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SEMI E127-0705 © SEMI 2003, 2005 32 IMM Da ta T ab le DataVal idit y: enumer ation Ev entList: list of tex t/i nteger pai rs IMM_ID: te x t LotID : text ProcessFlowStep: text ProcessToolI D: tex t ProcessRecipeID: text R…

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calibration results based on measuring a substrate with expected values. Internal storage of IMM Data is
implementation-specific. Its apparent structure through the communication link is that of a type of table object.
Table attributes contain context information about the substrate, primarily collected from the Substrate Object
measured, while the data provided by the IMM is stored as ordered rows, where each row represents a single site
where measurements were taken.
13.1.2 There are two primary aspects to IMM Data, the data itself that provides the content of a table, and the
structure of the table as it appears using SEMI E39 object services.
13.1.3 Actual data table instances store the raw data collected during measurement, the results based upon that raw
data, or the results of calibrating to a known good substrate. This is reflected in the subtypes of the Data Table
object shown in Figures 9 and 10 below.
13.1.4 The second aspect is the structure of the Data Table Object, which is visible through use of templates. These
templates allow a user to discover the types of data available from the IMM and the format of that data (signed or
unsigned integer, floating point, text, etc.) without having to upload an actual table.
13.1.5 Data Table Objects and IMM Data Table Objects are abstract objects. All implementations of tables in IMM
shall be of a subtype of IMM Data Table Objects.
13.2 Tables
13.2.1 Table objects are defined in SEMI E58, §10 and §13. A Data Table Object is a type of Table object that
provides templates for individual data entries and for rows of entries. This allows a client that needs to use the data
provided in a data table to determine the information available in a table before an actual table is transferred.
13.2.2 All objects shown in Figures 5, 6, and 8 are used for purposes of exchanging data over the communication
link only. Data does not need to be stored internally in any particular manner.
13.2.3 Object Ownership — The IMM is considered to own both the tables that it stores and the set of Data Row
Templates. A specific instance of IMM table is considered to own its Data Rows and the associated Data Row
Template for that table. This allows the client to query a specific table for its template.
13.2.3.1 Ownership, as defined in SEMI E39, is not necessarily exclusive. An owner is expected to know about the
types of objects that it owns, their attributes, and their services.
14 IMM Data Table Object
14.1 Description
14.1.1 The IMM Data Object is a type of Data Table Object and inherits its attributes and relationships with
templates shown in Figures 8 and 11. The Data Table Object and its templates are discussed in §16. This section
specifies the IMM Data Object and its subtypes. Figure 9 shows the model for a Data Object.
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IMM Data Table
DataValidity: enumeration
EventList: list of text/integer pairs
IMM_ID: text
LotID: text
ProcessFlowStep: text
ProcessToolID: text
ProcessRecipeID: text
RegionRanges: list of RangeDef
Status: enumeration
SubstID: text
SubstIDRead: text
SubstOrientation: float
SubstSide: enumeration
Summary: list of SummaryData
TimeStampFormat: enumerated
TimeStart: variant
TimeComplete: variant
IMM Converted Data
Table
IMM Raw Data Table
MeasurementRecipeID: text ConversionRecipeID: text
FeatureType: enumerated text
RawDataTable: text
Data Table
RowTemplateID: text
0...* 0...*
IMM Calibration Data
Table
CalibrationDuration: integer
CalibrationStatus: enumeration
CalibrationTimeStamp: variant
RefSubstID: text
provides
data for
Figure 9
Data Table Object Hierarchy
14.2 IMM Data Table Object State Model
14.2.1 The IMM Data Table Object has a state model showing when a new instance of data object is created, when
it is finished with the current set of data, and when it has been deleted after all current retention rules have been
satisfied. The diagram of the state model is shown in Figure 10. Table data is available only for complete data rows
(following transitions 2, 3, and 4).
IMM DATA TABLE
1
2
5
3
4
In Process
In
Retention
6
Figure 10
IMM Data Table Object State Model
14.2.2 State Definitions
14.2.2.1 The IMM Data Table Object has two states: IN PROCESS, and IN RETENTION.
14.2.2.1.1 IN PROCESS — An IMM Data Table Object is IN PROCESS as long as more data is to be stored in the
data object.
14.2.2.2 IN RETENTION — This state is active when the IMM Data Table Object is complete and conditions for
ending retention have not been satisfied.
14.2.3 Table 12 shows the transitions for the IMM Data Table Object state model.
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Table 12 IMM Data Table Object Transitions
# Previous State Trigger New State Actions Comments
1 (no state) A measurement data table object is
created.
IN PROCESS The conversion recipe name
must be known at creation of
the object.
2 IN PROCESS All data for one location has been
stored. Note: This is a required
transition for all rows, from the first to
the last.
IN PROCESS Site Measurement
Data is available
for conversion.
All data for the newly
completed row must be
available for an event report.
3 IN PROCESS All data for a specified group of sites
has been stored. Note: If this transition
is supported, it is required for every
such transition, including the last, prior
to transition 4.
IN PROCESS Measurement Data
available for a site
group per recipe
specifications.
Optional transition.
Implementation-specific.
Region should be defined in
the measurement recipe.
4 IN PROCESS Data Table Object complete. Retention
conditions exist.
IN
RETENTION
Monitor conditions
for retention until
satisfied.
Data Table Object may be
required internally or
transferred to tool controller
or remote host. All summary
data for the table shall be
available for a Table
Complete Event report. If the
automatic send feature is
enabled, the table is sent to
the designated client.
5 IN
RETENTION
All client and internal retention
conditions are satisfied and the table is
removed from IMM storage.
(extinction) Event notification
required.
Normal exit.
6 IMM DATA
TABLE
Abnormal conditions cause the Data
Table object to be discarded, or to be
removed from IMM storage due to
Automatic Rollover.
(extinction) Event notification
required.
Table is not available due to
abnormal circumstances,
including forced deletion.
Retention rules have not been
satisfied.
14.3 IMM Data Table Object Attributes
14.3.1 Table 13 defines the attributes of the abstract IMM Data Table Object. Most of the information about the
substrate that is maintained to be able to keep with the data is defined here. When a type of IMM_Data Table
Object is first created, it has no row data, but it does have a RowDataTemplate that it will use.
14.3.2 All three subtypes of the IMM Data Table Object, or the IMM Data Table Object itself, may need additional
implementation-specific attributes for summary data that applies to the substrate rather than to a specific location on
the substrate. This could include totals, averages, mean, standard deviation, and similar calculations. Use of this
type of data is encouraged and in some cases may be important for advanced process control.
14.3.3 GetAttr and SetAttr services may be directed to IMM Data Table objects. In this case, all subtypes of the
IMM Data Table Object may be targets of the service request.
Table 13 IMM Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
DataValidity Qualifies the “goodness”. RO Y Enumerated:
Valid and complete, incomplete, out-
of-spec data.
EventList List of event name/event number pairs. RO Y List of text/integer pairs.
IMM_ID ObjID of IMM object where measured. RO Y Text.
LotID Lot identifier. RO Y Text, shall conform to SEMI E39
restrictions on ObjID.