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SEMI E102-0600 © SEMI 2000 41 R1-2.5 Scenari o Five — M anual Carrier Input and Handling Factory Operations Dura ble Management MTSC AMHS Equipment Controller s 1: Stk6 Eve nt Report Carrier WaitIn(car rier aaa) (Stocker…

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SEMI E102-0600 © SEMI 2000 40
53: Transfer Command Complete (IBSEM)
56: Transfer Command to Stk. 7 ( carrier 3232, src. Stk. 7/Bay_In, dest. shelf)(StockerSEM)
57: Transfer Command Updates from Stk. 7 ( StockerSEM)
58: Transfer Command Complete (StockerSEM)
54: setMaterialTrackingLocation(MaterialTrackingLocation Stk.7)
59: makeStored()
62: informJobStateChange(JobType TrJob1, previousState JobExecuting, newState JobCompleted)
55: DurableLocationChangedEvent
52: DurableLocationChangedEvent
60: MaterialContainerStateChangedEvent
61: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
63: removeFinishedJob(Job TrJob1)
64: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-11
Scenario Case 4 (continued)
SEMI E102-0600 © SEMI 200041
R1-2.5 Scenario Five — Manual Carrier Input and Handling
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
1: Stk6 Event Report CarrierWaitIn(carrier aaa) (Stocker SEM)
3: Transfer Command to Stk6 (carrier aaa, src Man_In, dest shelf) (Stocker SEM)
4: Transfer Command Updates (Stocker SEM)
5: setMaterialTrackingLocation( MaterialTrackingLocation stk6/manin)
6: DurableLocationChangedEvent
7: Transfer Command Completed (Stocker SEM)
9: MaterialContainerStateChangedEvent
11: requestJob(JobType TransportJob, Priority 1, Deadline time1, Container aaa, destination stk6)
15: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
16: getUnit()
18: MaterialContainerStateChangedEvent
20: InformJobStateChange(aJob TrJob1, previousState JobExecuting, newState JobCompleted)
12: returns Job Handle TrJob1
8: makeStored()
2: MaterialContainerArrivedAtManualInputPortEvent
Supervisor determines TransportJob is required from
MaterialContainerArrivedAtManualInputPortEvent
13: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
14: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
19: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
21: removeFinishedJob(Job TrJob1)
22: JobstateChangedEvent(..previousState JobCompleted, newState JobUndefined)
10: setUnit(unitvalue)
17: setMaterialTrackingLocation(MaterialTrackingLocation Stk. 6/MTL1)
MTSC determines
logical partition from
getUnit() - (internal)
Figure R1-12
Scenario Case 5
SEMI E102-0600 © SEMI 2000 42
R1-2.6 Scenario Six — AMHS Equipment Monitoring
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route, selects stk10 from sgr1. Ohs2 is down, no alternate
route is available therefore MTSC waits until Ohs2 is up. (Internal Service)
8: MaterialContainerStateChangedEvent
20: DurableLocationChangedEvent
23: DurableLocationChangedEvent
28: MaterialContainerStateChangedEvent
2: requestJob(JobType Transport, Prioriy 1, Deadline time1, container aaa, DestinationMachine stk9)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
11: MachineResourceE10StateChangedEvent
13: MachineResourceE10StateChangedEvent
19: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
22: setMaterialTrackingLocation(stk9)
27: makeStored()
10: Ohs2 AlarmSet (IBSEM)
12: Ohs2 AlarmCleared (IBSEM)
14: Transfer Command to Stk4 (carrier aaa, src shelf, dest Bay_Out) (Stocker SEM)
15: Transfer Command Updates (Stocker SEM)
16: Transfer Command Complete (Stocker SEM)
17: Transfer Command to Ohs2 (carrier aaa, src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
18: Transfer Command Updates (IBSEM)
21: Transfer Completed (IBSEM)
24: Transfer Command to stk9 (carrier aaa, src stk9/Bay_In, dest shelf) (Stocker SEM)
25: Transfer Command updates (Stocker SEM)
26: Transfer Command Complete (Stocker SEM)
3: Returns Job Handle TrJob1
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
9: getUnit()
29: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
1: setUnit(unitvalue)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-13
Scenario Case 6