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SEMI E105-0701 © SEMI 2000, 2001 14 R2-2 Scenario 2 — Si mul ator Based Scheduler/D ispatcher, St ocker is Not Managed by Scheduling Component R2-2.1 L ot 1 is scheduled f or equipment 2. Lot is trans ported directly fro…

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SEMI E105-0701 © SEMI 2000, 200113
FO checks the logistic condition.
(1) Start time of Lot-1 on EQ2 (10:00).
(2) EQ2 is ready to load.
(3) Lot-1 has arrived at Operation 20.
If all conditions are OK, FO issues the Macro Command
(1) Source : STK-2
(2) Destination : Port-1 of EQ2
(3) Carrier-1
At 09:55
13: P1 Start
14: P1 Complete
7: Macro Command (Carrier-1)
8: Complete
11: Macro Command (Carrier-1)
12: Complete
9: Estimated transport time inquiry from STK2 to EQ2
10: Estimated Time (5min)
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-2
Scenario Case 1 Continued
SEMI E105-0701 © SEMI 2000, 2001 14
R2-2 Scenario 2 — Simulator Based Scheduler/Dispatcher, Stocker is Not Managed by Scheduling Component
R2-2.1 Lot 1 is scheduled for equipment 2. Lot is transported directly from Eqp1 to Eqp 2. Factory Operations
makes the carrier delivery decisions.
S/D provides the next Lot
information for EQ2.
S/D sends dispatch list.
Lot-1 / EQ2 / Start at 10:00
/ Receipe-A
STK1 STK2
Operation 10 -----------> Operation 20
EQ1 EQ2
Lot-1 processing in EQ1 is finished at 09:40.
<Scheduling Result>
10:00 11:00 12:00 13:00 14:00
EQ2 <-------------> <---------------------> <----------->
Lot-1 Lot-2 Lot-3
FO does not send the Macro Command
to MTSC. Because
(1) Lot-1 has not arrived at Operation 20
1:
4: ActivityForecast(Lot 1, Equipment 2, Start at 10:00)
5: Ready to Unload (Lot-1)
3: forecastForMaterialGroupByTime(Lot 1)
At 9:30
2: Ready to Load (EQ2)
At 09:40
6: Inquiry Estimated Transport Time
7: Estimated Transport Time (15 min)
S/D - Scheduling
Component
FO - Factory Operations
Component
MTSC - Material Transport
& Storage Component
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
MTSC keeps the historical data
of transportation time between
each source and destination of
Micro Transfer Command. The
estimated transport time is
calculated using the historical
data.
Figure R2-3
Scenario Case 2
SEMI E105-0701 © SEMI 2000, 200115
FO checks the logistic condition.
(1) Start time of Lot-1 on EQ2 (10:00).
(2) EQ2 is ready to load.
(3) Lot-1 has arrived at Operation 20.
If all conditions are OK, FO issues the Macro Command to MTSC
(1) Source : Port-1 of EQ1
(2) Destination : Port-1 of EQ2
(3) Carrier-1
10: P1 Start
11: P1 Complete
At 09:45
FO checks the condition to issue
Macro Command to MTSC.
(1) Lot-1 start time is 10:00
(2) It is 9:40 (Before 09:45)
(3) Next EQ2 is ready to load.
(4) Lot-1 has arrived at Operation 20.
FO decides to keep Lot-1 on Port-1
of EQ1 until 09:45.
8: Macro Command (Carrier 1)
9: Complete
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-4
Scenario Case 2 Continued