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SEMI E54.10-0600 © SEMI 2 000 12 8.3.3 Sens or Actuator Contr oller O b j e ct Behavior 8.3.3.1 T he behav ior exhibited by the S e ns or Actuator Controller object is d efined in SEMI E54.1 [3]. Additional behavi or is …

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SEMI E54.10-0600 © SEMI 200011
8.3.1 Sensor Actuator Controller Object Attributes — The attributes provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [3]. Table 10 contains the additional attributes required for the Sensor Actuator
Controller object.
Table 10 SAC Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Number of Bins SacA65 R* Yes UINT
Count Mode SacA66 RW* Yes Enumerated, USINT
Duration SacA67 R No REAL
NOTE 1: “*” Indicates that the specific attribute is nonvolatile. Nonvolatile requires that the current attribute value be maintained through a
component power cycle.
8.3.1.1 Number of Bins — An attribute that specifies the number of counters in the device. This value represents
the number of Sensor-AI-Counter objects in the device.
8.3.1.2 Count Mode — An attribute that specifies whether all count object values are cleared (to zero) when read.
This attribute is an enumerated USINT that can take on one of the following values:
0 = The particle counter count is not affected by reading the count.
1 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported through a service request to or from an Assembly-ISPM object that contains that count.
2 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported (regardless of the connection) through a service request to or from either an Assembly-ISPM
object that contains that count (“value” attribute), or the Counter object that contains the count.
3–63 = Reserved
64–255 = Manufacturer Specified
8.3.1.3 Duration (Optional) — An attribute that defines the interval of time during which the particle counts (value
of Value object attribute) are collected and put into the bin assemblies.
8.3.1.4 Initial and Default Values
Table 11 SAC Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Number of Bins Manufacturer Specified Manufacturer Specified
Count Mode LVV 0 Do not clear particle counter value.
Duration Manufacturer Specified Manufacturer Specified
8.3.2 Sensor Actuator Controller Object Services — The services provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [1]. Table 12 contains the additional services required for the Sensor Actuator
Controller object.
Table 12 SAC Object Services
Service Service Identifier Type Description
Clear Counts S33 R Used to clear the “Value” attribute of all Sensor-AI-Counter
sensor objects.
Reserved S34–S64 — Reserved for future expansion
Manufacturer Specified > S64 — Manufacturer Specific services
8.3.2.1 Clear Counts (Optional) — This service is used to instruct all of the Sensor-AI-Counter object to perform a
one-time clear of their respective Sensor-AI-Counter “Value” attributes by setting the value to zero. There are no
parameters required for this service.
SEMI E54.10-0600 © SEMI 2000 12
8.3.3 Sensor Actuator Controller Object Behavior
8.3.3.1 The behavior exhibited by the Sensor Actuator Controller object is defined in SEMI E54.1 [3]. Additional
behavior is detailed below.
8.3.3.2 The “Value” attribute is cleared (to zero) in each ISPM counter sensor object, after being read, if the “Count
Mode” attribute has a value of 1. It may also be cleared by a “Clear Counts” service of the SAC object or the
“Reset” service issued to the S-Analog Sensor class.
8.4 Sensor-AI Object — The Sensor-AI object is the device component responsible for coordinating the behavior
common to all analog input sensor elements in the ISPM device as specified in SEMI E54.1 [3].
8.4.1 Sensor-AI Object Attributes — The attributes provided by the Sensor-AI object are defined in SEMI E54.1
[1]. There are no additional attributes required for the Sensor-AI object.
8.4.2 Sensor-AI Object Services — The services provided by the Sensor-AI object are defined in SEMI E54.1 [3].
There are no additional services required for the Sensor-AI object.
8.4.3 Sensor-AI Object Behavior — The behavior exhibited by the Sensor-AI object is defined in SEMI E54.1 [3].
There is no additional behavior required for the Sensor-AI object.
8.5 Sensor-AI-LCS Object — The Sensor-AI-LCS (Laser Current Sensor) object inherits the attributes, services,
and behavior of the Sensor-AI as defined in SEMI E54.1 [3]. The Sensor-AI-LCS is the device component
responsible for retrieving a reading from a physical laser current sensor, optionally correcting the reading with a
manufacturer specified algorithm, or algorithms, then making the value available through the “Value” attribute.
8.5.1 Sensor-AI-LCS Object Attributes — The attributes provided by the Sensor-AI object are defined in SEMI
E54.1 [3]. The Sensor-AI object attribute content and its attribute extensions to support the Sensor-AI-LCS object
are listed in Table 13.
Table 13 Sensor-AI and Sensor-AI-LCS Object Attributes
Attribute Name Attribute
Identifier
Access
Network
Required Form
Value SaiA16 R Yes UINT
Gain SaiA65 R Yes REAL
Data Type SaiA66 R Yes USINT
Data Units SaiA67 R Yes Enumerated, UINT
milliAmps only value supported
Reading Valid LcsA1 R Yes Enumerated, Byte
Full Scale LcsA2 R Yes UINT
Alarm Settling Time LcsA3 R Yes UINT
Warning Settling Time LcsA4 R Yes UINT
Reserved LcsA5–LcsA64 — — Reserved for future expansion.
Manufacturer Specified > LcsA64 — — Manufacturer Specific attributes
8.5.1.1 Value — The attribute that maintains the laser current sensor value. This value is always read as milliAmps.
8.5.1.2 Gain — The attribute that specifies the gain of the laser current measuring circuit.
8.5.1.3 Data Type — The attribute which defines the format of the data associated with the “value” attribute.
8.5.1.4 Data Units — The attribute which specifies the units for the “Value” attribute. This attribute is an
enumerated UINT that can take only one value:
MilliAmps (as assigned in Appendix 1 of SEMI E54.1).
8.5.1.5 Reading Valid — An attribute which specifies whether the “Value” attribute contains a valid value. This
attribute is an enumerated byte that can take on one of the following values:
0 = Invalid, or
1 = Valid.
SEMI E54.10-0600 © SEMI 200013
8.5.1.6 Full Scale — An attribute which specifies the maximum value allowed for the “Value” attribute.
8.5.1.7 Alarm Settling Time — An attribute which specifies the maximum time in milliseconds that the “Value”
attribute may take to stabilize before an alarm is generated.
8.5.1.8 Warning Settling Time — An attribute which specifies the maximum time in milliseconds that the “Value”
attribute may take to stabilize before a warning is generated.
8.5.1.9 Initial and Default Values
Table 14 Sensor-AI and Sensor-AI-LCS Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Value 0 0
Gain LVV 1.0
Data Type LVV UINT
Data Units LVV MilliAmps See Appendix 1 of SEMI E54.1.
Reading
Valid
0 0 Invalid
Full Scale LVV 0XFFFF
Alarm
Settling Time
LVV 1000 Milliseconds
Warning
Settling Time
LVV 1000 Milliseconds
8.5.2 Sensor-AI-LCS Object Services — The services provided by the Sensor-AI-LCS are inherited from the
Sensor-AI object defined in SEMI E54.1 [3]. There are no additional services required for the Sensor AI-LCS
object.
8.5.3 Sensor-AI-LCS Object Behavior — The behavior exhibited by the Sensor-AI-LCS object is inherited from the
Sensor-AI object defined in SEMI E54.1 [3]. Additional specific behavior associated with the Sensor-AI-LCS object
is defined below.
8.5.3.1 Sensor-AI-LCS OPERATING Application Process — A reading is retrieved from a physical laser current
sensor. This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the
input to the gain formula to generate the value attribute as referenced in SEMI E54.1 [3]. This process is executed
only when the Device Manager Object is in the EXECUTING state as defined in the Common Device Model. When
not in the EXECUTING state, the value of the “Reading Valid” attribute shall be set to “Invalid”. When in one of
the sub-states of the EXECUTING state, the validity of the “Value” attribute shall be manufacturer specific.
8.6 Sensor-AI-SLS Object — The Sensor-AI-SLS (Stray Light Sensor) object inherits the attributes, services, and
behavior of the Sensor-AI as defined in SEMI E54.1 [3]. The Sensor-AI-SLS is the device component responsible
for retrieving a reading from a physical stray light sensor, optionally correcting the reading with a manufacturer
specified algorithm, or algorithms, then making the value available through the “Value” attribute.
8.6.1 Sensor-AI-SLS Object Attributes — The attributes provided by the Sensor-AI object are defined in SEMI
E54.1 [3]. The Sensor-AI object attribute content and its attribute extensions to support the Sensor-AI-SLS object is
listed in Table 15.
Table 15 Sensor-AI and Sensor-AI-SLS Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Value SaiA16 R Yes UINT
Gain SaiA65 R Yes REAL
Data Type SaiA66 R Yes USINT
Data Units SaiA67 R Yes Enumerated, UINT
milliVolts only value supported
Reading Valid SlsA1 R Yes Enumerated, Byte