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SEMI E81-0600 © 1999, 2 000 20 7.2.17.3 Run-time Responsibilities o f R e c ip e Management C o mponent • Work wi th Production Machine com pone nt and other recipe controllers to select, dow nload and modify recipes. • …
SEMI E81-0600 © 1999, 200019
7.2.16.3 Run-time Responsibilities of Production
Machine Component
• Initiate and execute production machine jobs to
perform specific process operations (and recipes)
on specific material (process groups). Here are the
steps to initiating and executing production
machine jobs:
1) Validate the production machine job:
compatibility and availability of the material in the
process group, process capability of the equipment,
proper machine state, valid and available recipe or
process specification, necessary operator skills, etc.
2) Equipment setup: recipe download and select,
launch advanced process control (APC)
calculation, make operator and APC-recommended
adjustments, configure equipment and sensors
according to data collection plans.
3) Initiate processing.
4) Monitor process operation:
• Collect process run data from equipment,
add-on sensors and operator entry according
to data collection plans.
• per machine and per process resource.
• Store in process run histories.
• Event management: capture, interpret,
record and respond to equipment events,
fault detection events and other process
anomalies.
• Monitor equipment operation and state
(from the equipment tracking and
maintenance component) as another source
of information on process operation.
• Generate MES-level (machine) events and
alarms.
• Track material within machine and record
with process run histories and product
histories.
5) Complete processing.
• Execute post-processing tasks for the
process operation.
• Generate job completed events and invoke
“inform job completed” method on job
requestor.
• Sequence steps between machines and machine
resources (for that sequence logic that is not
covered by embedded equipment control).
• Implement recipe control and recipe agent
functionality as defined in SEMI E42 - Recipe
Management Standard. Integrate with factory-level
recipe namespace functionality in the CIM
Framework Recipe Management component.
• Job accountability: account for and report material
yield loss in material management component and
equipment productivity loss in equipment tracking
component.
• Interact with Material Transport and Storage
component and loadport for material hand-off
handshake protocols.
• Manage and monitor equipment when idle.
7.2.17 Responsibilities of Recipe Management
Component
7.2.17.1 The Recipe Management component provides
a capability for applying machine recipes across the
factory. Recipes for multiple machines of the same
process capability using the same recipe syntax are
managed by specializing the recipes based on specific
machine settings. The Production Machine component
is responsible for merging the recipe with machine-
specific data and run-time data (such as Advanced
Process Control component recommendations for recipe
settings) into an executable recipe and for downloading
it to the equipment or selecting and modifying it in the
equipment. The Recipe Management component also
works with Recipe Executors and Recipe Agents
(terminology from SEMI E42) implemented in the
Production Machine component, in the equipment, or
elsewhere.
7.2.17.2 Build-time Responsibilities of Recipe
Management Component
• Build process recipes.
• Generic.
• Specific to a machine type (same process
capability and recipe syntax).
• Including identification of variable parameters
in recipe.
• Use document management and version control
for change management and effectivity.
• Define, configure and initialize recipe namespaces.
NOTE 12: Including this responsibility under “build
time” does not imply that all recipes are built at MES
system build time. Recipes may be built after the MES
system is running.
SEMI E81-0600 © 1999, 2000 20
7.2.17.3 Run-time Responsibilities of Recipe
Management Component
• Work with Production Machine component and
other recipe controllers to select, download and
modify recipes.
• Implement resource effectivity control (manage
when and to what material and machines to apply
recipe changes).
7.2.18 Responsibilities of Advanced Process Control
Component
7.2.18.1 The Advanced Process Control component
(defined in SEMI E93) supports the Production
Machine component execution of production machine
jobs by optimizing machine-specific settings for the
current material and machine state to achieve desired
process effects. It also detects faults in processing and
recommends an appropriate response to the Production
Machine component. Advanced Process Control
strategies can include statistical process control, model-
based process control, multi-variate analysis, trace
analysis, fault pattern matching, or any other
appropriate mechanism. The internal design of the
Advanced Process Control component allows
integrating different types of analysis and computation
mechanisms and their execution environments into a
single control strategy.
7.2.18.2 Build-time Responsibilities of Advanced
Process Control Component
• Define control strategies and associated sensor
processing algorithms, fault detection algorithms
and optimal process control algorithms.
• Define real-time control data structures to support
control algorithms.
• Define data collection plans to acquire control data.
• Define control strategy selection logic.
7.2.18.3 Run-time Responsibilities of Advanced
Process Control Component
• Select a control strategy and associated sensor
processing and analysis algorithms to optimize
processing and detect faults.
• Launch, coordinate and monitor the execution of
data collection plans and control processing and
analysis algorithms.
• Apply algorithm results to recommend process
settings and detected fault response actions (recipe
adjustment, equipment shutdown, maintenance,
rework, etc.).
• Update control data with algorithm results.
• Update control data with equipment and product
material data (current equipment state, material
state, process operation, etc.).
• Record and report control strategy and algorithm
results and recommendations in process run
histories.
7.2.19 Responsibilities of Material Transport and
Storage Component
7.2.19.1 The Material Transport and Storage
component (defined in SEMI E102) supports active and
manual material movement and active and passive
material storage (active storage: stockers, smart racks,
equipment buffers; passive storage: tables, racks). It
executes Transport Jobs and interacts with the
Production Machine components for material handoff
to and from process equipment. The component tracks
and reports on material location and material movement
history. The equipment configuration, tracking and
maintenance functions are the responsibility of the
Equipment Tracking and Maintenance component. For
complicated interbay and intrabay material transport
and storage, there may be multiple instances of the
component -- one for each material movement area --
that cooperate to provide factory-wide material
movement functions.
7.2.19.2 Build-time Responsibilities of Material
Transport and Storage Component
7.2.19.2.1 Note that configuration of the material
transport and storage equipment and its capabilities is
the responsibility of the Equipment Tracking and
Maintenance component.
7.2.19.3 Run-time Responsibilities of Material
Transport and Storage Component
• Support scheduling of material movement and
processing by predicting time for material delivery
to specific locations.
• Execute and monitor transport jobs to move
material groups (transport groups) to specific
locations.
• Validate that the job can be done: the material
is available, the destination is reachable and has
available storage or loadport capacity, there are
sufficient material movement resources (cars,
storage space, etc.) to implement the job.
• Implement the job by scheduling and enacting
actions on internal material movement and
storage resources (cars, turntables, stocker
shelves, etc.).
• Collect and record data on transport job
execution and history.
SEMI E81-0600 © 1999, 200021
• Capture, record, interpret and respond to
equipment events and fault detection.
• Generate MES-level job status events and
material location change events.
• Record and report on material locations and
material movement histories for material in the
system.
• Interact with Production Machine component and
loadport for material hand-off handshake protocols.
7.2.20 Responsibilities of Factory Labor Component
7.2.20.1 The Factory Labor component (defined in
SEMI E86) implements the generic Factory Resource
architecture (see Section 7.3.3) applied to factory
personnel resources. It represents personnel, their
capabilities (skills) and skill maintenance (training), and
their assignment to other factory resources (to machines
and areas) and jobs. The Factory Labor component
integrates with access security services (in the Factory
Services group) to associate personnel with roles,
identity authentication (e.g. system login passwords)
and access authorization.
7.2.20.2 Build-time Responsibilities of Factory Labor
Component
• Configure the Person resource model.
• Each Person’s name, identification, department,
role, etc.
• Each Person’s initial skills and authorization to
perform jobs and access data.
• Each Person’s initial assignment to other
factory resources (such as specific machines or
factory areas).
• Each Person’s medical qualifications.
• Define skill maintenance tasks and what triggers
them.
7.2.20.3 Run-time Responsibilities of Factory Labor
Component
• Track and report the Person skills, authorization
and assignments and record these in Person
histories.
• Support assignment of Persons to factory jobs and
monitor and record job progress (from the
perspective of the Person’s role).
• Monitor skill maintenance triggers (such as expired
skill certification) and recommend skill
maintenance jobs.
• Execute triggered skill maintenance jobs.
• Change Person capabilities (before and after
training).
• Execute and monitor skill maintenance jobs
(training, certification testing) and report job
progress.
• Record skill maintenance triggers and job
results in person skill maintenance histories.
• Collect and report person and skill performance
(utilization and effectiveness).
• Maintain relationships between persons and system
security for identity authentication and
authorization.
7.3 Common Architectural Patterns
7.3.1 This section documents architecture patterns that
serve to functionally integrate CIM Framework
components. The material architecture defines
functionality common to Product Management,
Durables Management and Consumables Management
components. The factory resource architecture defines
relationships and common functionality of factory
resources. The job architecture defines a factory-wide
model of controlling factory operations.
7.3.2 Material Architecture
7.3.2.1 The Product Management, Durables
Management and Consumables Management
components all share a common architecture for
identifying, grouping and locating materials. Figure 6
illustrates the common material interface architecture.
7.3.2.2 Material has an identification, history, location,
inventory region and associations to material containers
that may contain it. Material can also be in multiple
material groups that physically (same location or
carrier) or logically (same lot, same process batch, same
product family, etc.) associate material. Specializations
of material include products, durables and consumables.
Specializations of material groups include product
groups, lots, process groups and transport groups.