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SEMI 30.1-0200 © SEMI 1998, 2000 2 14 Scenarios 14.1 Run Level Reporting Scenario 14.2 PP- UPDA TE Remote C o mman d Scenario 14.3 PP-S ELECT Re m ote Command Scenario 14.4 Even t Report and ISEM Table Transfer Command S…

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SEMI 30.1-0200 © SEMI 1998, 20001
SEMI E30.1-0200
INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
This standard was technically approved by the Global Information and Control Committee and is the direct
responsibility of the North American Information and Control Committee. Current edition approved by the
North American Regional Standards Committee on September 3, 1999. Initially available at www.semi.org
November 1999; to be published February 2000. Originally published June 1998.
CONTENTS
1 Purpose
2 Scope
3 Limitations
4 Referenced Documents
4.1 SEMI Standards
4.2 Other References
5 Terminology
5.1 Abbreviations and Acronyms
5.2 Definitions
6 Communication Requirements
7 State Models
7.1 Processing State Model Requirements
7.2 Processing State Model Diagram
7.2.1 Working State for Inspection Equipment Model
7.2.2 Working State for Review Equipment
7.2.3 Working State for Inspection/Review Equipment
7.3 Processing State Definitions
7.4 Processing State Transition Table
8 Collection Event List
8.1 Requirements
9 Variable Items
9.1 Requirements
9.2 Variable Items and Reporting Levels
9.3 Variable Item Types
9.4 Variable Item Dictionary
10 Alarm List
10.1 Alarm List Table
10.2 Alarm ID, Alarm Set/Cleared Event Table
11 ISEM Tables
11.1 ISEM Table Data
11.2 TABLE-DEFs
11.3 Required ISEM Tables
11.3.1 “TABLE-AREA-DEF”
11.3.2 “TABLE-ALIGN-DEF”
11.3.3 “TABLE-ANOMALY-DEF”
11.3.4 “TABLE-M21-ANOMALY-DEF”
11.3.5 “TABLE-STANDARD-DEFECT-DATA-SET-
DEF”
11.4 TABLE-DEF Column Header Descriptions and
Formats
12 Process Program Management
12.1 Definition and Rules for ISEM Process Programs
12.2 Requirements
12.3 Process Program Structure
12.4 Process Program Variable Parameters
12.4.1 Overriding Process Program Variable
Parameters Default Values
12.4.2 Requirements and Rules
12.4.3 Modifying Process Program Variable
Parameters
12.5 Use of Process Programs, Remote Commands,
and “PROCESS-BLD-GROUP”
13 Remote Commands
13.1 Requirements
13.2 Remote Commands Description
13.2.1 Remote Commands and Associated Host
Command Parameters
13.2.2 Host Command Parameters Name and Values
13.2.3 Remote Commands vs. Processing States
SEMI 30.1-0200 © SEMI 1998, 2000 2
14 Scenarios
14.1 Run Level Reporting Scenario
14.2 PP-UPDATE Remote Command Scenario
14.3 PP-SELECT Remote Command Scenario
14.4 Event Report and ISEM Table Transfer Command
Scenario
15 GEM Capabilities
15.1 Requirements
Related Information 1
R1-1 Defect Classification Code Management
R1-1.1 Classification Codes and Defect Classification
R1-1.2 Requirements
R1-2 Reporting Coordinates and Coordinate Systems
R1-2.1 Site Location Accuracy
R1-2.2 Expected or Designed Locations vs. Actual
Locations
R1-2.3 Substrate Coordinate Systems (Unpatterned)
R1-2.4 Substrate Pattern Coordinate System
R1-2.5 Pattern Element Coordinate System
R1-2.6 Parallel Coordinate Systems
R1-2.7 Requirements
R1-3 Coordinate System for a Substrate
R1-3.1 SEMI M20 Coordinate System
R1-3.2 M20P Coordinate System
R1-3.3 Establishing an M20P Coordinate System
R1-4 Layout of Rectangular Pattern Elements on a
Substrate using SEMI M20 Coordinate System
R1-4.1 ISEM “M21” Layouts
R1-5 How an M20P Coordinate System is Established
on a Substrate
Related Information 2 — Application Notes
R2-1 Using ISEM Table Attributes to Specify Process
Related Data Item Variable Values
SEMI 30.1-0200 © SEMI 1998, 20003
SEMI E30.1-0200
INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
This standard was technically approved by the Global Information and Control Committee and is the direct
responsibility of the North American Information and Control Committee. Current edition approved by the
North American Regional Standards Committee on September 3, 1999. Initially available at www.semi.org
November 1999; to be published February 2000. Originally published June 1998.
1 Purpose
1.1 This standard establishes a Specific Equipment
Model (SEM) for Inspection and Review Equipment
(ISEM). The model consists of equipment
characteristics and behavior that are to be implemented
in addition to the SEMI E30 fundamental requirements
and additional capabilities. The intent of this standard is
to facilitate the integration of ISEM equipment into an
automated (semiconductor fabrication) factory. This
document accomplishes this by defining an operational
model for ISEM equipment as viewed by a factory
automation controller. This definition provides a
standard host interface and equipment operational
behavior (e.g., control, state models, data reports, and
reporting levels). Several topics require additional
activity that are within the scope of this standard:
substrate pattern maps; defect classification code
management; and review data management.
2 Scope
2.1 The scope of this standard is li mited to the
definition of Inspection, Review, and Inspection/
Review equipment behavior as perceived by a SEMI
Equipment Communications Standard II (SEMI
E5/SECS-II) host that complies with SEMI E30. It
defines the external view of the equipment through the
SECS link; it does not define the internal operation of
the equipment. This standard expands the SEMI E30
requirements and capabilities in the areas of the
processing state model, remote commands, variable
items, alarms, and data collection.
2.2 This standard is intended for ISEM equipment that
generates data and information about anomalies and
defects found on substrates. Inspection equipment finds
anomalies. Anomalies are occurrences on a substrate
that have been judged to be unexpected, abnormal,
incongruous, or inconsistent. Anomalies may be
examined using review equipment, at which time they
may be classified as defects or non-defects. Some
inspection equipment may generate, and some review
equipment may use, coordinate data to locate anomalies
on a substrate. The accuracy of the coordinate data
generated or used is equipment-dependent.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This document addresses three distinct types of
equipment: inspection, review, and inspection/review.
The term ISEM equipment refers to all three types of
equipment. These three equipment types are
differentiated by the basic functions they perform:
3.1.1 Inspection Equipment that looks for anomalies
on a substrate and reports information regarding those
anomalies. Inspection equipment may determine the
location of anomalies relative to a coordinate system.
Inspection equipment may also provide other types of
data related to the anomaly.
3.1.2 Review Equipment that accepts information
about anomalies on a substrate, gathers information on
those anomalies, and reports that data.
3.1.3 Inspection/Review Equipment having the
characteristics of both inspection and review
equipment.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services
Single-Session Mode (HSMS-SS)
SEMI E58 — Automated Reliability, Availability, and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
SEMI M20 — Specification for Establishing a Wafer
Coordinate System
SEMI M21 — Specification for Assigning Addresses to
Rectangular Elements in a Cartesian Array