semi合集-English.pdf - 第2099页

SEMI E54.12-0701 E © SEMI 2001 5 9.3.1.2 Add itional obj ects may be defined by t he manufacturer in the Device Profile for a giv e n device. 9.3.2 Attrib utes  The mapping of Attribute Tags and Identifiers is defined i…

100%1 / 7923
SEMI E54.12-0701
E
© SEMI 2001 4
7.6.2.2 Abort
The Abort Service Request specifies
no parameters.
7.6.2.3 Recover
The Recover Service Request
specifies no parameters.
7.6.2.4 Get Attribute
The Get Attribute Request
specifies two parameters: the Object ID and the
Attribute ID. Each are currently defined in the range
1–255. Both are expandable to 65,535.
7.6.2.5 Set Attribute
The Set Attribute Request
specifies three parameters: the Object ID, the Attribute
ID and the Attribute Value to set. The Object ID and
the Attribute ID are defined the same as for the Set
Attribute Service. The length of the Attribute Value is
based on the specification of the attribute.
7.6.2.6 Execute
The Execute Service Request
specifies no parameters.
7.6.2.7 Perform Diagnostics
The Perform
Diagnostic Request specifies one parameter: Test ID.
The Test ID parameter is one byte in length.
8 Protocol Compliance
8.1 The CC-Link Partner Association has established a
qualified certification system, with test laboratories in
Japan that include conformance testing and
interoperability testing.
9 Specific Device Model Mappings
9.1 The following sections specify mappings for
Sensor Actuator Network Specific Device Models.
9.2 Mass Flow Device
Reference SEMI E54.3 for a
complete specification of the SDM for Mass Flow
Devices. Accordingly, the following mapping rules
apply to the identification tags for the Objects,
Attributes and Services of this model.
9.2.1 Objects
Consistent with SEMI E54.3 and
Section 7.3 above, the DM and SAC objects are
identified as Object 1 and Object 2, respectively.
9.2.1.1 Table 4 shows the mapping of the SDM Object
Instances specified in SEMI E54.3 (Instance numbers
are listed under heading Inst. in the table) and the CC-
Link Object ID (listed under ID in the table).
Table 4 MFD Object Identifiers
SDM Object
Name
SDM Object ID Inst. ID
Sensor-AI-MF MFD3 1 3
Actuator-AO-MF MFD7 1 4
Controller MFD8 1 5
SISO-Setpoint MFD11 1 6
Sensor-AI-AT MFD4 1 7
9.2.1.2 Additional objects may be defined by the
manufacturer in the Device Profile for a given device.
9.2.2 Attributes
The mapping of Attribute Tags and
Identifiers is defined in Section 7.4.1 for the CDM.
The same method applies here for the SDM.
9.2.3 Services
The mapping of Service Tags and
Identifiers is defined in Section 7.6.1 for the CDM.
The same method applies here for the SDM.
9.3 In-Situ Particle Monitor
Reference SEMI
E54.10 for a complete specification of the SDM for In-
Situ Particle Monitor Devices. Accordingly, the
following mapping rules apply to the identification tags
for the Objects, Attributes and Services of this model.
9.3.1 Objects
Consistent with SEMI E54.10 and
Section 7.3 above, the DM and SAC objects are
identified as Object 1 and Object 2, respectively.
9.3.1.1 Table 5 shows the mapping of the SDM Object
Instances specified in SEMI E54.3 (Instance numbers
are listed under heading Inst. in the table) and the CC-
Link Object ID (listed under ID in the table).
Table 5 ISPM Object Identifiers
SDM Object Name SDM Object ID Inst. ID
Sensor-AI-LCS ISPMD3 1 3
Sensor-AI-SLS ISPMD4 1 4
Sensor-AI-MNS ISPMD5 1 5
Assembly-ISPM#1 ISPMD17 1 6
Assembly-ISPM#2 ISPMD18 1 7
Assembly-ISPM#3 ISPMD19 1 8
Assembly-ISPM#4 ISPMD20 1 9
Assembly-ISPM#5 ISPMD21 1 10
Assembly-ISPM#6 ISPMD22 1 11
Assembly-ISPM#7 ISPMD23 1 12
Assembly-ISPM#8 ISPMD24 1 13
Assembly-ISPM#9 ISPMD25 1 14
Assembly-ISPM#40 ISPMD64 1 15
Sensor-AI-Counter ISPMD16 1 16
Sensor-AI-Counter ISPMD16 n 15 + n
Sensor-AI-Counter ISPMD16 1024 1039
SEMI E54.12-0701
E
© SEMI 20015
9.3.1.2 Additional objects may be defined by the
manufacturer in the Device Profile for a given device.
9.3.2 Attributes
The mapping of Attribute Tags and
Identifiers is defined in Section 7.4.1 for the CDM.
The same method applies here for the SDM.
9.3.3 Services
The mapping of Service Tags and
Identifiers is defined in Section 7.6.1 for the CDM.
The same method applies here for the SDM.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. Mitsubishi has filed a statement with
SEMI asserting that licenses will be made available to
applicants throughout the world for the purpose of
implementing this standard without unfair
discrimination. Attention is also drawn to the
possibility that some elements of this standard may be
subject to patented technology or copyrighted items
other than those identified above. Semiconductor
Equipment and Materials International (SEMI) shall not
be held responsible for identifying any or all such
patented technology or copyrighted items. By
publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights
asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised
that determination of any such patent rights or
copyrights and the risk of infringement of such rights
are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E54.13-0303 © SEMI 2003 1
SEMI E54.13-0303
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR ETHERNET/IP™
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved
by the North American Regional Standards Committee on November 22, 2002. Initially available at
www.semi.org January 2003; to be published March 2003.
1 Purpose
1.1 Introduction
1.1.1 This standard defines a communication
specification based on the EtherNet/IP
1
(Ethernet/Industrial Protocol) network to enable
communications between intelligent devices on a
sensor/actuator network (SAN) that operate according
to SEMI specified device models (common and device
specific) in a semiconductor manufacturing tool.
1.2 Motivation
1.2.1 EtherNet/IP is a communication system suitable
for use in industrial environments. EtherNet/IP allows
intelligent devices to exchange time-critical application
information. These devices include simple I/O devices
such as sensors/actuators, as well as complex control
devices such as robots, programmable logic controllers,
and process controllers.
1.2.2 EtherNet/IP uses CIP (Control and Information
Protocol), the common network, transport and
application layers also shared by DeviceNet (SEMI
E54.4). EtherNet/IP provides:
• A cost effective solution to bridge factory Ethernet
(IEEE 802.3) networks to SEMI E54.4 DeviceNet
low-level device networks,
• Access to intelligence present in low-level devices,
and
• Producer/Consumer model for Master/Slave and
Peer-to-Peer application relationships.
1.3 Background
1.3.1 EtherNet/IP makes use of standard Ethernet and
TCP/IP technology to transport CIP communications
packets. The result is a common, open application
layer on top of open and highly popular Ethernet and
TCP/IP protocols.
1.3.2 EtherNet/IP provides a producer/consumer model
for the exchange of time-critical control data. The
producer/consumer model allows the exchange of
1 EtherNet/IP is a trademark of Open DeviceNet Vendor Association
(ODVA)
application information between a sending device (e.g.,
the producer) and many receiving devices (e.g., the
consumers) without the need to send the data multiple
times to multiple destinations. For EtherNet/IP, this is
accomplished by making use of the CIP network and
transport layers along with IP Multicast technology.
Many EtherNet/IP devices can receive the same
produced piece of application information from a single
producing device.
1.3.3 EtherNet/IP makes use of standard IEEE 802.3
technology; there are no non-standard additions that
attempt to improve determinism. Rather, EtherNet/IP
recommends the use of commercial switch technology,
with 100 Mbps bandwidth and full-duplex operation, to
provide for more deterministic performance.
2 Scope
2.1 Specification This document specifies a
Sensor/Actuator Network Communications Standard
(NCS) based on the EtherNet/IP specification that
enables communication with SAN devices configured
according to SEMI SAN Common Device Model
(CDM) and appropriate Specific Device Model (SDM)
specifications.
2.2 Use This document is used in conjunction with a
SEMI standard SAN CDM specification and one or
more SEMI standard SDM specifications (e.g. for a
mass flow controller). Together, they describe the
externally visible data structure and behavior of devices
utilizing the EtherNet/IP networking capability in a
SEMI compliant SAN system. The general
sensor/actuator network document architecture is
described in the SEMI E54.0 Sensor/Actuator Network
Standard (the root SAN document).
2.3 Document Structure
The EtherNet/IP network
communication standard complies with the SEMI SAN
NCS template document structure, as described in
SEMI E54.0. The standard document is composed of
two main parts. The first part (Sections 1 through 8)
specifies the SAN enabling protocol as well as the
presentation (i.e., mapping) of CDM object structure
and behavior onto the network (referred to as the
“CDM mapping”). The second part (Section 9)
specifies the presentation (i.e., mapping) of SDM object