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SEMI C9.1-93 © SEMI 1993, 2002 1 SEMI C9.1-93 (Reapproved 1102) GUIDE FOR ANALYSIS OF UNCERT AINTIES IN GRAVIMETRICALLY PREPARED GAS MIXTURES This guide was technically approved by the Global Ga ses Com mittee and is the…

SEMI C6.2-93 © SEMI 1989, 2002 3

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI C9.1-93 © SEMI 1993, 2002 1

SEMI C9.1-93 (Reapproved 1102)

GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY

PREPARED GAS MIXTURES

This guide was technically approved by the Global Gases Committee and is the direct responsibility of the

North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on July 21, 2002. Initially available at www.semi.org October 2002; to be published November

2002. Originally published in 1993.

1 Purpose

1.1 This document is intended to provide the minimum

criterion for the analysis of uncertainty associated with

preparation and use of gravimetric gas mixtures used

for calibrating analytical instruments to determine

whether various SEMI impurity specification are

satisfied.

2 Scope

2.1 This guideline is intended for preparation of binary

gas mixtures using individual cylinders.

2.2 It is the intent of this document to provide general

guidelines for preparation of calibration gas mixtures in

compliance with ISO 6142, with additional

requirements to meet the needs of the semiconductor

industry.

2.3 This guideline is applicable only to gaseous

components which do not react between themselves or

with the cylinder walls, and to condensable components

which are totally vaporized under the test conditions. It

is not intended for moisture calibration mixtures.

2.4 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Referenced Standards

3.1 ISO Standards

ISO 6142 — Gas Analysis; Preparation of calibration

gas mixtures - weighing methods.

Addendum 1 to ISO 6142 - Annex — Precautions to be

taken when weighing, handling and filling cylinders.

4 Weight Traceability

4.1 The weights used to prepare the gas mixtures or

certify the balance should be Class S1-tested at least

1 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

annually with reference standards traceable to the

National Institute of Standards and Technology or to

another national standards organization.

5 Acceptable Mixture Criteria

5.1 Cylinder — Cylinder must comply with National or

International Codes. The type of cylinder used for

containment of the gas mixture may affect the stability

of the mixture. Historical and experimental data should

be requested from the supplier on the stability of similar

mixtures. The cylinder material should be chosen based

on its compatibility with the gas mixture.

5.2 Valve — The recommended valve should be

packless type valve and the constuction materials

selected according to their compatibility with the gas

mixture.

5.3 Homogenous Mixture — The cylinder and its

contents should be at room temperature prior to use.

The cylinder mixture components must be mixed to

insure a homogenous mixture.

5.4 Stability — The gas mixture will have a

demonstrated stability within the acceptable relative

uncertainties given in Section 6 for a period of 1 year.

The minimum useful pressure should be in accordance

with the suppliers recommendations.

5.5 Balance Gas Purity — The balance gas should be

determined to contain less than 1% of the relative

concentration for the minor component.

5.6 Minor Component Purity — The product used for

the minor component addition should be analyzed to

verify its composition.

5.7 Analysis — Confirmation analysis of the

calibration mixture should be performed to determine if

any gross weighing errors occurred.

6 Acceptable Relative Uncertainties

6.1 Using the ISO procedures the acceptable maximum

relative uncertainties for the component of interest are

given below.

Concentration Range Relative

Uncertainty

Standard Concentrations > 1000 ppm 2%

Standard Concentrations ≤ 1000 ppm > 100 2%

Standard Concentrations ≤ 100 ppm > 10 5%

Standard Concentrations ≤ 10 ppm ≥ 1 10%

7 Report

7.1 The composition of the mixture should be reported

including the relative uncertainty for a given mixture.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.