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SEMI F81-1103 © SEMI 2003 11 NOTICE: SEMI makes no warranties or repr esentations as to th e suitability of the stand ards set forth herein for any particular application. The determination of the suitability of th e sta…
SEMI F81-1103 © SEMI 2003 10
Figure 9
Angular Misalignment
Figure 10
Downslope
SEMI F81-1103 © SEMI 2003 11
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
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SEMI F82-0304 © SEMI 2004 1
SEMI F82-0304
SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER /
MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS
DISTRIBUTION SYSTEMS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the Japanese Gases & Facilities Committee. Current edition approved by the Japanese Regional Standards
Committee on November 20, 2003. Initially available at www.semi.org February 2004; to be published
March 2004.
1 Purpose
1.1 This standard establishes the properties and
physical dimensions of mass flow controllers and mass
flow meters for 1.125 inch type surface mount gas
distribution systems.
2 Scope
2.1 This document includes common requirements,
layout, size, detailed specifications, and dimensions of
the components.
2.2 This standard applies to all mass flow controllers
and mass flow meters. The components are mounted
on substrates with fasteners accessible from the top.
2.3 This standard only applies to components, which
control flow of ≤ 50 slm nitrogen equivalent at 308 kPa
(44.7 psia). This standard also only applies to
components with operating pressures less than 3445
kPa (500 psia) at 20°C.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This standard only addresses the component; it
does not address the seals, the sealing system, or the
assembly process and does not guarantee the
performance of the sealing system. The user should be
aware that gas delivery system performance and sealing
system performance are addressed elsewhere in the
SEMI standards.
3.2 The user should be aware that alternative
technologies are commercially available.
3.3 International, national, and local codes, regulations,
and laws should be consulted to ensure that the
equipment meets regulatory requirements in each
location of use.
4 Referenced Standards
4.1 SEMI Standards
SEMI E49.9 — Guide for Ultrahigh Purity Gas
Distribution Systems in Semiconductor Manufacturing
Equipment
SEMI F20 — Specification for 316L Stainless Steel
Bar, Extruded Shapes, Plate, and Investment Castings
for Components Used in High Purity Semiconductor
Manufacturing Applications
4.2 ASME Standards
1
ASME Y14.5 — Dimensioning and Tolerancing
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 components for surface mount — a gas
distribution system component having inlets and outlets
located on the bottom of the component with the
attachment mechanism accessible from the top.
5.1.2 Ra — roughness average. The arithmetic average
of the absolute values of the measure profile height
deviations taken within the sampling length and
measured from the graphical centerline.
5.1.3 two fastener configuration — the component has
two fasteners per sealing point. The sealing point is
located in the middle of the two fasteners.
6 Common Requirements
6.1 Dimensional Requirements — All components
shall meet the requirements outlined in Figure 1. All
geometric dimensioning and tolerancing complies with
ASME Y14.5 and/or the applicable ISO standard.
1 American Society of Mechanical Engineers. Three Park Avenue,
New York, NY 10016-5990, USA. Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America). Website: www.asme.org