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SEMI F39-0699 © SEMI 1999 3 be expressed in the same mann er as BCDS 7.5.2 MTBF Mean T ime Betwee n Fa ilures should be expressed in the same mann er as BCDS 8 Qualification Methods 8.1 Pu rity The purity of the equ …
SEMI F39-0699 © SEMI 1999 2
6.4 In-line Blending The process of chemical
blending where the chemical constituents are combined
in line and are immediately available for use.
7 Performance Characteriza tion
7.1 Blending Repeatability :
7.1.1 Batch Blending
7.1.1.1 Sample Collection: A sample of at least thirty
batches of blended chemical is taken. Assay of this
chemical is measured.
7.1.1.2 Calculations: The mean and standard deviation
of the batches are computed.
7.1.1.3 Reporting: When reporting repeatability, either
of two methods is acceptable. Both methods quote
precision in terms of the chemical assay.
7.1.1.3.1 Repeatability at one concentration = mean ±
3σ (where=σ is in units of concentration)
7.1.1.3.2 Repeatability in range of concentrations:
Individually calculate percent relative standard
deviation at 3σ = (3σ / mean) × 100% for representative
concentrations within the desired range (30 samples for
each concentration, calculate a standard deviation and
mean for each concentration). Repeat largest percent
relative standard deviations at 3σ=and concentration
range examined or report percent relative standard
deviation at 3σ for each individual concentration.
7.1.1.3.3 Multiple Components: If more than one non-
aqueous chemical constituent exists in the blend, the
precision for each must be quoted individually.
7.1.2 In-Line Blending
7.1.2.1 Sample Collection: At least thirty samples of
blended chemical are taken. The time interval between
samples must be at least one hour. Assay of this
chemical is measured.
7.1.2.2 Calculations: The mean and standard deviation
of the samples are computed.
7.1.2.3 Reporting: When reporting repeatability one of
two methods is acceptable. Both methods quote
precision in terms of the chemical assay.
7.1.2.3.1 Repeatability at one concentration = mean ±
3σ (where=σ is in units of concentration)
7.1.2.3.2 Repeatability in range of concentrations:
Individually calculate percent relative standard
deviation at 3σ = (3σ / mean) × 100% for representative
concentrations within the desired range (30 samples for
each concentration, calculate a standard deviation and
mean for each concentration). Repeat largest percent
relative standard deviations at 3σ=and concentration
range examined or report percent relative standard
deviation at 3σ for each individual concentration.
7.1.2.3.3 Multiple Components: If more than one non-
aqueous chemical constituent exists in the blend, the
precision for each must be quoted individually.
7.2 Blending Accuracy
7.2.1 Since calculation of accuracy takes into account
both equipment operational parameters (calibration
frequency and drift) and also changes in chemical input
(feed forward blending), calculation of blend accuracy
will not be standardized. However, by definition, a
reported accuracy can not be less than blend precision.
7.2.2 Reporting of Accuracy
7.2.2.1 Accuracy at one concentration = desired
concentration ± 3σ
7.2.2.2 Accuracy in range of concentrations: Report
range of concentrations where this accuracy applies and
the accuracy in terms of a percentage of the chemical
concentration. Report accuracy with statistical
significance of 3σ.
7.3 Production Rate
7.3.1 All production rates described should reference
the duty cycle, i.e. the percentage of time that the
equipment is operating to achieve the quoted
production rate.
7.3.2 Batch Production Rate = batch volume / time to
produce one batch (hours) × 24 hours × duty cycle
7.3.3 In-line Production Rate = flow rate (volume
/day) of blended chemical × duty cycle
7.4 Purity
7.4.1 Particles Particle performance should be
expressed in the same manner as BCDS (i.e. < x
particles / ml @ > 0.y µm)
7.4.2 Trace Metals Metallic purity performance
should be expressed in a similar manner as BCDS.
However, blending systems, by definition, have several
source materials, which could include water. Each
source material contributes to the “baseline
contamination level” (equivalent to drum contamination
level in BCDS). A volumetric combination (based on
the volumetric combination of source materials) of the
contamination levels should be used to construct the
baseline contamination level.
7.4.3 Ionic Contamination / TOC Should be
expressed in a similar manner as BCDS.
7.5 Uptime
7.5.1 MTBA Mean Time Between Assists should
SEMI F39-0699 © SEMI 19993
be expressed in the same manner as BCDS
7.5.2 MTBF Mean Time Between Failures should
be expressed in the same manner as BCDS
8 Qualification Methods
8.1 Purity The purity of the equipment will be
qualified in a similar manner to that of BCDS.
8.2 Assay The assay of each of the chemical
constituents (c
mean,blend
) should be compared to that of
the customers upper (UCL
specification
) and lower
(LCL
specification
) control limits for the chemical assay.
The customer specification must be expressed as their
desired 3σ limits. The standard deviation for the blend
(σ
blend
) should be determined by the same method
described for determining blending repeatability. The
number of batches or samples to determine this
standard deviation should be agreed upon by the
equipment supplier and the customer. The blending
unit shall be deemed qualified when both of the
following are satisfied for all constituents.
8.2.1 UCL
specification
> C
mean, blend
+ 3σ
blend
8.2.2 LCL
specification
< C
mean,blend
- 3σ
blend
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F40-0699 © SEMI 19991
SEMI F40-0699
PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION
COMPONENTS FOR CHEMICAL TESTING
This practice was technically approved by the Global Facilities Committee and is the direct responsibility of
the North American Facilities Committee. Current edition approved by the North American Regional
Standards Committee on December 18, 1998. Initially available on www.semi.org January 1999; to be
published June 1999.
1 Purpose
1.1 This document defines component preparation and
pretreatment procedures for chemical test methods used
to evaluate liquid chemical distribution system
components.
2 Scope
2.1 This document includes preparation procedures
that can be applied to components such as tubing,
piping, valves, regulators, fittings, gaskets, O-rings, and
filter housings.
2.2 This document defines and specifies all of the
component pretreatment and analyze preparation
procedures for liquid chemical distribution system
components common to the test methods listed (see
Table 3). Each type of component should be pretreated
and prepared according to the procedures of this
document before it can be tested using the identified
chemical test methods.
2.3 This document defines preparation and
pretreatment procedures used for the evaluation of
liquid chemical distribution system components in test
fluids. This practice is intended for use with 49% HF,
30% H
2
O
2
, 29% NH
4
OH, IPA and ultrapure water. The
document defines the purity of chemicals that can be
used for leaching and rinsing liquid chemical
distribution system components.
3 Limitations
3.1 Although ozonated water is commonly used in
ultrapure water systems, no provisions are made in this
document for evaluations using ozonated water.
Therefore, some of the procedures may not be directly
applicable to ozonated water.
3.2 The preparation procedures described in this
practice primarily involve static testing including
agitation. Dynamic testing, i.e., continuous flow, may
alter the chemical test results. Static component
preparation procedures are not directly applicable to
dynamic testing.
3.3 This preparation procedure applies to ambient
temperature only with the exception of ultrapure water
which may be tested at ambient temperature and up to
85°C.
3.4 Filter cartridges are not covered in this document
due to the requirement for dynamic testing.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 Acronyms and Abbreviations
5.1.1 DSC differential scanning calorimetry
5.1.2 FEP fluorinated ethylene-propylene
5.1.3 FTIR — Fourier transform infrared spectroscopy
5.1.4 H
2
O
2
— hydrogen peroxide
5.1.5 HF — hydrofluoric acid
5.1.6 IPA — Isopropyl alcohol
5.1.7 NH
4
OH — ammmonium hydroxide
5.1.8 NVR — nonvolatile residue
5.1.9 PE — polyethylene
5.1.10 PFA — perfluoroalkoxy
5.1.11 PP — polypropylene
5.1.12 PVDF — polyvinylidene fluoride
5.1.13 TGA thermal gravimetric analysis
5.1.14 TOC — total organic carbon
5.1.15 UPW — ultrapure water
5.2 Definitions
5.2.1 blank extraction A container of test fluid
which does not see the component under test. It follows
the entire procedure and is handled in the same manner
in order to show the background of the lab or test area.