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SEMI E102-0600 © SEMI 2000 33 R1-2.2 Scenario T wo — Bas e Scenario for Delivery from Production Equipment to Stocker MTSC reserves and manages AMHS Equipment Capacity(internal ) MTSC determines AMHS route(i nternal) 10:…

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SEMI E102-0600 © SEMI 2000 32
31: setMaterialTrackingLocation(materialTrackingLocation stk9MTL1)
40: setMaterialTrackingLocation(materialTrackingLocation NULL)
41: DurableLocationChangedEvent
42: makeManualControl()
43: MaterialContainerStateChangedEvent
45: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
38: CarrierRemoved (Stocker SEM)
39: Carrier Removed (Internal Interface)
37: removeMaterial(MaterialContainer aaa)
33: removeMaterial(MaterialContainer aaa)
34: addMaterialToTrack(MaterialContainer aaa)
44: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
46: removeFinishedJob(Job TrJob1)
47: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
35: Transfer CommandResumed Event (Stocker SEM)
36: Transfer Command Complete (Stocker SEM)
32: DurableLocationChangedEvent
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-3
Scenario Case 1 (continued)
SEMI E102-0600 © SEMI 200033
R1-2.2 Scenario Two — Base Scenario for Delivery from Production Equipment to Stocker
MTSC reserves and manages AMHS Equipment Capacity(internal)
MTSC determines AMHS route(internal)
10: Transfer Command to Agt1(carrier bbb, src. eq.1, dest. Stk. 2/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt1 (IBSEM)
14: Transfer Command Complete (IBSEM)
17: Transfer Command to Stk. 2 (carrier bbb, src. Stk. 2/Bay_In, dest. Stk. 2/Bay_out)(StockerSEM)
18: Transfer Command Updates from Stk. 2 (Stocker SEM)
19: Transfer Command Complete (StockerSEM)
20: Transfer Command to Ohs1(carrier bbb, src. Stk. 2/Bay_Out, dest. Stk. 4/Bay_In)(IBSEM)
21: Transfer Command Updates from Ohs1 (IBSEM)
24: Transfer Command Complete (IBSEM)
7: makeInTransit()
12: setMaterialTrackingLocation( MaterialTrackingLocation Agt1)
15: setMaterialTrackingLocation( MaterialTrackingLocation Stk.2)
22: setMaterialTrackingLocation( MaterialTrackingLocation Ohs1)
25: setMaterialTrackingLocation(MaterialTrackingLocation Stk.4)
2: requestJob(Jobtype Transport, Priority 1, Deadline Time1, container bbb, SourceMachine eq. 1, SourcePort 1, DestinationMachine stk7)
3: Return Job Handle TrJob1
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
23: DurableLocationChangedEvent
26: DurableLocationChangedEvent
8: MaterialContainerStateChangedEvent
MTSC determines relay
priortiy(internal)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
1: setUnit(unitvalue)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-4
Scenario Case 2
SEMI E102-0600 © SEMI 2000 34
27: Transfer Command to Stk.4 (carrier bbb, src Stk.4/Bay_In, dest. Stk.4/Bay_outf) (StockerSEM)
28: Transfer Command Updates from Stk. 4 (StockerSEM)
29: Transfer Command Complete (StockerSEM)
30: Transfer Command to Ohs2 (carrier bbb, src. Stk. 4/Bay_Out, dest. Stk. 7/Bay_In)(IBSEM)
31: Transfer Command Updates from Ohs2 (IBSEM)
34: Transfer Command Complete (IBSEM)
37: Transfer Command to Stk. 7 (carrier bbb, src. Stk. 7/Bay_in, dest. shelf) (StockerSEM)
38: Transfer Command Updates from Stk. 7 (StockerSEM)
39: Transfer Command Complete(IBSEM)
32: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
35: setMaterialTrackingLocation(MaterialTrackingLocation Stk.7)
43: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
33: DurableLocationChangedEvent
36: DurableLocationChangedEvent
41: MaterialContainerStateChangedEvent
40: makeStored()
42: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
44: removeFinishedJob(TrJob1)
45: JobStateChangedEvent(..previousState JobCompleted, NewState JobUndefined)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-5
Scenario Case 2 (continued)