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SEMI F79-0703 © SEMI 2003 7 8.76 J.M. Harris, et. al. “Etching Cha racteristics of Silicon Carbide in Hydrogen.” Jl.E.C.S., 116 (3), Mar. 1969, 380. 8.77 X. Wang, et al. “Gas-Phase Silicon Etching with Bromine Trifluo ri…

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SEMI F79-0703 © SEMI 2003 7
8.76 J.M. Harris, et. al. “Etching Characteristics of
Silicon Carbide in Hydrogen.” Jl.E.C.S., 116 (3), Mar.
1969, 380.
8.77 X. Wang, et al. “Gas-Phase Silicon Etching with
Bromine Trifluoride.” Proc.Transducers ’97, 1997
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SEMI F79-0703 © SEMI 2003
8
APPENDIX 1
GASES BY CATEGORY
NOTICE: The material in this appendix is an official part of SEMI F79 and was approved by full letter ballot
procedures on April 11, 2003.
SEMI Gas # Chemical Name Category Symbol Formula Synonym
6.1 Inert
4 Argon 1 Ar Ar
1 Helium 1 He He
5 Krypton 1 Kr Kr
2 Neon 1 Ne Ne
3 Radon 1 Rn Rn
6 Xenon 1 Xe Xe
6.2 Hydrogen 2
14 Deuterium 2 D2 H
2
2
D2
7 Hydrogen 2 H2 H
2
159 Tritium 2 T2 H
2
3
T2
6.3 Hydrocarbons 3
345 1,3,5,7-Octatetraene 3 C8H10
CH
2
=CHCH=CHC
H=CHCH=CH
2
343 1,7-Octadiyne 3 C8H10
HC≡C(CH
2
)
4
C≡C
H
344 2,6-Octadiyne 3 C8H10
CH
3
C≡CCH
2
CH
2
C
≡CCH
3
342 3-one-2,5-dimethyl hexadiene 3 C8H10
CH
2
=C(CH
3
)C≡C
C(CH
3
)CH
2
178 4-Methyl, 1-Pentene 3 C6H12
(CH
3
)
2
CHCH
2
CH=
CH
2
331 Acetaldehyde Methoxy 3 C3H6O2 CH
3
OCH
2
CHO
184 Acetone 3 C3H6O CH
3
COCH
3
332 Acetone, Hydroxy 3 C3H6O2 CH
3
COCH2OH Acetol
42 Acetylene 3 C2H2
HC≡CH
Ethyne
66 Allene 3 C3H4 CH
2
=C=CH
2
Propadiene
197 Benzene 3 C6H6 C
6
H
6
100 Butadiene 3 C4H6 CH
2
=C=CHCH
3
Methylallene
117 Butane 3 C4H10 CH
3
(CH
2
)
2
CH
3
271 Butanol-1 3 C4H10O
CH
3
CH
2
CH
2
CH
2
O
H
336 Butanol-2 3 C4H10O
CH
3
CH
2
CH(OH)C
H
3
104 Butene 3 C4H8 CH
3
CH
2
CH=CH
2
1-Butene
107 Cisbutene 3 C4H8 CH
3
CH=CHCH
3
Cis-2-Butene
207 Cyclobutane 3 C4H8 C
4
H
8
Tetramethylene