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SEMI E30.5-0302 © SEMI 2001, 2002 5 28 TAKE MEASUREMENT TAKE SAMPL E SAMPL E COMPLETE 30 31 34 Figure 3 Working Sub- State of P rocessing State Mo del 7.5 Processing State Def initions 7.5.1 ABORTED  all activ i ty is s…

SEMI E30.5-0302 © SEMI 2001, 2002 4

WORKING

ALIGN

MEASURING

TAKE

MASUREMENT

MEASUREMENT

COMPLETE

Figure 2

Working State of Processing State Model

7.4 Processing State Model Diagram

7.4.1 Working State of Processing State Model

7.4.2 Working Sub-states of Processing State Model — These states need not to be implemented in all Metrology

equipment but if the equipment has the ability to multiple measurements at a site or provide raw scan date to the user

this is how it is to be implemented.

SEMI E30.5-0302 © SEMI 2001, 20025

TAKE MEASUREMENT

TAKE SAMPLE

SAMPLE

COMPLETE

Figure 3

Working Sub-State of Processing State Model

7.5 Processing State Definitions

7.5.1 ABORTED  all activity is suspended as a

result of an ABORT command. Any alarm and abort

conditions must be cleared before exit from this state.

The CLEANUP command is available to the operator

or host to transition the equipment from the ABORTED

state to IDLE state.

7.5.2 ABORTING (PROCESSING ACTIVE Sub-state)

 the equipment has received an ABORT command.

All normal activity is suspended. The equipment is

taking appropriate action to put the equipment and

material in a “safe state” where possible. Data may be

invalid or not available.

7.5.3 ALARM PAUSED (PAUSE Sub-state)  an

alarm has occurred in the Process or Process Pause

states and the equipment is waiting for the alarm to be

cleared.

7.5.4 ALIGN (WORKING Sub-state)  the

equipment or operator is performing an alignment of

the material to the equipment. Within this state the

equipment shall refine or establish its SEMI M20

coordinate system and establish any secondary

coordinate systems required.

7.5.5 CHECKING (PROCESS PAUSE Sub-state) 

the equipment verifies that the updates made to the

Process Program are valid. This is a similar procedure

to that which is done in SETTING UP before the

equipment is ready to transition to the READY state.

7.5.6 EXECUTING (PROCESS Sub-state)  the

equipment is processing material automatically and can

continue to do so without external intervention, but

normally may include interaction with the host or

operator.

7.5.7 IDLE  checks for queued process or awaits a

command. IDLE is free of ALARM and error

conditions. Any transitions into this state will clear the

process area.

7.5.8 IDLE with ALARMS  an alarm has occurred in

the IDLE state and the equipment is waiting for all

alarms to be cleared.

SEMI E30.5-0302 © SEMI 2001, 2002 6

7.5.9 INIT  equipment initialization is occurring.

7.5.10 LOAD (EXECUTING Sub-state)  the

equipment is determining if processing is complete. If

not, then the substrate is being transferred to the

equipment processing location, such as the stage. A

pre-alignment procedure may be performed prior to the

LOAD state.

7.5.11 PAUSE (PROCESS ACTIVE Sub-state) 

PROCESS is suspended at the next opportunity.

Actions to put the equipment in a “safe state” shall be

performed. The equipment is awaiting a command

(RESUME, PP-UPDATE, STOP or ABORT), or for

alarm(s) to be cleared.

7.5.12 PAUSED (PROCESS PAUSE Sub-state) 

PROCESS shall be suspended and the equipment is

waiting for a command (RESUME, PP-UPDATE,

STOP or ABORT).

7.5.13 PAUSING (PROCESS PAUSE Sub-state) 

PROCESS has been suspended at the next opportunity

and the equipment is put in a “safe state”.

7.5.14 PROCESS (PROCESSING ACTIVE Sub-state)

 this state is the parent of those sub-states which refer

to the active preparation and execution of a Process

Program.

7.5.15 PROCESSING ACTIVE  this state is the

parent of all sub-states where the context of a Process

Program execution exists.

7.5.16 PROCESS PAUSE (PAUSE Sub-state)  the

equipment is free of alarm conditions in the PAUSE

state.

7.5.17 MEASUREMENT COMPLETE (MEASURING

Sub-State)  the equipment has completed collecting

data relative to an alignment location.

7.5.18 MEASURING (WORKING Sub-State)  the

equipment is preforming an action between alignments.

7.5.19 READY (PROCESS Sub-state)  the equipment

is ready to begin processing and is awaiting a START

command from the operator or host. If an

AUTOSTART is included, then the equipment starts

processing immediately.

7.5.20 SAMPLE COMPLETE (TAKE

MEASUREMENT Sub-state)  the equipment

determines if additional samples need to be taken at this

site.

7.5.21 SETTING UP (PROCESS Sub-state)  the

equipment is being set up so that external conditions are

satisfied to start processing the material. This includes

the receipt of any Process Programs and material to be

processed and their validation. Additional information

may come from the host during the processing.

7.5.22 STOPPING (PROCESSING ACTIVE Sub-state)

 the equipment has completed a Process Program or

has been instructed to stop processing and shall do so

gracefully at the next opportunity. All cleanup

necessary is being completed within this state with

regard to material, data, control system, etc. Data is

normally preserved. Any alarm or error condition is

cleared before exit from this state.

7.5.23 TAKE MEASUREMENT (MEASURING Sub-

state)  the equipment is in the process of collecting

data relative to an alignment location. (e.g. Site,

Region, Substrate).

7.5.24 TAKE SAMPLE (TAKE MEASUREMENT Sub-

state)  the equipment collects data from a single

structure or of a single sample.

7.5.25 UNLOAD (EXECUTING Sub-state)  the

substrate is being removed from the processing

location.

7.5.26 WORKING (EXECUTING Sub-state)  the

equipment is processing a specific material.