDMs, as
well as the A-LINK Public Specification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based only A-LINK and is a companion document to
the A-LINK specification; therefore a complete specification of this standard includes the A-LINK specifications.
There are other semiconductor SAN communication options. The specifications for these options are not included
here.
3.2 This standard specifies enhancements that provide additional capability over and above those currently required
by A-LINK. In order to avoid document inconsistency problem, information in the A-LINK specification that relates
to this standard is not repeated in this document. This document is limited to describing enhancements or limitations
to the A-LINK specification that are imposed by this standard.
3.3 A complete specification of the conformance testing procedure shall include the A-LINK protocol conformance
testing specification. Conformance testing shall also include enhancements and limitations to the A-LINK
specification required by this standard.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-situ Particle Monitor
Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
4.2 OSI Standard
ISO 7498 OSI — Basic Reference Model for Open Systems Interconnection
SEMI E54.##-0705 © SEMI 2005 2
4.3 A-LINK Documents
1
A-LINK Public Specification ver. 1.2 — Basic Reference Model for Open Systems Interconnection
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AUF — A-LINK User Forum
5.1.2 CDM — Common Device Model
5.1.3 NCS — Network Communication Standard
5.1.4 OSI — Basic Reference Model for Open Systems Interconnection (ISO 7498)
5.1.5 PHY — Physical Layer
5.1.6 SAN — Sensor/Actuator Network
5.1.7 SDM — Specific Device Model
5.1.8 UI — User Interface
5.2 This section includes the terms defined in SEMI E54.1 Sensor/Actuator Network Common Device Model.
5.2.1 Attribute
5.2.2 Behavior
5.2.3 Byte
5.2.4 Class
5.2.5 Common Device Model
5.2.6 Device
5.2.7 Device Manager (DM) Object
5.2.8 Device Model
5.2.9 Instance
5.2.10 Network Communication Standard
5.2.11 Object
5.2.12 Sensor, Actuator and Controller (SAC) Object
5.2.13 Service
5.2.14 Specific Device Model
5.2.15 state diagram
5.3 Terminology Defined in A-LINK
5.3.1 AUF — A-LINK User Forum.
1
A kind of consortium for A-LINK users to recommend improvement to A-
LINK trade organization
2
, share A-LINK applications, provide A-LINK compliance test and etc.
5.3.2 AN MS — a station that accesses and exchanges data by polling its assigned Networked-Slave stations.
5.3.3 AN SS — a station that is managed and accessed by AN MS.
1 http://www.a-linkuf.com
2 http://www.algosystem.co.jp
SEMI E54.##-0705 © SEMI 2005 3
5.3.4 Device Profile — a kind of electric table to provide the characteristic features of a device including
configuration and capabilities.
5.3.5 Service Access Element — an addressable location in a device for the directing of service requests.
5.3.6 Data Exchange — a capability to communicate such data for a device as raw/processed sensed data and
variable settings.
5.3.7 Directive — a capability to instruct such basic functions to a device as reset or abort.
5.3.8 DP Facility — a capability to manage diagnostic matters.
5.3.9 Unite Inventory — a capability to realize and communicate the Device Profile.
5.3.10 Unite States — a capability to communicate state of a device.
6 Communication Protocol High Level Structure
6.1 In a typical remote I/O configuration, single master architectures are used to optimize response times. In
complicated applications, multi-master architectures are also possible. A-LINK uses the polling principle for
communication.
6.1.1 Message transfer is organized in cycles. A message cycle mainly consists of a request-frame followed by a
corresponding acknowledge/response-frame of the addressed station. An exception to this is the global-control
function for synchronization and coordination of several remote I/O stations.
6.1.2 A brief description of the A-LINK protocol as it relates to the ISO 7498 OSI model follows in the sections
below. For protocol efficiency, A-LINK does not define layers 3 to 7. However, since the OSI model specifies
Layer 7 as the interface between the Application Process and the communication stack, it is appropriate to discuss
several aspects of the A-LINK standard at this level.
NOTE 1: The information contained in this section is for reference only. It in no way represents specifications for A-LINK. See
related documentation for these specifications.
6.2 Physical Layer — Layer 1
6.2.1 The bottom Physical Layer is established by RS-485. See the A-LINK standard for more information for
detail.
6.3 Data Link Layer — Layer 2
6.3.1 Data Transfer
6.3.1.1 The Data Link Layer provides the functions for sending and receiving data over the network. Data Elements
are packaged, delivered, and checked. Acknowledgements, responses, retries, and timeouts are used to guard
against Line Protocol Errors (e.g., frame, overrun, and parity) and Transmission Protocol Errors (e.g., start and end
delimiters, frame check, frame length, and response times).
6.4 Network Layer — Layer 3
6.4.1 There is no distinct network layer.
6.5 Transport Layer — Layer 4
6.5.1 There is no distinct transport layer. Such functions as disassembling of message into transport unit and
reassembling for transportation are implemented in the Application Layer.
6.6 Session Layer — Layer 5
6.6.1 There is no distinct session layer.
6.7 Presentation Layer — Layer 6
6.7.1 There is no distinct presentation layer. Such functions as data representation conformance are implemented in
the Application Layer.
6.8 Application Layer — Layer 7