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SEMI C3.51-11 01 © SEMI 1995 , 2001 7 Figure 4C Infra Red Absorption S pectra of Silicon Tetrachloride in B oron Trichloride NOTICE: T hese s tandards do n o t purport to addres s safety issues, if any, associated with t…
SEMI C3.51-1101 © SEMI 1995, 2001 6
Figure 4A
Infra Red Absorption Spectra of Hydrogen Chloride in Boron Trichloride
Figure 4B
Infra Red Absorption of Phosgene in Boron Trichloride
SEMI C3.51-1101 © SEMI 1995, 20017
Figure 4C
Infra Red Absorption Spectra of Silicon Tetrachloride in Boron Trichloride
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
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product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C3.27-1102 © SEMI 1984, 2002 1
SEMI C3.27-1102
SPECIFICATION FOR BORON TRIFLUORIDE (BF
3
) IN CYLINDERS,
99.0% QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 21, 2002. Initially available at www.semi.org October 2002; to be published November
2002. Originally published in 1984; previously published in 1994.
1 Purpose
1.1 The purpose of this document is to provide a
specification for Boron Trifluoride (BF
3
) used in the
semiconductor industry.
2 Scope
2.1 This document covers requirements for Boron
Trifluoride (BF
3
) used in the semiconductor industry.
2.2 If analytical methods are not complete, the
requirements are presented as a guideline.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Description
3.1 Boron trifluoride is a colorless gas. It fumes in
moist air and has a pungent odor. Boron trifluoride is
nonflammable and does not support combustion.
4 Referenced Standards
4.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
5 Terminology
5.1 Terminology appropriate to this standard is defined
in SEMI C3.
6 Specifications
QUALITY: 99.0%
Impurities
Maximum Acceptable Level
(ppm)*
Gases not soluble in water 0.94%
Particles **
Silicon Tetrafluoride (SiF
4
) 200
Sulfur Dioxide (SO
2
) 21
Total Sulfates (SO
4
-2
) 7
TOTAL IMPURITIES 9628
* An analysis of significant figures has not been considered. The
number of significant figures will be based on analytical accuracy and
the precision of the provided procedure.
** To be determined between supplier and user.
7 Physical Constants (for information only)
Metric Units US Units
Molecular weight 67.81 67.81
Boiling point at 1 atm −100.4°C −149.0°F
Density of gas at 70°C
(21.1°F) and 1 atm
3.076 g/L 0.192 lb/ft
3
Specific gravity of gas 2.7 2.7
Critical pressure 49.2 atm 723 psia
Critical Temperature −12.25°C 9.95°F
8 Analytical Procedures
8.1 Sampling Procedures — Boron trifluoride is
sampled separately for water-soluble gases and water-
insoluble gases. The water-soluble components are
collected in a plastic bottle which contains chopped ice.
After the ice melts, weighed aliquots of the solution are
taken for individual determinations. The water-
insoluble components are collected in a modified gas
collection tube.
8.1.1 Apparatus
8.1.1.1 Balance, l000-g capacity, capable of weighing
to 0.01 g.
8.1.1.2 Polyethylene bottles (wide mouth, 1-L capacity)
with caps.