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SEMI E109-0305 © SEMI 2001, 2005 13  Reticle pod propert ies that ar e required shall be acti vely update d by the e quipment. 10.3.6 Reticle Pod Location 10.3.6.1 A reticle pod l ocation, signifi ed by LocationID, is u…

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SEMI E109-0305 © SEMI 2001, 2005 12
Attribute Name Definition Access Reqd Form
PodIDStatus Current state of the PodID
verification.
RO Y Enumerated:
ID NOT READ, WAITING FOR HOST ON
ID STATUS, ID VERIFICATION OK, ID
VERIFICATION FAILED.
ReticlePodAccessing-
Status
The current accessing state of the
reticle pod by the equipment. The
current substate of the
ReticlePodAccessingStatus state
model.
RO Y Enumerated:
NOT AVAILABLE, AVAILABLE, IN
ACCESS, COMPLETE.
ContentMap Ordered list of reticle identifiers
corresponding to slot 1,2,3……n.
RO Y Ordered list of n elements, where n is equal to
the value of “Capacity” above, and each
element consists of a ReticleID.
When a slot has no reticle, the ReticleID value
should be null.
ReticlePodLocationID Identifier of current location of the
reticle pod.
RO Y Text 1 to 80 characters.
ReticlePodLocking-
Status
The current state of pod locking by
the equipment. The current
substate of the
ReticlePodLockingStatus.
RO Y Enumerated:
NOT LOCKED, RELEASED AND LOCKED,
HOLD.
SlotMap Ordered List of slot status as
provided by the host until a
successful slot map read, then as
read by the equipment.
RO Y Ordered List of n elements where n is equal to
the value of “Capacity” above.
1. Enumerated
1
.
n. Enumerated
n
Enumerated:
UNDEFINED, EMPTY, CORRECTLY
OCCUPIED. The number shown above is the
slot number.
SlotMapStatus Current state of slot map
verification.
RO Y Enumerated:
SLOT MAP NOT READ, WAITING FOR
HOST ON SLOT STATUS, SLOT MAP
VERIFICATION OK, SLOT MAP
VERIFICATION FAILED.
10.3.5 Rules for Reticle Pod Attributes
The equipment shall change object attributes, ContentMap and SlotMap, provided by the host. All other
attributes, such as LocationID, shall be set and maintained by the equipment.
The attributes, Capacity, ContentMap, Reticle count, shall be provided with Bind, PodNotification,
ReticleTransferJob,
or ProceedWithPod service before or when SlotMap is provided.
The SlotMap shall be provided with Bind, PodNotification, ReticleTransferJob or ProceedWithPod to verify
PodID, when the SlotMap verification is equipment based. And it shall not be provided when the SlotMap
verification is host based.
Reticle pod properties may be provided before the reticle pod arrives as part of the Bind, PodNotification, or
ReticleTransferJob service and should be retained until either a CancelBind, CancelPodNotification, or
CancelReticleTransferJob service is received or the reticle pod is removed.
Reticle pod properties may also be provided by the ProceedWithPod service. The reticle pod properties that are
provided by the ProceedWithPod service may differ based whether or not the object is instantiated by the
service.
SEMI E109-0305 © SEMI 2001, 2005 13
Reticle pod properties that are required shall be actively updated by the equipment.
10.3.6 Reticle Pod Location
10.3.6.1 A reticle pod location, signified by LocationID, is used for tracking. A reticle pod location is any physical
area that is capable of holding a pod. It is not intended to represent entire mechanisms, which may have a variety of
other properties of interest, but only that portion where a reticle pod may rest.
10.3.7 Reticle Pod Location Examples
10.3.7.1 Reticle Pod Locations include reticle pod
load port locations, internal pod buffer locations, as well as
grippers, conveyors, and elevators that are used internally for moving the pod from one fixed location to another.
10.3.8 Slot Map Relation to Content Map The slot map attribute and content map attribute hold similar
information. The purpose of these attributes differs. The slot map is provided so that the equipment or host can
quickly verify that the pod has reticles correctly placed in the correct slot (as provided by the host). This verification
is based on a slot map read. The content map is provided so that the host can communicate the specific ReticleID in
a specific slot as delivered and that the equipment can communicate the specific ReticleID that it places in a specific
slot.
10.3.9 Reticle Pod Location Naming All locations shall be assigned a unique name. Information about the
reticle pod location can be obtained by querying the Pod Object for the ReticlePodLocationID or by asking the
equipment for the PodLocationMatrix. The text form of the ReticlePodLocationID shall be descriptive of the
location.
10.3.10 Capacity
10.3.10.1 The Capacity parameter can be sent to the equipment by the host in the PodNotification, Bind,
ReticleTransferJob, or the ProceedWithPod service. However the equipment shall update this
10.3.10.2 Parameter based on the results of the read slot map operation. Furthermore, the equipment shall update
the parameter based on it’s own actions. If the equipment does not know the value of Capacity prior to instantiation,
the equipment shall instantiate the reticle pod object with the value of one for Capacity.
10.3.11 The ReticlePodAccessing
10.3.11.1 Status is used by the host to know whether or not the reticle pod owned by the equipment can be
transferred from the equipment.
10.3.11.2 Enumerated values of ReticlePodAccessing-Status correspond to the substates of
ReticlePodAccessingStatus (see Figure 2).
10.4 Reticle Pod State Model
10.4.1 The purpose of the Reticle Pod State Model is to define the host’s view of a reticle pod. The equipment shall
maintain a separate and independent state model for each reticle pod in/at the equipment.
10.4.2 Reticle Pod State Model Diagram
10.4.3 Reticle Pod State Definitions
10.4.3.1 RETICLE POD — The RETICLE POD state has four ANDed (orthogonal) substates: RETICLE POD ID
STATUS, RETICLE POD SLOT MAP STATUS, RETICLE POD ACCESSING STATUS, AND RETICLE POD
CLAMPING STATUS.
10.4.3.1.1 RETICLE POD ACCESSING STATUS — This is a substate of RETICLE POD and indicates the current
accessing status of the pod. It has three substates, NOT ACCESSED, IN ACCESS, and COMPLETE. The initial
default entry substate is NOT ACCESSED.
10.4.3.1.1.1 NOT ACCESSED — This is a substate of RETICLE POD ACCESSING STATUS and is active when
the reticle pod has not been opened. It has two substates NOT AVAILABLE and AVAILABLE.
10.4.3.1.1.1.1 NOT AVAILABLE This is a substate of NOT ACCESSED and is active when the reticle pod has been
instantiated via service but has not been received by the equipment.
SEMI E109-0305 © SEMI 2001, 2005 14
10.4.3.1.1.1.2 AVAILABLE — This is a substate of NOT ACCESSED and is active when the reticle pod has been
received by the equipment but not opened.
10.4.3.1.1.2 IN ACCESS — This is a substate of RETICLE POD ACCESSING STATUS and is active when reticle
pod has been opened once, and the reticle pod should not be unloaded from the equipment. In this state the slot map
is read and reticles may be moved in and out of the reticle pod.
10.4.3.1.1.3 COMPLETE — This is a substate of RETICLE POD ACCESSING STATUS and is active when all
known activity, as defined by the ReticleTransferJob service, for the reticle pod has completed, or the PodComplete
service has been received, and the reticle pod has been closed. The reticle pod may be unloaded from the
equipment.
RETICLE POD ID STATUS
ID NOT READ
WAITING FOR
HOST ON ID
STATUS
ID
VERIFICATION
OK
ID VERIFICATION
FAILED
2
7
6
8
9
12
3
RETICLE POD SLOT MAP
STATUS
SLOT MAP NOT
READ
WAITING FOR
HOST ON SLOT
MAP STATUS
SLOT MAP
VERIFICATION
OK
SLOT MAP
VERIFICATI
ON FAILED
13
15
14
16
RETICLE POD
A
CCESSING STATUS
18
IN
A
CCESS
NOT ACCESSED
17
RETICLE POD LOCKING
STATUS
NOT LOCKED
LOCKED
24
POD
1
4
5
29
C
10
11
NOT
A
VAILABLE
AVAILABLE
20
c
19
COMPLETE
21
23
22
RELEASED
A
ND
LOCKED
HOLD
c
26
25
27
28
30
Figure 2
Reticle Pod State Model Diagram
10.4.3.1.2 RETICLE POD LOCKING STATUS — This is a substate of RETICLE POD and indicates the current
status of the pod with respect to removability.
10.4.3.1.2.1 NOT LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there
are no physical or logical mechanisms that prevent removal of the reticle pod by an external entity.
10.4.3.1.2.2 LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there are
physical mechanisms that prevent removal of the reticle pod by an external entity. It has two substates RELEASED
AND LOCKED and HOLD.
10.4.3.1.2.2.1 RELEASED AND LOCKED — This is a substate of LOCKED and is active when the pod may be
released by the equipment.