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SEMI S2-0703a E © SEMI 1991, 2004 7 5.2.65 sievert (Sv) — unit of dose equiv alent. Most instrument s used to measure ionizing radiati on read in dose equival ent (rems or sieverts). 1 Sv = 100 rems. 5.2.66 standard temp…

SEMI S2-0703a

NOTE 6: For the purpose of this guideline, a “series of

events” is limited to those events resulting from a single point

failure. See also Section 6.5.

5.2.45 noncombustible material — a material that, in

the form in which it is used and under the conditions

anticipated, will not ignite, burn, support combustion,

or release flammable vapors when subjected to fire or

heat. Typical noncombustible materials are metals,

ceramics, and silica materials (e.g., glass and quartz).

(See also the definition for combustible material.)

5.2.46 non-ionizing radiation — forms of electro-

magnetic energy that do not possess sufficient energy to

ionize human tissue by means of the interaction of a

single photon of any given frequency with human

tissue. Non-ionizing radiation is customarily identified

by frequencies from zero hertz to 3 × 10

hertz

(wavelengths ranging from infinite to 100 nm). This

includes: static fields (frequencies of 0 hertz and

infinite wavelengths); extremely low frequency fields

(ELF), which includes power frequencies; subradio-

frequencies; radiofrequency/microwave energy; and

infrared, visible, and ultraviolet energies.

5.2.47 non-recycling, deadman-type abort switch — a

type of abort switch that must be constantly held closed

for the abort of the fire detection or suppression system.

In addition, it does not restart or interrupt any time

delay sequence for the detection or suppression system

when it is activated.

5.2.48 occupational exposure limits (OELs) — for the

purpose of this document, OELs are generally

established on the basis of an eight hour workday.

Various terms are used to refer to OELs, such as

permissible exposure levels, Threshold Limit Values



maximum acceptable concentrations, maximum

exposure limits, and occupational exposure standards.

However, the criteria used in determining OELs can

differ among the various countries that have established

values. Refer to the national bodies responsible for the

establishment of OELs. (Threshold Limit Value is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.2.49 operator — a person who interacts with the

equipment only to the degree necessary for the

equipment to perform its intended function.

5.2.50 parts-cleaning hood — exhausted hood used for

the purpose of cleaning parts or equipment. Synonym:

equipment cleaning hood.

5.2.51 positive-opening — as applied to

electromechanical control devices. The achievement of

contact separation as a direct result of a specified

movement of the switch actuator through non-resilient

members (i.e.

, contact separation is not dependent upon

springs).

5.2.52 potentially hazardous non-ionizing radiation

emissions — for the purposes of this guideline, non-

ionizing radiation emissions outside the limits shown in

Appendix 5 are considered potentially hazardous.

5.2.53 pyrophoric material — a chemical that will

spontaneously ignite in air at or below a temperature of

54.4C (130F).

5.2.54 radio frequency (rf) — electromagnetic energy

with frequencies ranging from 3 kHz to 300 GHz.

Microwaves are a portion of rf extending from 300

MHz to 300 GHz.

5.2.55 readily accessible — capable of being reached

quickly for operation or inspection, without requiring

climbing over or removing obstacles, or using portable

ladders, chairs, etc.

5.2.56 recognized — as applied to standards; agreed to,

accepted, and practiced by a substantial international

consensus.

5.2.57 rem — unit of dose equivalent. Most

instruments used to measure ionizing radiation read in

dose equivalent (rems or sieverts). 1 rem = 0.01 sievert.

5.2.58 reproductive toxicants — chemicals that are

confirmed or suspected to cause statistically significant

increased risk for teratogenicity, developmental effects,

or adverse effects on embryo viability or on male or

female reproductive function at doses that are not

considered otherwise maternally or paternally toxic.

5.2.59 residual — as applied to risks or hazards: that

which remains after engineering, administrative, and

work practice controls have been implemented.

5.2.60 risk — the expected losses from a mishap,

expressed in terms of severity and likelihood.

5.2.61 safe shutdown condition — a condition in which

all hazardous energy sources are removed or suitably

contained and hazardous production materials are

removed or contained, unless this results in additional

hazardous conditions.

5.2.62 safety critical part — discrete device or

component, such as used in a power or safety circuit,

whose proper operation is necessary to the safe

performance of the system or circuit.

5.2.63 service — unplanned activities intended to

return equipment that has failed to good working order.

(See also the definition for maintenance.)

5.2.64 severity — the extent of the worst credible loss

from a mishap caused by a specific hazard.

SEMI S2-0703a

5.2.65 sievert (Sv) — unit of dose equivalent. Most

instruments used to measure ionizing radiation read in

dose equivalent (rems or sieverts). 1 Sv = 100 rems.

5.2.66 standard temperature and pressure — for

ventilation measurements, either dry air at 21C (70F)

and 760 mm (29.92 inches) Hg, or air at 50% relative

humidity, 20C (68F), and 760 mm (29.92 inches) Hg.

5.2.67 supervisory alarm — as applied to fire detection

or suppression systems; an alarm indicating a

supervisory condition.

5.2.68 supervisory condition — as applied to fire

detection or suppression systems; condition in which

action or maintenance is needed to restore or continue

proper function.

5.2.69 supplemental exhaust — local exhaust

ventilation that is used intermittently for a specific task

of finite duration.

5.2.70 supplier — party that provides equipment to,

and directly communicates with, the user. A supplier

may be a manufacturer, an equipment distributor, or an

equipment representative. (See also the definition for

user.)

5.2.71 testing — the term “testing” is used to describe

measurements or observations used to validate and

document conformance to designated criteria.

5.2.72 trouble alarm — as applied to fire detection or

suppression systems; an alarm indicating a trouble

condition.

5.2.73 trouble condition — as applied to fire detection

or suppression systems; a condition in which there is a

fault in a system, subsystem, or component that may

interfere with proper function.

5.2.74 user — party that acquires equipment for the

purpose of using it to manufacture semiconductors.

(See also the definition for supplier.)

5.2.75 velocity pressure (VP) — the pressure required

to accelerate air from zero velocity to some velocity V.

Velocity pressure is proportional to the kinetic energy

of the air stream. Associated equation:

VP = (V/4.043)

, where V = air velocity in m/s, and VP

= velocity pressure in mm water gauge (w.g.).

[U.S. units: VP = (V/4005)

, where

V = velocity in feet per second, and

VP = velocity pressure in inches water gauge (w.g.)]

5.2.76 volumetric flow rate (Q) — in the context of

Section 22 and Appendix 2 of this guideline, Q = the

volume of air exhausted per unit time. Associated

equation: Q = VA, where V = air flow velocity, and A

= the cross-sectional area of the duct or opening

through which the air is flowing at standard conditions.

5.2.77 wet station — open surface tanks, enclosed in a

housing, containing chemical materials used in the

manufacturing of semiconductor materials. Synonyms:

wet sink, wet bench, wet deck.

6 Safety Philosophy

6.1 A primary objective of the industry is to eliminate

or control hazards during the equipment’s life cycle

(i.e., the installation, operation, maintenance, service,

and disposal of equipment).

6.2 The assumption is made that operators,

maintenance personnel, and service personnel are

trained in the tasks that they are intended to perform.

6.3 The following should be considered in the design

and construction of equipment:

 regulatory requirements;

 industry standards;

 this guideline; and

 good engineering and manufacturing practices.

6.4 This guideline should be applied during the design,

construction, and evaluation of semiconductor

equipment, in order to reduce the expense and

disruptive effects of redesign and retrofit.

NOTICE: Section 6.5 below will be withdrawn

upon July 1, 2006 publication and replaced by the

new Section 6.5 including: figures and tables as

shown in Delayed Revisions Section 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

6.5 No reasonably foreseeable single-point failure

condition or operational error should allow exposure of

personnel, facilities, or the community to hazards that

could result in death, significant injury, or significant

equipment damage.

NOTE 7: The intent is to control single fault conditions that

result in significant risks (i.e., Critical, High, or Medium risks

based on the example risk assessment matrix in SEMI S10).

6.6 Equipment safety features should be fail-safe or of

a fault-tolerant design and construction.

6.7 Components and assemblies should be used in

accordance with their manufacturers’ ratings and

specifications, where using them outside the ratings

would create a safety hazard.

6.8 A hazard analysis should be performed to identify

and evaluate hazards. The hazard analysis should be

SEMI S2-0703a

initiated early in the design phase, and updated as the

design matures.

NOTICE: Section 6.8.1 below will be withdrawn

upon July 1, 2006 publication and replaced by the

new Section 6.8.1 including: figures and tables as

shown in Delayed Revisions Section 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

6.8.1 The hazard analysis should include consideration

of:

 the application or process;

 the hazards associated with each task;

 anticipated failure modes;

 the probability of occurrence and severity of a

mishap;

 the level of expertise of exposed personnel and the

frequency of exposure;

 the frequency and complexity of operating,

servicing and maintenance tasks; and

 safety critical parts.

NOTE 8: EN 1050 contains examples of hazard analysis

methods.

6.8.2 The risks associated with hazards should be

characterized using SEMI S10.

6.9 The order of precedence for resolving identified

hazards should be as follows:

6.9.1 Design to Eliminate Hazards — From the initial

concept phase, the supplier should design to eliminate

hazards.

NOTE 9: It is recommended that the supplier continue to

work to eliminate identified hazards.

6.9.2 Incorporate Safety Devices — If identified

hazards cannot be eliminated or their associated risk

adequately controlled through design selection, then the

risk should be reduced through fixed, automatic, or

other protective safety design features or devices.

NOTE 10: It is recommended that provisions be made for

periodic functional checks of safety devices, when applicable.

6.9.3 Provide Warning Devices — If design or safety

devices cannot effectively eliminate identified hazards

or adequately reduce associated risk, a means should be

used to detect the hazardous condition and to produce a

warning signal to alert personnel of the hazard.

6.9.4 Provide Hazard Warning Labels — Where it is

impractical to eliminate hazards through design

selection or adequately reduce the associated risk with

safety or warning devices, hazard warning labels should

be provided. See Section 10 for label information.

6.9.5 Develop Administrative Procedures and Training

— Where hazards are not eliminated through design

selection or adequately controlled with safety or

warning devices or warning labels, procedures and

training should be used. Procedures may include the use

of personal protective equipment.

6.9.6 A combination of these approaches may be

needed.

7 General Provisions

7.1 This guideline should be incorporated by reference

in equipment purchase specifications. The user and

supplier should agree on deviations from this guideline.

The intent is for the user to purchase equipment

conforming with SEMI S2, not to design the equipment.

7.2 The equipment must comply with laws and

regulations that are in effect at the location of use. All

equipment requiring certification or approval by

government agencies must have this certification or

approval as required by regulations.

NOTE 11: It is recommended that the supplier request from

the user information regarding local laws and regulations.

7.3 The manufacturer should maintain an

equipment/product safety program to identify and

eliminate hazards or control risks in accordance with

the order of precedence (see Section 6.9).

7.3.1 The supplier should provide the user’s designated

representative with bulletins that describe safety related

upgrades or newly identified significant hazards

associated with the equipment. This should be done on

an ongoing basis as needed.

7.4 Model-specific tools and accessories necessary to

operate, maintain, and service equipment safely should

be provided with the equipment or specified by the

supplier.

NOTE 12: The official values in this guideline are expressed

in The International System of Units (SI). Values that:

 are expressed in Inch-Pound (also known as “US

Customary” or “English”) units,

 are enclosed in parentheses, and

 directly follow values expressed in SI units

 are not official, are provided for reference only, and

might not be exact conversions of the SI values.

8 Evaluation Process

8.1 This section describes the evaluation of equipment

to this guideline, the contents of the evaluation report,