semi合集-English.pdf - 第1573页
SEMI E36.1-0704 © SEMI 2004 10 Number Subject Predicate Object 2513DADEEBF7 16 http://unknown.org/CA46B94 9-B999-40B3-8554- 2513DADEEBF7 http://www.semi.org/schemas/e36 Base#releaseDate " 4/29/2003" 17 http://u…
SEMI E36.1-0704 © SEMI 2004 9
36: <dc:title>Some Operation</dc:title>
37: <e36base:recipeType>ProcessRecipe</e36base:recipeType>
38: </e36base:Recipe>
39:
40: <e36base:SafetyItem rdf:about='0566910F-2C23-443F-B498-03B984735675'>
41: <e36base:releaseDate>4/29/2003</e36base:releaseDate>
42: <dc:title>Hazardous Material Detection</dc:title>
43: </e36base:SafetyItem>
44:
45: </rdf:RDF>
46:
Table R1-1 Triples of the Data Model
Number Subject Predicate Object
1
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#Component
2
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
3
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://purl.org/dc/elements/1.1
/title
" Cables"
4
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://purl.org/dc/elements/1.1
/publisher
" Some Publisher"
5
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://www.semi.org/schemas/e36
Base#oemPartNumber
" 01-1010110"
6
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://www.semi.org/schemas/e36
Base#partName
" Pump control"
7
http://unknown.org/D7C2E12
8-A1F2-4FAC-962F-
00BA4E6150E5
http://www.semi.org/schemas/e36
Base#oemName
" Some OEM"
8
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#Component
9
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
10
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://purl.org/dc/elements/1.1
/title
" Cables"
11
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://purl.org/dc/elements/1.1
/publisher
" Some Other Publisher"
12
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://www.semi.org/schemas/e36
Base#oemPartNumber
" 02-1101001-01"
13
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://www.semi.org/schemas/e36
Base#partName
" Power Cable"
14
http://unknown.org/C89722A
8-2B03-4DDF-8ABD-
68F01FCD2ADE
http://www.semi.org/schemas/e36
Base#oemName
" Some Other OEM"
15
http://unknown.org/CA46B94
9
-
B999
-
40B3
-
8554
-
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#Procedure
SEMI E36.1-0704 © SEMI 2004 10
Number Subject Predicate Object
2513DADEEBF7
16
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
17
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://purl.org/dc/elements/1.1
/title
" How To Use This Manual"
18
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://purl.org/dc/elements/1.1
/publisher
" A Publisher"
19
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://www.semi.org/schemas/e36
Base#procedureType
" OperationProcedure"
20
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#Recipe
21
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
22
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://purl.org/dc/elements/1.1
/title
" Some Operation"
23
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.semi.org/schemas/e36
Base#recipeType
" ProcessRecipe"
24
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#SafetyItem
25
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
26
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://purl.org/dc/elements/1.1
/title
" Hazardous Material Detection"
SEMI E36.1-0704 © SEMI 2004 11
Figure R1-1
Validation Results