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SEMI E32-0997 © SEMI 1994 , 1997 6 Object — Webster's defin e s an object as “ something perceptible.” In the sof t ware w o rld, an object is a combination of attributes and behavior. It may refer to something con …

SEMI E32-0997 © SEMI 1994, 19975

Standardized objects are supported by an attribute definition table with the following column headings:

Attribute Name Definition Access Reqd Form

The formal text name of

the attribute.

Description of the information contained. RO or RW Y or N Any valid form.

(See below.)

Access — RO (Read Only) or RW (Read and Write) to

indicate the access that users of the service have to the

attribute.

Reqd — A “Y” or “N” in the Required (Reqt) column

indicates if this attribute must be supported in order to

meet fundamental compliance for the service.

Form — Indicates the format of the attribute. (See

Section 4.5.2 for definitions.)

2 Definitions

The following definitions are arranged in alphabetical

order. Some are defined using terms defined elsewhere

within this section. Please reference such definitions as

needed. No references beyond this section should be

necessary for a basic understanding of these terms.

Active Transfer Partner — (Opposite of Passive

Transfer Partner) A transfer partner is considered active

when it physically participates in the micro level

portion of the transfer, either by moving the transfer

object or by moving impediments within the transfer

envelope (e.g., doors, clamps). This term refers to the

micro level transfer phase only, and not to any setup

activities prior to the transfer (e.g., a port door may be

opened during setup phase by passive partner).

Atomic Transfer — The basic unit of movement. The

transfer of a single transfer object from Equipment A

directly to Equipment B where only one change in

ownership occurs.

Compound Transfer — Combination of two or more

atomic transfers executed sequentially or concurrently

to achieve a single goal (e.g., exchange carriers or move

a carrier between process machines using a transfer

agent).

Dynamic Port — (Opposite of Static Port) A port with

associated mechanisms capable of assisting with the

physical movement of a transfer object or of interfering

with the transfer of an object during the transfer. Such

mechanisms may include doors, elevators, and robot

arms. A transfer partner using a dynamic port for the

transfer may be active or passive as required.

NOTE 1: The concepts of “dynamic” and “static” are

associated with a port rather than equipment, as equipment

may have both dynamic and static ports.

Equipment — Mechanical entity in the factory which

plays a role in the manufacturing process. The

equipment referenced in this document include

machines used for processing, transport, and/or storage

of material (see definition of material).

Host — In the context of material movement, the host

is an entity, generally separate from either transfer

partner, which coordinates and supervises a transfer

job.

Interactive Transfer — A transfer in which both

partners are active and must interact in the performance

of the transfer.

Interfering — A dynamic port is interfering when any

of its associated mechanisms are positioned where they

are capable of physically obstructing the transfer.

Macro Level — Level of material movement that

involves coordination by the host but may not require

knowledge of the physical process used to accomplish

the material transfer.

Material — A term used interchangeably with “transfer

object” to refer to discrete objects which may be

transferred to and from equipment. This may include

product, carriers, reusable fixtures, etc. See transfer

object definition.

Material Location — A physical position on a piece of

equipment at which a transfer object may reside. Many

material locations may be accessed directly through a

port, but this is not a requirement. Some material

locations internal to the equipment may not be

accessible by a transfer agent.

Message Service/Service — A service (or a message

service) represents a set of functions offered to a user

by a provider. An unconfirmed service consists of a

sequence of service primitives — the request from the

sender to the communications facility and an indication

to the receiver from the communications facility. Each

of these service primitives is described by a list of

parameters. A confirmed service adds a response to the

initial request. The primitives for a response are called

the response and the confirmation. A service excludes

definition of message structure and protocol.

Micro Level — Level of material movement

characterized by peer-to-peer interaction of the transfer

partners to achieve synchronization of the detailed

mechanical steps of material transfer.

SEMI E32-0997 © SEMI 1994, 1997 6

Object — Webster's defines an object as “something

perceptible.” In the software world, an object is a

combination of attributes and behavior. It may refer to

something concrete, such as a transfer object, or to a

concept, such as a transfer job.

Ownership — An equipment is said to “own” a transfer

object from the time the object is transferred into one of

its ports until it is transferred out of the equipment. This

indicates that the equipment has physical control of the

transfer object.

Passive Transfer — A transfer that involves one active

and one passive partner. During a passive transfer, the

active partner retains control of the transfer envelope

during the entire physical transfer.

Passive Transfer Partner — (Opposite of Active

Transfer Partner) A transfer partner is considered

passive when it takes no part in the physical micro level

transfer, moving nothing within the transfer envelope.

This term refers to the physical micro level transfer

phase only. Setup activities prior to the transfer may be

performed by a Passive Transfer Partner (e.g., a port

door may be opened during setup phase).

Port — A point on the equipment at which a change of

equipment ownership of a transfer object occurs. A port

is not itself a material location, but shall have an

associated location. A port may be thought of as an

access point to an a material location on an equipment.

The definition of the term port includes any dedicated

mechanisms that either prepare for, facilitate, or are

capable of interfering with the transfer. All equipment

shall have a minimum of one port.

NOTE 2: While they are of use to the host system, the

commonly used designations “Input Port” and “Output Port”

are irrelevant in the context of this document. They are based

on a flow of material through an equipment rather than the

movement of transfer objects (which may be carriers rather

than the material itself). Transfer objects may have to be

moved into and out of both these types of ports.

Receiving Port — For a specific transfer, the port into

which a transfer object is to be placed.

Sending Port — For a specific transfer, the port from

which a transfer object is to be removed.

Static Port — (Opposite of Dynamic Port) A port with

no associated mechanisms capable of assisting or

interfering with the transfer of an object. A transfer

partner utilizing a static port for the transfer shall

always be passive.

Transfer Agent — An equipment specialized to the

transport of material from one equipment (or storage

area) to another.

Transfer Envelope — The three-dimensional space

occupied during the transfer by the transfer object and

all associated transfer mechanisms of both transfer

partners. This defines the space in which transfer

activity occurs and in which the potential for physical

interference with the transfer exists.

Transfer Job — The set of atomic transfers

constructed by the host to accomplish a cohesive

material movement objective. See the section on

compound transfers below.

Transfer Object — A physical object that is

transferred to and from equipment, such as a product

material, an empty carrier, or a carrier containing

material to be processed. Tools (e.g., stepper reticles)

and expendable materials also may be transfer objects.

The term “material” is used interchangeably with

“transfer object.”

Transfer Partners — In a given atomic transfer, the

equipment sending a transfer object and the equipment

receiving the transfer object are transfer partners.

Transfer Specification — The list of data provided by

the host to define an atomic transfer.

Transfer System Controller — Entity that is responsible

for management of multiple transfer agents. The

transfer system controller presents a single

communications interface to its host representing these

multiple agents.

3 Overview

Material movement is concerned with the transfer of

objects (WIP, tools, expendable materials, etc.) among

process equipment, buffers, and storage facilities. These

objects may optionally be contained (singly or in mass)

within a carrier. Empty carriers may also be considered

objects.

Material movement may include several different types

of entities. These are divided into two classes: Host and

Equipment. The host is the supervising entity which

organizes the transfer and gives the appropriated

instructions to each equipment involved. An equipment

physically participates in the transfer, either sending or

receiving material. The class of equipment may be

divided into three types:

Process Equipment — Equipment which performs

value-added operations on the factories’ products. This

includes those equipment which physically changes the

product and those which measure/test the product.

Transfer Agent — A type of equipment specialized to

the movement of transfer objects from place to place

within a factory. Transfer agents themselves may be of

different types and with widely-differing

characteristics. These may be fixed-arm robots, robot

arms on a fixed track, AGVs with or without robot

arms, overhead gantries, cars on tracks, or even transfer

systems containing a heterogenous collection of other

transfer agents. Humans also may act as transfer agents.

Storage Areas — A type of equipment used to hold

transfer objects pending further processing (if product)

or use (if reticles, etc.) within the factory. A storage

area may be as sophisticated as an automated WIP Bin

or as simple as a shelf.

3.1 Macro and Micro Levels — Material movement is

separated into two levels. The more abstract level,

called the macro level, consists of all message

transactions used by the host in its coordination role. At

the macro level, the host is responsible for determining

what material is to be moved, from where, to where,

and when. The host shall provide each party involved in

a transfer job with the information necessary to perform

its part of that transfer job.

A transfer job may be composed of multiple handoff

operations, or “Atomic Transfers.” Each atomic transfer

involves only two equipment, termed “Transfer

Partners.” In order to perform this handoff operation,

the transfer partners must achieve a level of

synchronization. The communications between the

transfer partners is called the micro level of material

movement.

These communications occur between the two partners

in a “peer-to-peer” fashion. Micro communications may

be implemented via a direct equipment-to-equipment

connection

or by passing messages indirectly through

the host.

The macro and micro levels are designed to work

together so that the host may initiate the transfer and

then allow the transfer partners to perform the job

interactively. However, these two levels may be used

separately. For instance, the macro level may be

combined with functionality of the SEMI E23 (Cassette

Transfer Parallel I/O Interface Specification) standard.

Additionally, under some conditions there may not be a

host coordinating the transfer. Instead, one of the

transfer partners might be in control. Here, the micro

level may still be used to accomplish the transfer. The

controlling partner would perform the coordination

functions normally in the domain of the host.

In this standard, the macro and micro levels are defined

separately, each with its concepts, behavior, and

services.

2 In this context, connection is intended to mean a direct logical link,

rather than a hard wired connection.

3.2 Ports and Locations — A port may be considered

a point of entry to the equipment. A location is a

receptacle for a transfer object. At any time, a port shall

be linked to at least one location. However, some

locations may be internal and never be linked to a port.

For “typical” factory equipment, there is a permanent

one-to-one correspondence between the port and a

location. However, not all semiconductor equipment

follows this pattern. For instance, the port on a transfer

agent that includes a robot arm and multiple on-board

storage locations is actually the gripper on the robot

arm. The gripper is also a location. In another case, a

port may actually feed a rotating carousel containing

multiple locations. The port in this example would be

the access door to the carousel. The location linked to

this type of port would be the one in front of the door at

transfer time and would change whenever the carousel

rotates. Figure 3.1 helps to illustrate the difference

between ports and locations.

Figure 3.1

Port vs. Location