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SEMI E54.11-0301 © SEMI 2001 17 Table 22 A ssembl y -EPD #3 Object Data List Data Inde x Source Objec t ID Source Attri bute ID Descr iption 1 EPD1 A12 Device Manager Exceptio n Statu s 2 EP D2 SacA65 SAC Numbe r of Endp…
SEMI E54.11-0301 © SEMI 2001 16
8.6 Assembly-EP Objects — Assembly-EP objects inherit attributes, services, and behavior from the Assembly
object. The Assembly object is the device component that provides a mechanism of grouping more than one
attribute from one or more objects into a single data structure for communication over the network.
Table 18 identifies the Assembly-EP objects defined for the EPD device.
Table 18 Assembly List
Object Access
Network
Required Form
Assembly-EPD#1 R Yes Status; Default Assembly
Assembly-EPD#2 R No Value, Reading Valid
Assembly-EPD#3 R No Status, Number of Endpoint Objects and Value (Values ≤ 1024)
Assembly-EPD#4 R No Status, Exception Detail Alarm and Exception Detail Warning
8.6.1 Assembly-EP Objects Attributes — Table 19 provides a list of attributes common to all Assembly-EP object
types.
Table 19 Assembly-EP Object Attributes
Attribute Name Attribute
Identifier
Access
Network
Required Form
Data (See NOTE 1.) A1 RW Yes Structure as defined below.
NOTE 1: Inherited from the Assembly object as shown in Figure 1.
8.6.1.1 Data Attribute Format for Assembly-EP Objects — The Data attribute of all Assembly-EP objects is a
structured attribute containing an ordered list of attributes within its structure. In the following tables (20 through
23), the structure of the Data attribute for each of the Assembly-EP object types is defined.
Table 20 Assembly-EPD #1 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 EPD1 A12 Device Manager
Exception Status
Table 21 Assembly-EPD #2 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 EPD3 SbithepA16 Sensor-BI-TH-EP #1
Value
Reading Valid
SEMI E54.11-0301 © SEMI 200117
Table 22 Assembly-EPD #3 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 EPD1 A12 Device Manager
Exception Status
2 EPD2 SacA65 SAC
Number of Endpoint Objects
3 EPD3 SbithepA16 Sensor-BI-TH-EP #1
Value
4 EPD3 SbithepA16 Sensor-BI-TH-EP #2
Value
. EPD3 SbithepA16 Sensor-BI-YH-EP #3 to Sensor-BI-TH-EP #N-1
Value
N ≤ 1024
(See NOTE 1.)
EPD3 SbithepA16 Sensor-BI-TH-EP #N
Value
NOTE 1: ‘N’ is the value of the Sensor-BI-EP object attribute “Number of Endpointing Objects”. Note also that the number of endpoints
reported in an assembly is fixed throughout the life of the device, and is specified by the manufacturer.
Table 23 Assembly-EPD #4 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 EPD1 A12 Device Manager
Exception Status
2 EPD1 A13 Device Manager
Exception Detail Alarm
3 EPD1 A14 Device Manager
Exception Detail Warning
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SEMI E54.12-0701
E
© SEMI 20011
SEMI E54.12-0701
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SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR CC-LINK
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Global Information and Control Committee. Current edition
approved by the North American Information and Control Committee on April 30, 2001. Initially available
at www.semi.org May 2001; to be published July 2001.
E
This standard was editorially modified in September 2001 to correct a typographical error and the omission
of a required disclaimer. Section 2.3 was added and changes were made to Section 7.6.2.6.
1 Purpose
1.1 This specification is part of the SEMI
Sensor/Actuator Network (SAN) suite of standards and
defines a specific communications protocol based on
the CC-Link standard. This Network Communication
Standard (NCS) taken together with the SEMI
Sensor/Actuator Network standard suite and the CC-
Link standard completely and unambiguously defines
an open standard providing an industry specific solution
to off-the-shelf interoperability of networked devices in
semiconductor manufacturing equipment.
1.2 CC-Link is a vendor independent, open device
level network standard. Vendor independence and
openness are guaranteed by the CC-Link Partner
Association.
2 Scope
2.1 This document specifies a SAN communications
standard based on the CC-Link specification that is in
compliance with SEMI E54.1. As such, it specifies the
protocol, services and behavior that compliant
intelligent devices must support in order to interchange
information over this SAN in a method compatible with
SEMI E39.
2.2 In conjunction with a SEMI standard SAN
Common Device Model (CDM) specification and one
or more SEMI standard Specific Device Model (SDM)
specifications (e.g., for a mass flow controller), this
Network Communication Standard (NCS) with the
related CC-Link standard describe the data structures,
interactions and behavior that are characteristic of the
various devices on the network. This composite model
forms a complete interoperability standard for
communications among intelligent sensors, actuators
and controllers in semiconductor manufacturing
equipment.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor
equipment SAN based solely on CC-Link; thus, a
complete specification of this standard necessarily
includes the CC-Link specifications. There are other
semiconductor equipment SAN communications
options. The specifications for these options are not
included here.
3.2 The specifications within are strictly enhancements
that provide additional capabilities over and above
those currently required by CC-Link. Included
throughout this document, primarily in Section 6, is
information paraphrased from the CC-Link
specifications — such as: protocol structure,
capabilities, options and limitations. This information is
provided here for reference only and is not intended to
provide specification definitions. In all such areas, refer
to the CC-Link specification documents for
information. This document is limited to describing
enhancements or limitations to the CC-Link
specification that are imposed by this standard.
3.3 A complete specification of the conformance
testing procedure shall include the CC-Link protocol
conformance testing specification. Conformance
testing shall also include enhancements and limitations
to the CC-Link specification required by this standard.
4 Referenced Standards
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts,
Behavior and Services
SEMI E54.1 — Sensor/Actuator Network Common
Device Model
SEMI E54.3 — Specification for Sensor/Actuator
Network Specific Device Model for Mass Flow Device