semi合集-English.pdf - 第2487页
SEMI E87-0705 © SEMI 1999, 2005 56 Table R1-16 Carrier-Out Dequeuing (Cancellation) # Comment Dir Message LTS LRS LCAS 0 Initial condition. 1 Host commands to cancel al l carrier-out services from queue. H->E CancelAl…
SEMI E87-0705 © SEMI 1999, 2005 55
Table R1-14 Abnormal Slot Map Verification 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by production
equipment, and result is Failed.
H<-E WaitingForHost WFH
11 Host commands to return. H->E CancelCarrier
12 Carrier returns to internal buffer.
RTL
NR
NA
IVO
SVF
R1-2.15 Carrier-Out Queuing
R1-2.15.1 Internal Buffer Equipment
R1-2.15.2 Initial condition: Two more carriers are within the production equipment
R1-2.15.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State
R1-15 Carrier-Out Queuing
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to carrier-out #1. H->E CarrierOut
RTL NR NA
2 Carrier-out #1 starts. H<-E TransferBlocked
3 Host commands to carrier-out #2 (Queued). H->E CarrierOut
TB R
4 Carrier-out #1 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
5 Unloading transfer #1 starts. H<-E TransferBlocked
6 Unloading transfer #1 completes.
NR
7 Carrier-out #2 starts.
TB
R
8 Carrier-out #2 completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
9 Unloading transfer #2 starts. H<-E TransferBlocked TB
A
10 Unloading transfer #2 completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.16 Carrier-Out Dequeuing (Cancellation)
R1-2.16.1 Internal Buffer Production equipment
R1-2.16.2 Initial condition: One more carrier-out services are queued, One carrier-out service is active
R1-2.16.3 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State.
SEMI E87-0705 © SEMI 1999, 2005 56
Table R1-16 Carrier-Out Dequeuing (Cancellation)
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to cancel all carrier-out services from
queue.
H->E CancelAllCarrierOut
2 All carrier-out services are canceled from queue.
TB R
3 Current carrier-out service completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
4 Unloading transfer starts. H<-E TransferBlocked TB
A
5 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.17 Carrier Association Cancellation
R1-2.17.1 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-17 Carrier Association Cancellation
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified carrierID,
and reserved for loading.
H->E
H<-E
Bind
Associated
2 Host decides to cancel current carrier delivery.
R A INR SNR
3 Host commands to cancel association. H->E
H<-E
CancelBind
NotAssociated
RTL
NR NA (T) (T)
R1-2.18 Access Mode Change
R1-2.18.1 Initial condition: Access mode = AUTO
R1-2.18.2 Indicated states: AMS = Access Mode State
Table R1-18 Access Mode Change
# Comment Dir Message AMS
0 Initial condition. A
1 Host commands to change access mode to MANUAL. H->E ChangeAccess M
2 Access mode is changed to MANUAL. H<-E Manual
R1-2.19 Load Port Service Status Change
R1-2.19.1 Initial condition: Load port service status = IN SERVICE
R1-2.19.2 Indicated states: LTS = Load Port Transfer State
Table R1-19 Load Port Service Status Change
# Comment Dir Message LTS
0 Initial condition. IS
1 Host commands to change service status to OUT OF SERVICE. H->E ChangeServiceStatus OS
2 Service status is changed to OUT OF SERVICE. H<-E OutofService
SEMI E87-0705 © SEMI 1999, 2005 57
R1-2.201 Correct Carrier Delivery to Wrong Port 1 Scenario
R1-2.20.1 Assumptions: Fixed Load Port Equipment based verification.
R1-2.20.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-20 Correct Carrier Delivery to Wrong Port 1 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified carrierID,
and reserved for
loading.
H->E
H<-E
Bind (lp1)
LP1 Associated
RTL
2 Transfer starts at load
port 2.
H<-E LP2 TRANSFER
BLOCKED
3 Transfer Completes
at load port2.
H<-E Transfer
Complete
R A
NA
INR
4 CarrierID read at load
port 2
Equipment based
verification indicates
the carrier is at the
correct equipment.
H<-E
H<-E
H<-E
LP1 NOT
ASSOCIATED
LP2
ASSOCIATED
IV0
RTL
NR NA
TB
NR
A WFH
SNR
R1-2.21 Correct Carrier Delivery to Wrong Port 2 Scenario
R1-2.21.1 Assumptions: Fixed Load Port Equipment based verification.
R1-21.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-21 Correct Carrier Delivery to Wrong Port 2 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS
A
CIDS
B
CSMS
B
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified
carrierID A, and
reserved for
loading.
H->E
H<-E
Bind (CA,
LP1)
Lp1
Associated
NR NA (T) (T)
2 Load port 2 is
associated with
specified
carrierID B, and
reserved for
loading.
H->E
H<-E
Bind (CB,
LP2)
Lp2
Associated
RTL
2 Carrier A
Transfer starts at
load port 2.
H<-E LP2
TRANSFER
BLOCKED
R
3 Transfer
Completes at
load port2.
H<-E Transfer
Complete
RTL
R A
TB
NR
A
INR SNR
INR SNR