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SEMI D38-0304 © SEMI 2004 1 SEMI D38-0304 GUIDE FOR QUALITY AREA OF LCD MASKS This guide was technically approved b y the Global Flat Panel Display – Materials & Components Committee and is the direct responsibility …
SEMI D37-0304 © SEMI 2004 1
SEMI D37-0304
SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES
This specification was technically approved by the Global Flat Panel Display – Materials & Components
Committee and is the direct responsibility of the Japanese Flat Panel Display – Materials & Components
Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004.
Initially available at www.semi.org February 2004; to be published March 2004.
1 Purpose
1.1 This specification defines standard outer and inner
dimensions, stand off, minimum transmittance, and
strength of pellicle film used for masks.
2 Scope
2.1 These dimensions apply to pellicle for masks that
are principally used in fabricating liquid crystal
displays. The mask size specifies range from 330 × 450
mm to 520 × 800 mm.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D6 — Specification for Edge Length and
Thickness for Liquid Crystal Display (LCD) Mask
Substrates
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 stand off — a certain distance on a mask or
reticle to a membrane.
5 Ordering Information
5.1 Ordering information shall be discussed between
suppliers and users.
6 Requirements
6.1 Pellicle Size — Pellicle Size shall be defined as
shown in Table 1.
6.2 Minimum Transmittance — Average transmittance
shall be 94.5% or more within the range of wave length
of 360–440 nm.
6.3 Measurement Condition for Pellicle Film Strength
6.3.1 Not to be broken by air blow
6.3.2 Air nozzle diameter: 1 mm
6.3.3 Air pressure: 3 kg/cm
2
6.3.4 Distance from air nozzle to film: 5 cm
6.3.5 Air blow time: 5 sec.
Table 1 Pellicle Size (mm)
Mask Size Outer Diameter Inner Diameter Stand O
ff
330 × 450 294 427 283 416 5.9
348 582 334 568 5.9
390 × 610
353 592 340 580 5.9
520 × 610 474 592 460 578 5.9
500 × 750 436 732 418 724 7.0
520 × 800 474 782 456 768 5.9
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D38-0304 © SEMI 2004 1
SEMI D38-0304
GUIDE FOR QUALITY AREA OF LCD MASKS
This guide was technically approved by the Global Flat Panel Display – Materials & Components Committee
and is the direct responsibility of the Japanese Flat Panel Display – Materials & Components Committee.
Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially
available at www.semi.org February 2004; to be published March 2004.
1 Purpose
1.1 This guide defines the quality area of LCD masks.
2 Scope
2.1 This guide applies to masks that are principally
used in fabricating liquid crystal displays. The mask
size specifies range from 202.8 × 202.8 mm to 700 ×
800 mm.
2.2 Substrates with an edge length less than 200 mm
follow the specifications for a semiconductor mask (see
SEMI P1).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D6 — Specification for Edge Length and
Thickness for Liquid Crystal Display (LCD) Mask
Substrates
SEMI P1 — Specification for Hard Surface Photomask
Substrates
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
None.
5 Quality Area of LCD Masks
5.1 For Mask Size ≤ 550 × 650 mm:
10 mm from (peripheral) edge of blanks
5.2 For Mask Size > 550 × 650 mm, ≤ 700 × 800:
20 mm from (peripheral) edge of blanks
5.3 The quality area should be within the area of the
writing pattern.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D39-0704 © SEMI 2004 1
SEMI D39-0704
SPECIFICATION FOR MARKERS ON FPD POLARIZING FILMS
This specification was technically approved by the Global Flat Panel Display – Color Filter & Optical
Elements Committee and is the direct responsibility of the Japanese Flat Panel Display – Color Filter &
Optical Elements Committee. Current edition approved by the Japanese Regional Standards Committee on
April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004.
1 Purpose
1.1 Markers on FPD polarizing films, originally used
for indicating optical direction of the films, have
expanded the variety of products, such as identification
for both sides of films, and for equipment. This also
complicated the variety of shapes and colors for
markers.
1.2 This standard establishes specification for unifying
markers used for indicating direction of FPD polarizing
films.
1.3 This specification may be applied to manufacturing
process, quality control, and designing of Liquid
Crystal Display (LCD) panel.
2 Scope
2.1 This document specifies markers on FPD
polarizing films.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 None.
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Requirements
5.1 Markers on FPD polarizing films shall be used for
indicating specific direction of the films.
5.2 Markers Specification
5.2.1 Makers shall be simple sign on the specific
location of protective film, as follows:
Circle:
Triangle:
Arrow:
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.