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SEMI F78-0304 © SEMI 2003, 2004 11 (a) Preferred. (b) Alternate. Figure 3 All Couponing Shall Use th e System ID Purge Gas

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SEMI F78-0304 © SEMI 2003, 2004 10
B
egin Production
Welding
Verify correct welding power
supply and weld head, collets,
electrodes, etc.
Yes
Is equipment
working properly?
Yes
Set up procedure to deal
with hazard. Reference
SEMI Standards.
Yes
Fix it, call technician,
or return to factory.
Are there any hazardous
materials or operations?
N
o
N
o
Do all materials conform to
specifications? Tubing, fittings,
cleaned and faced? Electrode
t
yp
e,
g
as
p
urit
y
,
p
ur
g
e set-u
p
?
Get proper materials
and material specs.
Submit test welds for
testing. Document results
and record all variables
on proper forms.
N
o
Has Weld Procedure Been Qualified?
Are Welders Certified?
Make Qualification Test
welds for WPS, PQR,
P
Q
R Per Section 7.
N
o
Yes
Yes
Yes
Make Sample Test Welds using
cleaned and faced coupons of
same alloy, material heat and
dimensions to be welded.
Examine Sample Welds on OD for weld
bead appearance, joint contamination,
Joint soundness, surface oxidation,
discoloration, pitting, cracking, defects
of fit-up and workmanship.
Section coupons and inspect ID surface
visually for penetration, bead concavity,
b
ead variation, and oxidation.
Is weld acceptable?
Determine
and fix cause
of problem
First sample weld is onsite
work sample. Document all
variables. Identify and save
all coupons.
Enter
required
information
in coupon
log.
N
o
Verify correct
OD, ID purge
flowrates and
ID pressure.
At start or end
of shift or after
a change in
procedure. See
Section 11.
Weld Inspection
100% Visual of OD
surface of all welds.
ID inspection of all
accessible welds;
cut-out statistically
significant sample
for inspection.
Repair or cut out previous
welds
p
er Sectio
n
13.4.
Is weld acceptable?
Maintain Weld
Log for all welds
N
o
Yes
Figure 2
Welding Procedure Flow Chart
SEMI F78-0304 © SEMI 2003, 2004 11
(a) Preferred.
(b) Alternate.
Figure 3
All Couponing Shall Use the System ID Purge Gas
SEMI F78-0304 © SEMI 2003, 2004 12
Figure 4
Tube Facing to Remove Distorted Material
Figure 5
Weld Fit-Up Gap Not to Exceed 0.003 in. (0.08 mm)