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SEMI E49.6-1103 © SEMI 1995, 2003 1 SEMI E49.6-1103 GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS This guide was technically approved by the Global Ga ses Com mittee and is the direct resp…

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SEMI E49.5-0298 © SEMI 1995, 1998 4
8 Component Guidelines
8.1 For component leak rate and c ycle life
requirements, see Section 7.
8.2 Valves should be springless, packless, metal
diaphragm type with all metal bonnet seals.
8.3 Regulators should be threadless, packless type
with all metal bonnet seals.
8.4 Regulators and valve flow coefficient (C
v
) should
be selected based on liquid flow requirements and
liquid characteristics.
8.5 Mechanical fittings should be all metal face seal
type with solid nickel gaskets.
8.6 Pressure transducers should be used in place of
bourdon tube pressure gauges.
8.7 Filters should be PTFE media rated at 0.05 µm
pore size.
8.8 Check valves should be disk poppet type.
9 Subsystem Assembly Gui delines
See SEMI E49.6 for recommended SS system assembly
procedures.
10 Related Documents
10.1 SEMATECH Documents
3
SEMASPEC 90120400B — Test Method for
Determination of Surface Roughness by Contact
Profilometry for Gas Distribution System Components
SEMASPEC 90120403B — Test Method for XPS
Analysis of Surface Composition and Chemistry of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
SEMASPEC 90120573B — Test Method for AES
Analysis of Surface and Oxide Composition of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
3 SEMATECH, Technology Transfer Department, 2706 Montopolis
Drive, Austin, TX 78741
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E49.6-1103 © SEMI 1995, 2003 1
SEMI E49.6-1103
GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES -
STAINLESS STEEL SYSTEMS
This guide was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on September 3, 2003. Initially available at www.semi.org October 2003; to be published
November 2003. Originally published in 1995.
NOTICE: This document was completely rewritten in
2003.
1 Purpose
1.1 The objective of this document is to establish
standard guidelines for cleanroom activities specific to
the manufacturing, assembly, testing, and integration of
materials and components used in stainless steel
semiconductor manufacturing equipment.
2 Scope
2.1 This standard has been developed as a guide for the
assembly and testing of high purity and ultrahigh purity
gas and solvent subsystems.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI C3.42 — Standard for Argon (Ar), VLSI Grade,
Bulk (Provisional)
SEMI C59 — Specifications and Guidelines for
Nitrogen
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEMI F27 — Test Method for Moisture Interaction and
Content of Gas Distribution Systems and Components
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F58 — Test Method for Determination of
Moisture Dry-Down Characteristics of Surface-
Mounted and Conventional Gas Distribution Systems
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F70 — Test Method for Determination of
Particle Contribution of Gas Delivery System
SEMI F78 — Practice for Gas Tungsten Arc (GTA)
Welding of Fluid Distribution Systems in
Semiconductor Manufacturing Applications
SEMI F81 — Specification for Visual Inspection and
Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid
Distribution Systems in Semiconductor Manufacturing
Systems
3.2 ASTM Documents
1
ASTM F 1397 — Standard Test Method for
Determination of Moisture Contribution by Gas
Distribution Systems Components
3.3 ISO Documents
2
NOTE 1: Refer to the latest version of the following
documents for general cleanroom protocol.
ISO 14644-1 — Cleanrooms and Aassociated
controlled environments Part 1: Classification of air
cleanliness.
ISO 14644-2 — Cleanrooms and associated controlled
environments Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1.
ISO 14644-4 — Cleanrooms and associated controlled
environments Part 4: Design, construction, and startup.
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 See Section 4 of SEMI E49.
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555, Website:
www.astm.org
2 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,
Website: www.iso.ch
SEMI E49.6-1103 © SEMI 1995, 2003 2
5 Facility Guidelines
5.1 Gowning Area Class 10,000/1,000 (ISO Class 7/6)
for HP/UHP — All personnel working in cleanrooms
should wear paper booties prior to entering the gowning
area. Personnel should wear polyester gowns, hood, and
boots, pure latex or nitrile gloves (no talc), and safety
glasses before entering clean areas.
5.2 Materials Staging Area Class 10,000/1,000 (ISO
Class 7/6) for HP/UHP — Materials used in the
cleanroom should have the outer bag removed and the
inner bag wiped down with cleanroom wipes saturated
with a 50/50, 30/70, or 10/90 IPA/DI mix in the
materials staging area prior to entry into the cleanroom.
5.3 Assembly/Test Area Class 100 (ISO Class 5) for
HP and UHP — Welding cleanroom requirements must
be met per SEMI F78
5.4 Packaging Area Class 100 (ISO Class 5) for HP
and UHP
6 Utility System Guidelines
6.1 Purge Gases — Argon or nitrogen must be used for
purging gas systems during assembly and for testing,
using cryogenic source. Particle filtration should be
99.99999% removal of 0.003 µ m particles.
• Argon quality should meet the requirements of
SEMI C3.42.
•
Nitrogen quality should meet the requirements of
SEMI C59.
7 Materials Procedures
7.1 Procedures for Incoming Materials and
Components (Component Suppliers)
7.1.1 Identification Guidelines
7.1.1.1 Every deliverable item should have some
scheme of positive and permanent identification, so that
traceability is provided from the steel melt source to the
final metal finishing and packaging through site
installation.
7.1.1.2 This identification should provide
nondestructive post installation traceability.
7.1.1.3 Clearly visible labeling (without the need to
open the package) should be provided at each level of
packaging.
7.1.2 Packaging and Shipping Guidelines
7.1.2.1 Double bagging should be required. Multiple
inner bags are acceptable.
7.1.2.2 The inner bag should be cleanroom compatible
and should prevent damage from normal handling.
7.1.2.3 Vacuum sealing or dry inert gas purging should
be used on the inner bag.
7.1.2.4 The ends of the component should be protected
using some noncontaminating method.
7.1.2.5 The outer bag may be any suitable material.
7.1.3 Documentation
7.1.3.1 Components should be identified by lot number
or serial number.
7.1.3.2 Initial testing shall be conducted to qualify new
designs and processes including changes, as applicable.
The component manufacturer shall establish a
procedure for periodic monitoring of the manufacturing
process to ensure continual compliance to requirements
as noted in this guide. Documentation records must be
kept available for inspection for at least one year.
7.1.3.3 The equipment supplier should be responsible
for maintaining and supplying, upon request,
documentation that proves their components meet the
user’s materials performance requirements.
7.2 Receiving
7.2.1 All incoming material should be segregated from
“acceptable material” until it has been formally
accepted through documented procedure.
7.2.2 All cartons should be opened (100%); all goods
should be checked visually for damage (e.g., torn bags,
inadequate padding causing damage).
7.2.3 Material should be stored in original packaging.
Do not open until ready to use or inspect. Inspection
involving opening sealed plastic bags should be
conducted within the materials staging cleanroom.
After inspection, purge and heat-seal the material into a
clean polyethylene bag.
7.2.4 Any material failing initial inspection should be
immediately “red tagged” and set aside in a
“quarantine” area until the supplier of the material is
notified and disposition is determined.
7.3 Acceptance and Rejection of Incoming Material
7.3.1 All material should be identified by lot number or
serial number, allowing traceability back to source
documentation. All material should be identified with a
heat code, allowing traceability back to the raw material
heat. Only material so marked should be accepted.
7.3.2 All material should meet a purchasing
specification and be provided with documentation
demonstrating compliance. Only material so
documented should be accepted.