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SEMI E54.##-0705 © SEMI 2005 14 9.2.3.3. 5 SISO Setpoint Object  This object is specific for MFD SDM and i nheri ts SISO object. Attributes of t he derived object are m apped as following table. Table 18 SISO Setpoint O…

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SEMI E54.##-0705 © SEMI 2005 13
9.2.3.3 MFD Specific Attributes and Services
Some objects appear in MFD SDM use additional attributes
and/or additional services.
9.2.3.3.1 Sensor AI-MF Object
Additional attributes and services are mapped as following tables.
Table 14 Sensor AI-MF Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Flow Totalizer
A2 193 Flow Hours
A5 196 Zero Offset Mode
A6 197 Zeroing Status
A7 198 Autorange Status
Table 15 Sensor AI-MF Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 16 Perform Zero Offset
S2 17 Query Supported Gas type
S3 18 Select Programmed Gas Type
S4 19 Insert Gas Type
S5 20 Delete Gas Type
S6 21 Get Gas Calibration Data Value
S7 22 Set Gas Calibration Data Value
S8 23 Autorange
9.2.3.3.2 Actuator AO-MF Object
Additional attributes are mapped as following table.
Table 16 Actuator AO-MF Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Valve Type
A2 193 Override
9.2.3.3.3 Controller Object
This object has no additional attribute and/or service but form of following a couple
of attributes is restricted as Real.
9.2.3.3.4 SISO Object
This object is specific for MFD SDM. Attributes of the object are mapped as following
table.
Table 17 SISO Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Input
A2 193 Output
A3 194 Data Type
SEMI E54.##-0705 © SEMI 2005 14
9.2.3.3.5 SISO Setpoint Object
This object is specific for MFD SDM and inherits SISO object. Attributes of the
derived object are mapped as following table.
Table 18 SISO Setpoint Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A33 224 Ramp type
A34 225 Ramp Rate
A35 226 Ratio
9.3 In-Situ Particle Monitor
9.3.1 ISPM Device
Reference SEMI E54.10 for a complete specification of the SDM for In-Situ Particle Monitor
Devices. Accordingly, the following mapping rules apply to the identification tags for the Objects, Attributes and
Services of this model.
9.3.2 Objects
Consistent with SEMI E54.10 and ¶7.4 above, the DM and SAC objects are identified as Object 1
and Object 2, respectively.
9.3.2.1 Mapping
Table 19 shows the mapping of the SDM Object Instances specified in SEMI E54.10 (Instance
numbers are listed under heading Inst. in the table) and the A-LINK Object ID (listed under ID in the table).
Table 19 ISPM Object Identifiers
SDM Object Name SDM Object ID ID Instance
Device Manager (DM) ISPMD1 1 1
Sensor Actuator Controller (SAC) ISPMD2 2 1
Sensor-AI-LCS ISPMD3 32 0 or 1
Sensor-AI-SLS ISPMD4 33 0 or 1
Sensor-AI-MNS ISPMD5 34 0 or 1
Sensor-AI-Counter ISPMD16 45 0 or n
*
Assembly-ISPM#1 ISPMD17 35 1
Assembly-ISPM#2 ISPMD18 36 0 or 1
Assembly-ISPM#3 ISPMD19 37 0 or 1
Assembly-ISPM#4 ISPMD20 38 0 or 1
Assembly-ISPM#5 ISPMD21 39 0 or 1
Assembly-ISPM#6 ISPMD22 40 1
Assembly-ISPM#7 ISPMD23 41 0 or 1
Assembly-ISPM#8 ISPMD24 42 0 or 1
Assembly-ISPM#9 ISPMD25 43 0 or 1
Assembly-ISPM#48 ISPMD64 44 0 or 1
#1
Minimum number of the n is one and possible maximum number is 1024, dependent on supplier.
9.3.2.2 Additional objects may be defined by the manufacturer in the Device Profile for a given device.
9.3.3 Attributes and Services
9.3.3.1 Attributes
The mapping of Attribute tags and Identifiers is defined in ¶7.5.3.2 for the CDM. Basically the
same definitions are applied for attributes in the In-Situ Particle Monitor SDM.
9.3.3.2 Services
The mapping of Service tags and Identifiers is defined in ¶7.6.2.2 for the CDM. Basically the
same definitions are applied for attributes in the In-Situ Particle Monitor SDM.
9.3.3.3 ISPM Specific Attributes and Services
Some objects appear in ISPM SDM use additional attributes
and/or additional services.
SEMI E54.##-0705 © SEMI 2005 15
9.3.3.3.1 DM Object
Additional attributes and services are mapped as following tables.
Table 20 DM Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A33 33 Gain
A34 34 Filter Bandwidth
A35 35 Tool State
A36 36 Laser Status
A37 37 Flow Path
A38 38 Volume
A39 39 Volume Units
A40 40 Leak Status
A41 41 Time Stamp
Table 21 DM Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 33 Laser On
S2 34 Laser Off
9.3.3.3.2 SAC Object
Additional attributes and services are mapped as following tables.
Table 22 SAC Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
SacA65 33 Number of Bins
SacA66 34 Count Mode
SacA67 35 Duration
Table 23 SAC Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S33 33 Clear Counts
9.3.3.3.3 Sensor AI-LCS Object
Additional attributes are mapped as following table.
Table 24 Sensor AI-LCS Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
LcsA1 192 Reading Valid
LcsA2 193 Full Scale
LcsA3 194 Alarm Setting Time
LcsA4 195 Warning Setting Time