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SEMI S2-0703a E © SEMI 1991, 2004 87 R14-8.3.2 Fail-to-safe Eq uipment Control System With Co mbined Network For Standar d And Fail-to- safe Communic ation — In Figure s R14-5 and R14-6 t he standard network and sa fety …
SEMI S2-0703a
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© SEMI 1991, 2004 86
Figure R14-4
Fail-To-Safe Equipment Control System with Dual Network for Standard and Fail-To-Safe Communication
and Combined Controller
SEMI S2-0703a
E
© SEMI 1991, 2004 87
R14-8.3.2 Fail-to-safe Equipment Control System With Combined Network For Standard And Fail-to-safe
Communication — In Figures R14-5 and R14-6 the standard network and safety network have been combined into
one physical network. The standard controller and the safety controller can physically be consolidated into one
single unit. A combined network system is composed of technology that allows the non-safety-related and safety-
related communication to function on the same bus cable. Standard I/O, safety I/O and combined standard/safety
I/O can all connect to the network.
Figure R14-5
Fail-To-Safe Equipment Control System with Combined Network for Standard and Fail-To-Safe
Communication and Combined Controller
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E
© SEMI 1991, 2004 88
Figure R14-6
Fail-To-Safe Equipment Control System with Combined Network for Standard and Fail-To-Safe
Communication and Separated Controller