semi合集-English.pdf - 第5960页
SEMI P41-0304 E © SEMI 2004 20 </ImageT argetPosition> <ExpressionMark>square box</ExpressionMark> < / I m a g e T a r g e t > </ImageData> < / R e f e r e n c e > <InspectionStartP…
SEMI P41-0304
E
© SEMI 2004 19
<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>21444</ImageReferencePosition_X>
<ImageReferencePosition_Y>130444</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "TopLeft">
<ImageTargetPosition unit = "micron">
<ImageTargetPosition_X>256</ImageTargetPosition_X>
<ImageTargetPosition_Y>256</ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</Reference>
<Reference origin = "Mask Origin Point">
<ReferencePointName>reference2</ReferencePointName>
<ReferencePosition unit = "micron">
<ReferencePosition_X>130700</ReferencePosition_X>
<ReferencePosition_Y>130700</ReferencePosition_Y>
</ReferencePosition>
<ImageData>
<ImageReferenceAdress>C:\image\reference2.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>500</ImageMagnification>
<ImagePixelNumber_X>512</ImagePixelNumber_X>
<ImagePixelNumber_Y>512</ImagePixelNumber_Y>
<ImagePixelSize unit = "micron">
<ImagePixelSize_X>1</ImagePixelSize_X>
<ImagePixelSize_Y>1</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination> transmission</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>130/256</ImageContrast>
<ImageBrightness>130/256</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "MaskOrigin">
<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>130444</ImageReferencePosition_X>
<ImageReferencePosition_Y>130444</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "TopLeft">
<ImageTargetPosition unit = "micron">
<ImageTargetPosition_X>256</ImageTargetPosition_X>
<ImageTargetPosition_Y>256</ImageTargetPosition_Y>
SEMI P41-0304
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© SEMI 2004 20
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</Reference>
<InspectionStartPosition origin = "MaskOrigin" unit = "Micron">
<InspectionStartPosition_X>26700</InspectionStartPosition_X>
<InspectionStartPosition_Y>26700</InspectionStartPosition_Y>
</InspectionStartPosition>
</InspectionTool>
</DefectInspection>
</BasicInformation>
<InspectionResut>
<Summary>
<InspectionSummary beginning_date = "13:30:00 03-sep-2003" ending_date = "17:30:00 03-sep-2003">
<InspectionRecipe recipe_name = "recipe1">
<InspectionModeInformation>Algorithm1-000 Algorithm2-000</InspectionModeInformation>
</InspectionRecipe>
<InspectionDetectionSummary>
<TotalDefect>2</TotalDefect>
<ClassifyDefect defect_type = "spot">1</ClassifyDefect>
<ClassifyDefect defect_type = "pinhole">1</ClassifyDefect>
</InspectionDetectionSummary>
<InspectionOperator>SEMI-J</InspectionOperator>
<ReticleJudgment>repair</ReticleJudgment>
</InspectionSummary>
<RepairSummary beginning_date = "18:00:00 03-sep-2003" ending_date = "18:30:00 03-sep-2003">
<RepairTool tool_name = "REPAIR000" tool_no = "002">
<ToolCoordinateInformation>
<CoordinateSystem>TopLeft_0</CoordinateSystem>
<ToolOriginPointInformation>
<ToolOriginPoint>Stage Left Top</ToolOriginPoint>
<ToolOriginPosition unit = "millimeter">
<ToolOriginPosition_X>0</ToolOriginPosition_X>
<ToolOriginPosition_Y>0</ToolOriginPosition_Y>
</ToolOriginPosition>
</ToolOriginPointInformation>
<ToolStageCorrectionInformation>
<ToolStageCorrection unit = "ppm">
<ToolStageCorrection_X>250</ToolStageCorrection_X>
<ToolStageCorrection_Y>120</ToolStageCorrection_Y>
</ToolStageCorrection>
<ToolStageSkew unit = "radian">
<ToolStageSkewCorrection>0.5</ToolStageSkewCorrection>
</ToolStageSkew>
</ToolStageCorrectionInformation>
<MaskOriginPointInformation>
<MaskOriginPoint>center</MaskOriginPoint>
<MaskOriginPosition unit = "micron">
<MaskOriginPosition_X>0</MaskOriginPosition_X>
<MaskOriginPosition_Y>0</MaskOriginPosition_Y>
</MaskOriginPosition>
<ToolOffset unit = "millmetor">
<ToolOffset_X>0</ToolOffset_X>
SEMI P41-0304
E
© SEMI 2004 21
<ToolOffset_Y>0</ToolOffset_Y>
</ToolOffset>
</MaskOriginPointInformation>
<ToolStageAccuracy unit = "Millmetor">10</ToolStageAccuracy>
</ToolCoordinateInformation>
</RepairTool>
<RepairMethod>FIB</RepairMethod>
<DirectionInformation>
<ReferenceMark>BottomCenterID</ReferenceMark>
<MaskRotation>0</MaskRotation>
<MaskMirror>none</MaskMirror>
<MaskFlip>Film Side Up</MaskFlip>
</DirectionInformation>
<NumberRepairProcessing>
<TotalRepairProcess>1</TotalRepairProcess>
<ClassifyPrepairProcess defect_type = "spot">1</ClassifyPrepairProcess>
</NumberRepairProcessing>
<RepairOperator>SEMI-J</RepairOperator>
<RepairJudgment>OK</RepairJudgment>
</RepairSummary>
<EvaluationSummary beginning_date = "19:00:00 03-sep-2003" ending_date = "20:00:00 03-sep-2003">
<EvaluationTool tool_name = "REVIEW000" tool_no = "003">
<ToolCoordinateInformation>
<CoordinateSystem>center_0</CoordinateSystem>
<ToolOriginPointInformation>
<ToolOriginPoint>StageCenter</ToolOriginPoint>
<ToolOriginPosition unit = "millimetor">
<ToolOriginPosition_X>0</ToolOriginPosition_X>
<ToolOriginPosition_Y>0</ToolOriginPosition_Y>
</ToolOriginPosition>
</ToolOriginPointInformation>
<ToolStageCorrectionInformation>
<ToolStageCorrection unit = "ppm">
<ToolStageCorrection_X>193</ToolStageCorrection_X>
<ToolStageCorrection_Y>193</ToolStageCorrection_Y>
</ToolStageCorrection>
<ToolStageSkew unit = "micron">
<ToolStageSkewCorrection>10</ToolStageSkewCorrection>
</ToolStageSkew>
</ToolStageCorrectionInformation>
<MaskOriginPointInformation>
<MaskOriginPoint>center</MaskOriginPoint>
<MaskOriginPosition unit = "millimetor">
<MaskOriginPosition_X>0</MaskOriginPosition_X>
<MaskOriginPosition_Y>0</MaskOriginPosition_Y>
</MaskOriginPosition>
<ToolOffset unit = "millimetor">
<ToolOffset_X>1.5</ToolOffset_X>
<ToolOffset_Y>-2.0</ToolOffset_Y>
</ToolOffset>
</MaskOriginPointInformation>
<ToolStageAccuracy unit = "micron">20</ToolStageAccuracy>
</ToolCoordinateInformation>
</EvaluationTool>