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SEMI E20-0697 © SEMI 1991, 2002 4 Figure R1-1 Example: AC Distri bution/EMO Block Diagr am

SEMI E20-0697 © SEMI 1991, 2002 3

RELATED INFORMATION 1

NOTE: The material contained in these application notes is not an official part of SEMI E20 and is not meant to modify or

supersede it in anyway. Rather, these notes are provided primarily as a source of information to aid in the application of the

standard. As such, they are to be considered as reference material only. The standard should be referred to in all cases.

R1-1 AC Power Distribution

R1-1.1 One method of providing power and EMO

functions to a cluster tool is shown in Figure R1-1 (see

Section 6.1.2). A standby power supply (SPS) or

uninterruptible power supply (UPS) is included to

maintain EMO and selected cluster tool functions in the

event of main power failure. It may be desirable to

include additional circuit breakers in the main power

enclosure if individual module disconnects are needed

at level I in Figure R1-1. Disconnect at level II in

Figure R1-1 is made possible by the module circuit

breakers; SEMI E7, “Electrical Interfaces

Specification,” should be used for loads up to 10 kW.

Additional main power enclosures could be provided

for modules with heavy AC loads, provided that each

main contactor is operated by one common EMO

circuit, however, some user’s safety codes may demand

a single source of supply.

R1-2 Operation of Remote Equipment

R1-2.1 Activation of the EMO shall stop, by fail-safe

means at the tool, the delivery of potentially hazardous

energy (e.g., high voltage, laser) or hazardous material

(e.g., toxic process gas, coolant) to the cluster tool (see

Section 6.1.3).

R1-3 EMO Switch Placement

R1-3.1 The EMO switches on each module (see

Section 6.2.1) need to be placed so that they are

accessible to any person in the vicinity of the cluster

tool. Local safety codes may take precedence in matters

of EMO switch placement. The standard ensures that

each module has at least one EMO switch and that its

operation, when the module is attached, removes power

from the entire cluster tool.

R1-4 EMO Bypass

R1-4.1 Implementation — The functions, specified in

Section 4.2.1, to allow EMO bypass and to ensure that

module power is off when the EMO is removed from

the cluster tool EMO circuit, can be implemented as

shown in Figure R1-2. A relay or switch, operated in

parallel with the dedicated circuit breaker specified in

Section 6.1.2 for the module, provides 24 VAC to the

coil of a double pole relay when the circuit breaker is

de-energized. An indicator light in parallel with the coil

illuminates when the bypass is enabled and the power

to the module is off. One set of contacts of this relay is

used to enable the momentary EMO bypass switch. The

other set is connected across pins 3 and 4 of the EMO

receptacle at the EMO interface and is in the EMO

circuit when the EMO bypass jumper plug is installed.

Both sets of contacts are wired to open when voltage is

removed from the relay coil, i.e., when the circuit

breaker is closed.

R1-4.2 Module Disconnect — The dedicated circuit

breaker (see Section 6.2.1) to the module must be

turned off prior to disconnect. This causes the contacts

in series with the momentary EMO bypass switch to

close, rendering it operational. At this point, the EMO

switch on the module is still in the cluster tool EMO

circuit. To disconnect, the operator holds in the EMO

bypass switch while removing the module EMO plug

from the EMO interface and then connecting the EMO

bypass jumper plug. The momentary bypass switch can

then be released.

R1-4.3 Module Connect — To connect a module, the

dedicated circuit breaker (see Section 6.2.1) must be off

at the power distribution point to the module. The

power cable may be attached to the module at this time.

The operator holds in the momentary bypass switch

while disconnecting the EMO bypass jumper plug from

the EMO interface and connecting the module EMO

Plug. The momentary bypass switch can then be

released. Power cannot be applied to the module unless

the EMO is connected (as shown in Figure R1-2).

R1-5 Additional Documents and References

In implementing the standard, documents that may

provide additional guidance include:

R1-5.1 SEMI Document

SEMI S2 — Safety Guidelines for Semiconductor

Manufacturing Equipment

R1-5.2 Other Documents

International Electrotechnical Commission (IEC)

Standard 204, Sections 1, 2 and 3.

(U.S.) National Electrical Code (NEC).

2 National Fire Protection Association, Batterymarch, Quincy, MA

02269.

Figure R1-1

Example: AC Distribution/EMO Block Diagram

Figure R1-2

Example: EMO Connect/Disconnect Circuit(Module Power is “off,” as drawn.)

NOTICE: The user’s attention is called to the possibility that compliance with this standard may require use of an

invention covered by patent rights. By publication of this standard, Semiconductor Equipment and Materials

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infringement of such rights, are entirely their own responsibility.

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standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

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