semi合集-English.pdf - 第72页

SEMI E6-0303 © SEMI 1982, 2003 18 to act as a specification for the discha rged fluid. For example: • chemical waste—caustic • chemical waste—acidic • chemical waste—fluoride • chemical waste—solvent • chemical waste—slu…

SEMI E6-0303 © SEMI 1982, 2003 17

Data Sheet 600 – Bulk Chemicals (See SEMI E6 Section 14)

600 Bulk Chemicals

A B C D E F G H

Equipment

Component

Bulk

Chemicals

Connection

Number

Connection

Label on

Equipment

Utility

Type

Line Source Purity

Requirements

Contaminants Minimum

Pressure

text text text text text text text kPa

600 Bulk Chemicals

I J K L M N O P

Maximum

Pressure

Maximum

Pressure

Fluctuation

Minimum

Pressure

Differential

Idle

Average

Flow

Process

Average Flow

Maximum

Flow

Maximum

Temperature

Equipment

Component

Fitting Size

kPa kPa kPa kPa lpm lpm lpm mm or inches

600 Bulk Chemicals

Q R S T U V W X

Equipment

Component

Fitting

Material

Equipment

Component

Fitting Type

Double

Containment

Equipment

Component

Double

Containment

Fitting Size

Equipment

Component

Double

Containment

Fitting

Material

Equipment

Component

Double

Containment

Fitting Type

Drawing

References

Bulk

Chemicals

Comments

text text yes or no mm or inches text text text text

15 Drains Data Sheet

15.1 Include in the Drains Data Sheet the requested

fluid waste information for equipment connections to

facilities systems. This includes, but is not limited to

industrial waste, drain, collection, storage, reprocessing,

UPW recycle, UPW reclaim, and treatment systems.

15.2 Data Sheet 700, Drains contains the following

items.

15.2.1 Equipment Component (700A) — Enter the

name of the equipment component where the

connection is located. The name should the same name

used in Data Sheet 200 and 300. For example:

Mainframe or Pump.

15.2.2 Drains Connection Number (700B) — Enter a

unique connection number for every utility connection.

For example: 701, 702, 703, and so on.

15.2.3 Connection Label on Equipment (700C) —

Enter the name found on the label that identifies this

physical connection on the equipment. For example

Caustic Waste.

15.2.4 Utility Type (700D) — Enter the fluid

discharged through the connection. The identifying

description is for information only and is not intended

SEMI E6-0303 © SEMI 1982, 2003 18

to act as a specification for the discharged fluid. For

example:

• chemical waste—caustic

• chemical waste—acidic

• chemical waste—fluoride

• chemical waste—solvent

• chemical waste—slurry

• chemical waste—acid rinse

• UPW reclaim

15.2.5 Line Source (700E) — Identify the source of the

drain line for this connection. If the line comes from a

provided component covered in the data sheets enter the

connection number(s) at the other end of the line. If the

line comes from a facilities source enter facilities

system. For example: 703 or facilities system.

15.2.6 Process Name (700F) — Enter the name of the

process the discharged fluids come from in this drain

connected. For example: Photoresist Strip.

15.2.7 Drain Conveyed Process Wastes (700G) —

Enter the specific chemical with typical concentration

of total combined stream and any potential byproducts

that may come through the referenced drain connection.

In particular, identify any discharge that might be

regulated by the semiconductor manufacturers’

discharge permit. For example: sulfuric acid (75%)

combined with H

(15%).

15.2.8 Maximum Discharge Pressure (700H) — Enter

the highest discharge pressure for the equipment

processing cycle. For gravity drains the pressure would

be 0.

15.2.9 Maximum Flow (700I) — Enter the maximum

flow rate (for the equipment processing cycle or idle

condition whichever is greater). Note in the comments

cell if the flow is batch or intermittent, as applicable.

Also note in the comments cell any abnormal situation

requiring an unusual, high flow rate. For example:

Emergency dump rate will be 20 lpm.

15.2.10 Idle Average Flow (700J) — Enter the average

flow rate when equipment is in idle condition.

15.2.11 Process Average Flow (700K) — Enter the

average flow rate over the processing cycle.

15.2.12 Maximum Temperature (700L) — Enter the

maximum expected temperature of the referenced fluid

discharged at the outlet of the equipment.

15.2.13 Equipment Component Fitting Size (700M) —

Enter the line or fitting size of the connection provided

on the equipment component. For example: 6 or 0.25.

In row 2 enter or select the units of measure for the

specified fitting size. For example: mm.

15.2.14 Equipment Component Fitting Material (700N)

— Enter a general description of the fitting material of

the connection provided on the equipment component.

For example: Teflon

15.2.15 Equipment Component Fitting Type (700O) —

Enter the generic style of the fitting of the connection

provided on the equipment component. Be sure to

include type and gender of fitting.. For example: KF or

Female Pipe Thread (FPT).

15.2.16 Drawing References (700P) — Enter

references, such as drawing numbers, for any drawings,

schematics, instructions, jigs or fixtures showing this

connection. For example: connection template XXXXX

and P&ID YYYYYY. Submit referenced material to

equipment purchaser with this data sheet.

15.2.17 Drains Comments (700Q) — Enter any

comments necessary to clarify data provided for this

connection. For example: Drain should be adequately

vented external to the equipment so that the flow during

a batch dump will not create any measurable

backpressure.

Data Sheet 700 – Drains (See SEMI E6 Section 15)

700 Drains

A B C D E F G

Equipment

Component

Drains

Connection

Number

Connection

Label on

Equipment

Utility Type Line Source Process

Name

Drain Conveyed

Process Wastes

text text text text text text text

700 Drains

H I J K L M

Maximum

Discharge

Pressure

Maximum Flow Idle Average

Flow

Process

Average Flow

Maximum

Temperature

Equipment

Component

Fitting Size

kPa lpm lpm lpm degrees C. mm or inches

700 Drains

N O P Q

Equipment

Component Fitting

Material

Equipment

Component Fitting

Type

Drawing References Drains Comments

text text text text

16 Gases Data Sheet

16.1 Include in the Gases Data Sheet the requested

information for equipment connections to facilities

systems including bulk gas supply and process specialty

gas supply. Bulk gases generally run in manifolds

throughout the fab, versus specialty gases that have a

single, direct connection to a cylinder gas cabinet or

panel. Bulk gas supply typically includes house gas

supply systems for Natural Gas, Argon, Hydrogen,

Helium, Nitrogen, Oxygen, Control Dry Air (CDA) or

Oil Free Air (OFA). Do NOT include gas detection

systems connection in this data sheet.

16.2 Data Sheet 800, Gases contains the following

items.

16.2.1 Equipment Component (800A) — Enter the

name of the equipment component where the

connection is located. The name should the same name

used in Data Sheet 200 and 300. For example:

Mainframe or Pump.

16.2.2 Gas Connection Number (800B) — Enter a

unique connection number for every utility connection.

For example: 801, 802, 803, and so on.

16.2.3 Connection Label on Equipment (800C) —

Enter the name found on the label that identifies this

physical connection on the equipment. For example N

Purge.

16.2.4 Utility Type (800D) — Enter the name of gas to

be provided through the connection. SEMI E52 should

be used for naming gases.

16.2.5 Line Source (800E) — Identify the source of the

supply line for this connection. If the line comes from a

provided component covered in the data sheets enter the

connection number(s) at the other end of the line. If the