semi合集-English.pdf - 第661页

SEMI E85-0705 © SEMI 1999, 2005 15 Option A E84 plug zones Top View Front View Stoc ker HDP Side View 225 mm (2) 200 mm 225 mm (2) 300 mm HDP BDP 300 mm 200 mm Stocker facial plane Figure 9 Drawing of Exampl e Available …

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SEMI E85-0705 © SEMI 1999, 2005 14
Figure 8
AMHS Interbay Load Port Option F’ (Carrier Oriented perpendicular to face plane)
(Top Access Only)
SEMI E85-0705 © SEMI 1999, 2005 15
Option A
E84 plug zones
Top View
Front View
Stocker
HDP
Side View
225 mm (2)
200 mm
225 mm (2)
300 mm
HDP
BDP
300 mm
200 mm
Stocker facial
plane
Figure 9
Drawing of Example Available Area for Connector on Stocker for Option A
SEMI E85-0705 © SEMI 1999, 2005 16
NOTE 1: Transfer from both sides is concurrently
possible, with all 3 secondary kinematic couplings
used, or the top robotic flange.
NOTE 2: Figure 8 and all exclusion zone dimensions for
Option F only apply if bottom access is required.
Figure 10
Exclusion Zone Detail – Option F