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SEMI E127-0705 © SEMI 2003, 2005 1 SEMI E127-0705 SPECIFICATION FOR INTEGRAT ED MEASUREMENT MODULE COMMUNICATIONS: CONC EPTS, BEHAVIOR, AND SERVICES (IMMC) This specificatio n was technically approved by the gl obal Info…

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SEMI E126-0305 © SEMI 2003, 2005 8
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Text in italics provides further description of a field; it is not part of the template. Format descriptors for EQIPs represent union of required
descriptors for supported EQIPs. Format descriptor fields for an EQIP do not have to be filled out if the entity claiming compliance and
submitting the compliance sheets does not provide a measurement of the EQIP (e.g., the EQIP for the process tool is measured by another
metrology tool). A value of “N.A.” indicating “not applicable” is inserted wherever the descriptor is not specified and is not supported for an
EQIP.
10 Template for Adding Equipment Types and EQIPs to this Standard
10.1 The standard is structured so that it can be updated. Specifically, EQIPs for equipment types may be added to
an existing set, as the community reaches consensus on these additions. Further, EQIPs may be defined for a new
equipment type not previously addressed in this standard. Thus typical additions to this standard will impact Table 2
and Table 3, and possibly Table 1 of this standard. These typical additions should not impact any other portions of
this standard.
10.2 Template — The template for typical additions to this standard is shown in Table 6. Note that this template
addresses only the technical content of the ballot addition to the standard. For development and submission of the
complete ballot, refer to SEMI documentation.
Table 6 Template for Typical Additions to this Standard
# Ballot Component Conditions for including in Ballot
1 Add the following rows to Table 1 Include only if adding equipment types. Add one row for each type added.
2 Add the following EQIP information
to the EQIP column of Table 2
Include only if adding EQIPs to existing equipment types. Add for each new
EQIP defined. Add to each equipment type that will use this EQIP. Indicate
requirement (Y/N). Note that one of ballot components 2 and 3 must be in
included in the ballot.
3 Add the following rows to Table 2 Include only if adding equipment types. Define the EQIPs for these new types.
Note that one of ballot components 2 and 3 must be in included in the ballot.
4 Add the following rows to Table 3 This component must be included in the ballot. Add a row for each new EQIP
defined.
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Column 1 is an index column utilized only for reference.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E127-0705 © SEMI 2003, 2005 1
SEMI E127-0705
SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE
COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published July 2003;
previously published November 2004.
Contents
1 Purpose.......................................................................................................................................................................4
1.1 Integrated Measurement......................................................................................................................................4
1.2 Specification for the Integrated Measurement Module Communications (IMMC)..............................................4
2 Scope ..........................................................................................................................................................................4
2.1 Scope of This Document ......................................................................................................................................4
3 Limitations..................................................................................................................................................................4
3.1 Host/Integrated Equipment Interface ..................................................................................................................4
3.2 Object-Based Implementation..............................................................................................................................4
3.3 In-Situ Processing................................................................................................................................................4
4 Referenced Standards and Documents .......................................................................................................................4
4.1 SEMI Standards...................................................................................................................................................4
4.2 Other Sources ......................................................................................................................................................5
5 Terminology ...............................................................................................................................................................5
5.1 Abbreviations and Acronyms...............................................................................................................................5
5.2 Definitions ...........................................................................................................................................................5
6 Conventions................................................................................................................................................................6
6.1 Object Conventions..............................................................................................................................................6
6.2 State Model Conventions.....................................................................................................................................7
6.3 Service Message Representation .........................................................................................................................7
7 General Requirements ................................................................................................................................................8
7.1 Protocol Requirements ........................................................................................................................................8
7.2 Required Standards .............................................................................................................................................8
7.3 Required Basic Capabilities ................................................................................................................................8
7.4 State Models ........................................................................................................................................................9
7.5 Objects.................................................................................................................................................................9
7.6 Service Requirements.........................................................................................................................................10
8 Overview ..................................................................................................................................................................10
8.1 Background........................................................................................................................................................10
9 Communication Ports and Clients ............................................................................................................................10
9.1 Ports ..................................................................................................................................................................10
9.2 Clients................................................................................................................................................................10
9.3 Bandwidth and Performance .............................................................................................................................11
10 Integrated Measurement Module Object Model .....................................................................................................11
10.1 Description ......................................................................................................................................................11
11 The Integrated Measurement Module Object .........................................................................................................12
11.1 Relationship of IMM Object And Physical Module .........................................................................................12
11.2 IMM Service State Model ................................................................................................................................12
11.3 Object Attributes..............................................................................................................................................13
11.4 System Initialization.........................................................................................................................................15
11.5 IMM Events and Alarms..................................................................................................................................16
11.6 IMM Object Services .......................................................................................................................................17
12 Substrate Transfer Path Object ...............................................................................................................................18
12.1 Description ......................................................................................................................................................18
12.2 Object State Model ..........................................................................................................................................18
12.3 Object Attributes..............................................................................................................................................20
SEMI E127-0705 © SEMI 2003, 2005 2
12.4 Object Services ................................................................................................................................................21
12.5 Creation of Substrate Objects..........................................................................................................................21
12.6 Substate Verification........................................................................................................................................22
12.7 Substrate Orientation.......................................................................................................................................23
12.8 Transfer Path Calibration ...............................................................................................................................23
12.9 Substrate Transfer Path Events, Errors, and Alarms ......................................................................................24
12.10 Substrate Transfer Path Event Variables ......................................................................................................24
12.11 Substrate Transfer Path Scenarios ................................................................................................................25
13 IMM Data...............................................................................................................................................................30
13.1 Overview..........................................................................................................................................................30
13.2 Tables ..............................................................................................................................................................31
14 IMM Data Table Object..........................................................................................................................................31
14.1 Description ......................................................................................................................................................31
14.2 IMM Data Table Object State Model...............................................................................................................32
14.3 IMM Data Table Object Attributes..................................................................................................................33
14.4 IMM Data Table Object Event Variables ........................................................................................................36
14.5 Types of IMM Data Table Objects...................................................................................................................36
14.6 IMM Data Table Object Services ....................................................................................................................38
15 Data Table Objects .................................................................................................................................................38
15.1 Data Table Object Model ................................................................................................................................38
15.2 Data Row Template Object..............................................................................................................................40
15.3 Master Data Table Objects..............................................................................................................................41
16 Requirements for Objects Defined in Other Standards...........................................................................................42
16.1 Substrate Object ..............................................................................................................................................42
16.2 Process Job Management................................................................................................................................42
17 Event and Exception Management .........................................................................................................................42
18 Message Service Definitions ..................................................................................................................................42
18.1 List of Services.................................................................................................................................................42
18.2 Service Parameters..........................................................................................................................................43
18.3 Message Detail ................................................................................................................................................45
19 Services Provided by Client....................................................................................................................................48
19.1 List of Client Services......................................................................................................................................48
20 IMMC Compliance.................................................................................................................................................48
20.1 Overview of Requirements...............................................................................................................................48
21 Related Documents.................................................................................................................................................49
21.1 List of Documents ............................................................................................................................................49
Tables
Table 1 Service State Model Transitions.....................................................................................................................13
Table 2 IMM Object Attribute Definitions..................................................................................................................13
Table 3 Retention Rule Element Definitions...............................................................................................................15
Table 4 Event Variables for IMM Object....................................................................................................................17
Table 5 IMM Object Services......................................................................................................................................17
Table 6 Substrate Transfer Path State Model Transitions............................................................................................19
Table 7 Substrate Transfer Path Object Attribute Definitions.....................................................................................20
Table 8 List of Substrate Transfer Path Services.........................................................................................................21
Table 9 Event Variables for Substrate Transfer Path Object.......................................................................................24
Table 10 Substrate Transfer Path Load Scenario.........................................................................................................25
Table 11 Substrate Transfer Path Unload Scenario .....................................................................................................28
Table 12 IMM Data Table Object Transitions.............................................................................................................33
Table 13 IMM Data Table Object Attribute Definitions .............................................................................................33
Table 14 Attribute Elements for IMM Data Table Object...........................................................................................35
Table 15 Event Variables for IMM Data Table Objects..............................................................................................36
Table 16 IMM Raw Data Table Object Attribute Definitions.....................................................................................37