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SEMI E36-0704  1995, 2004 9 • Attribute Title, consistin g of the short form of the attribute which appears in the documents, and the attribute Name; • Attribute usage, describin g how that at tribute is used; • For eac…

SEMI E36-0704  1995, 2004

6.2 Maintenance of Semiconductor Equipment

Manufacturing Information Tagging - This base portion

of the SEMI E36 specification is intended to be debated

and balloted once and change little over time.

Additional parts of the specification will contain the

actual information models that describe the markup to

be used. New information models may be proposed at

any time. Such models will be distributed, discussed,

and balloted individually or in small groups, in the form

of one or more SEMI E36 modules, as they are created.

Modules that are approved will be appended to

Semiconductor Equipment Manufacturing Information

Tagging. The documentation will be changed and

balloted in parallel, to match any changes in the models.

6.2.1 Module Library - A growing module library

containing all approved modules will be maintained,

adding modules as additional subject areas and

document types are defined. Once a module has been

approved, it will be provided as part of Semiconductor

Equipment Manufacturing Information Tagging. Place-

holding modules may be introduced into the library that

are designated as “Temporary”, for use only until a

formal analysis and balloting process can provide a

more appropriate module. Initially modules will be

XML and SGML DTDs and DTD fragments. As XML

alternative modeling syntaxes such as schema become

supported by software, these may be used to

supplement SEMI E36 information models.

6.2.2 Modules - Each module will be given a unique

short name (to be used as a file name), a version

number, and a unique public identifier written

according to the rules of ISO 8879 and incorporating

the version number.

File names will be all lower case, constructed by

concatenating the following, in order:

• A 3- to 8-character descriptive name;

• A hyphen;

• The file type as “xml” or “sgml”;

• A period; and

• A 3-character descriptive extension that defines the

type of file (such as “dec”, “sgm”, etc.) These

extensions will be defined in the Tag Library.

Each module will contain:

• An initial comment which names the module, states

the purpose of the modules, types the modules as

Temporary or Implemented, and states how the

module should be integrated with other modules;

• A growing change history comment that describes

(in sedimentary order; that is, the most recent at the

top) all modifications made to the model. Each

item in the change history should be numbered,

dated, provide a description of the change, give a

brief rationale, and name the changing agent.

• Whatever syntax is employed, internal comments

should be used throughout the module to name and

describe the elements and provide information that

may not be stated directly in the syntax used.

6.2.3 Consolidated Tag Library - A single,

consolidated Tag Library will be maintained which will

describe the elements, attributes, and entities defined in

all the modules. Each description will contain

sufficient detail to indicate the meaning and correct

usage of the data markup. The library (or changes to

the library) will be reissued whenever a module is

added or modified in a way that affects any of the

elements, attributes, or entities.

Modules should use elements (tags) that are already in

the Tag Library wherever the definition of the element

matches the need. If the definition of an existing tag

does not meet the need, a new tag should be created.

A diagram of the structure of each element will be

included in the Tag Library, except for elements that

are empty, contain only character data, or contain a

simple “or” group in which all contents may appear at

any point in the model.

For each element, the Tag Library will contain:

• Element Title, consisting of its Tag and Name;

• Definition in clear, plain English, including

description of intended use and application when

appropriate;

• Remarks (if needed);

• Related Elements (if needed);

• For each Source, or module in which the element is

defined:

• Attributes Associated with the Element (if

any);

• The model of the Element in SGML syntax

and narrative form;

• Presentation information (if needed);

• Formatted examples of the element (if

needed);

• Tagged examples of the elements (if needed);

and

• The Name of the Source, or module in which

the element is defined.

For each Attribute, the Tag Library will contain:

SEMI E36-0704  1995, 2004

• Attribute Title, consisting of the short form of the

attribute which appears in the documents, and the

attribute Name;

• Attribute usage, describing how that attribute is

used;

• For each possible value of an attribute with a

specified set of values, the meaning or implications

of each value; and

• The default value of the attribute.

6.3 Creation of More Specific Authoring or Rendering

Models - The DTDs and models described in

Semiconductor Equipment Manufacturing Information

Tagging will not be designed for optimal use in

document creation. To create and display documents,

data creators may wish to create more enforcing

authoring models based on this markup. Such authoring

models may:

• Require the presence of specific elements;

• Specify the sequence of elements; and/or

• Include additional elements for internal use (which

would need to be removed before interchange). For

example, such information might include elements

for tracking the internal authoring and validation

processes or for company-confidential information.

Similarly, it is likely that viewing, print rendition,

search and retrieval, or other display applications will

create display-only models based on Semiconductor

Equipment Manufacturing Information Tagging. To

load display tools, it is quite likely that the specified

models will be transformed into a form that is

optimized for the particular search and retrieval or

display system. Such display models might:

• Resequence the data;

• Add additional markup such as “container” tags

around structures to be considered one element for

formatting purposes;

• Transform the form of some elements; or

• Remove parts of the information that are not

relevant to a particular application.

7 Related Documents - SEMI Content

Standards and Specifications

As described in section 2.4, the following list contains

examples of SEMI content-related or content guideline-

related standards and specifications.

SEMI C16 — Guide for Precision Reporting/Data

Traceability

SEMI D9 — Definitions for Flat Panel Display

Substrates

SEMI D13 — Terms and Definitions for FPD Color

Filter Assemblies

SEMI E6 — Facilities Interface Specifications

Guideline and Format

SEMI E10 — Standard for Definition and Measurement

of Equipment Reliability, Availability, and

Maintainability (RAM)

SEMI E29 — Standard Terminology for the Calibration

of Mass Flow Controllers and Mass Flow Meters

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E35 — Cost of Ownership for Semiconductor

Manufacturing Equipment Metrics

SEMI E58 — Automated Reliability, Availability, and

Maintainability Standard (ARAMS): Concepts,

Behavior, and Services

SEMI G57 — Guideline for Standardization of

Leadframe Terminology

SEMI M10 — Standard Nomenclature for Identification

of Structures and Features Seen on Gallium Arsenide

Wafers

SEMI P22 — Guidelines for Photomask Defect

Classification and Size Definition

SEMI P29 — Guideline for Description of

Characteristics Specific to Halftone/Attenuated Phase

Shift Masks and Mask Blanks

SEMI P30 — Practice for Catalog Publication of

Critical Dimension Measurement Scanning Electron

Microscopes (CD-SEM)

SEMI S1 — Safety Guideline for Visual Hazard Alerts

SEMI S7 — Safety Guidelines for Environmental,

Safety, and Health (ESH) Evaluation of Semiconductor

Manufacturing Equipment

SEMI S13 — Safety Guidelines for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI T6 — Procedure and Format for Reporting of

Test Results by Electronic Data Interchange (EDI)

SEMI E36-0704  1995, 2004

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.