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SEMI E130-1104 © SEMI 2003, 2004 35 R1-1.1.2.9 Unload PJ02 su bstrate 3 User If the host is sues the LOAD-SUBSTRATE command when there are no more unprocessed substrat es contained in the Process Job's PRMtlName lis…

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SEMI E130-1104 © SEMI 2003, 2004 34
R1-1.1.2.7 Load PJ02 Substrate 2
Host Prober
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.02
SubstPJ02.03
Figure R1-8
Normal Run - Load 2
nd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.02 (See Section R1-1.1.2.3 )
R1-1.1.2.8 Load PJ02 substrate 3
Message sequence identical to Section R1-1.1.2.7
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.03
Figure R1-9
Normal Run - Load 3
rd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.03 (See Section R1-1.1.2.3 )
SEMI E130-1104 © SEMI 2003, 2004 35
R1-1.1.2.9 Unload PJ02 substrate 3
User
If the host issues the LOAD-SUBSTRATE command when
there are no more unprocessed substrates contained in the
Process Job's PRMtlName list, and there is not another
Process Job ready to be processed, the prober will interpret
the command as an UNLOAD-SUBSTRATE command.
Host Prober
UNLOAD-SUBSTRATE()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
PS: HANDLING MATERIAL to IDLE()
PJ02: PROCESSING to PROCESS COMPLETE()
PJ02: PROCESSING COMPLETE to TERMINAL()
CJ1: EXECUTING to COMPLETED()
CA: IN ACCESS to CARRIER COMPLETE()
Undock FOUP()
LP: TRANSFER BLOCKED to READY TO UNLOAD()
Start Remove FOUP()
LP: READY TO UNLOAD to TRANSFER BLOCKED()
LP: TRANSFER BLOCKED to READY TO LOAD()
End Remove FOUP()
CA: to TERMINAL()
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-10
Normal Run – Unload 3
rd
Substrate of PJ02 Scenario
SEMI E130-1104 © SEMI 2003, 2004 36
R1-1.2 Scenario II – Substrate Tracking Events — This scenario demonstrates the E90 Substrate tracking events
corresponding to the job defined in Scenario I. E40 and E94 messages are omitted for clarity.
R1-1.2.1 Job Setup
Host Prober
E87 Bind
User
Deliver FOUP to tool
CA: IDNR to IDVO
CA: SMNR to SMVO
LP: READY TO LOAD to TRANSFER BLOCKED
LPCA: NOT ASSOCIATED to ASSOCIATED
CA: to IDNR
SubstPJ01.01: to AT SOURCE()
SubstPJ01.01: to NEEDS PROCESSING()
SubstPJ01.02: to AT SOURCE()
SubstPJ01.02: to NEEDS PROCESSING
SubstPJ01.03: to AT SOURCE
SubstPJ01.03: to NEEDS PROCESSING
SubstPJ02.01: to AT SOURCE
SubstPJ02.01: to NEEDS PROCESSING
SubstPJ02.02: to AT SOURCE
SubstPJ02.02: to NEEDS PROCESSING
SubstPJ02.03: to AT SOURCE
SubstPJ02.03: to NEEDS PROCESSING
CarrierA.01: to OCCUPIED()
CarrierA.02: to OCCUPIED()
CarrierA.03: to OCCUPIED
CarrierA.23: to OCCUPIED
CarrierA.24: to OCCUPIED()
CarrierA.25: to OCCUPIED()
Figure R1-11
Substrate Tracking – Job Setup Scenario