semi合集-English.pdf - 第2527页

SEMI E88-1104 E © SEMI 1999, 2004 24 Variable Name Type Description Class Format Comments SpecVersion CV Version of SEMI E88 to which the equipm ent is compliant. SV A[0–20] Example values are: E88-0999, E88-0301. If the…

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Variable Name Type Description Class Format Comments
PortID
i
CV ID of the port. SV A[1–64]
PortInfo
i
CV Port information
associated with a
particular port.
SV L,2
1. <PortID
i
>
2. <PortTransferState
i
>
PortTransferState
i
CV Port Transfer State. SV U2 1 – OutOfService
2 – InService
3 – TransferBlocked
4 – ReadyToLoad
5 – ReadyToUnload
PortType CV Definition of the type of
port associated with the
carrier’s current
location.
DVVAL A[1–32] “OP” = output port
“BP” = buffer port
“LP” = loading port
Priority CV Remote command
priority.
DVVAL U2 0 is not valid.
1 is the LOWEST priority, 99 is
the highest priority.
Priority
i
CV Remote command
priority.
SV U2 0 is not valid.
1 is the LOWEST priority, 99 is
the highest priority.
RecoveryOptions
(Supplier Option)
CV List of options that the
Host may use to try to
recover a specific
stocker error.
DVVAL A[1–64]
blank
RETRY
ABORT
This variable will enumerate the
possible Host command
responses to the error associated
with the event. If blank, Host
cannot do anything. If there are
multiple otpions, they are
comma seperated. For example:
“RETRY, ABORT”.
Whitespace is ignored.
ResultCode CV Result Code of a stocker
system command.
Associated with the
command completion
event.
DVVAL U2 Values of ResultCode will
correspond to meaningful
completion results (0 always
signifies normal successful
completion). The following
Result Codes are required:
0 = Success
1 = Other Error
2 = Shelf Zone is FULL
3 = Duplicate ID
4 = Mismatch ID
5 = Failure to Read ID
6–63 = Reserved
SCState CV SC State (SYSTEM). SV U2 1 = SC Init
2 = Paused
3 = Auto
4 = Pausing
Source CV Source location unique
identifier.
DVVAL A[1–64]
Source
i
CV Source location unique
identifier.
SV A[1–64]
SEMI E88-1104
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© SEMI 1999, 2004 24
Variable Name Type Description Class Format Comments
SpecVersion CV Version of SEMI E88 to
which the equipment is
compliant.
SV A[0–20] Example values are:
E88-0999, E88-0301. If the
equipment is not compliant, a
zero length value may be
specified.
StockerCraneID CV The id of the stocker
crane.
DVVAL A[1–64] Generally only used when there
are multiple cranes in a stocker.
StockerUnitID CV Unique identification of
a stocker unit (e.g., port,
crane, transfer agent,
etc.).
DVVAL A[1–64] When applicable, this value
shall be the StockerCraneID,
PortID, etc.
StockerUnitID
i
CV Unique identification of
a stocker unit (e.g., port,
crane, transfer agent,
etc.).
SV A[1–64] When applicable, this value
shall be the StockerCraneID,
PortID, etc.
StockerUnitInfo CV Information associated
with a particular stocker
unit.
DVVAL L,2
1. <StockerUnitID>
2. <StockerUnitState>
StockerUnitInfo
i
CV Information associated
with a particular stocker
unit.
SV L,2
1. <StockerUnitID
i
>
2. <StockerUnitState
i
>
StockerUnitState CV The state of the stocker
unit.
DVVAL U2 The State of the component will
be specific to the stocker
configuration.
StockerUnitState
i
CV The state of the stocker
unit.
SV U2 The State of the component will
be specific to the stocker
configuration.
TransferCommand CV Information associated
with a particular
TRANSFER command.
DVVAL L,2
1. <CommandInfo>
2. <TransferInfo>
TransferCommand
i
CV Information associated
with a particular
TRANSFER command.
SV L,n
1. <CommandInfo
i
>
2. <TransferInfo
i
>
TransferInfo CV Carrier information
associated with a
particular transfer
command.
DVVAL L,3
1. <CarrierID>
2. <CarrierLoc>
3. <Dest>
TransferInfo
i
CV Carrier information
associated with a
particular transfer
command.
SV L,3
1. <CarrierID
i
>
2. <CarrierLoc
i
>
3. <Dest
i
>
TransferState CV State of Transfer
Command.
SV U2 1. Queued
2. Transferring
3. Paused
4. Canceling
5. Aborting
ZoneCapacity CV Available capacity (in
carriers) of a particular
zone.
DVVAL U2 Example: If a stocker zone can
store 100 carriers and 25 of the
locations are currently occupied,
then the ZoneCapacity is 75.
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© SEMI 1999, 2004 25
Variable Name Type Description Class Format Comments
ZoneCapacity
i
CV Available capacity (in
carriers) of a particular
zone.
SV U2 Example: If a stocker zone can
store 100 carriers and 25 of the
locations are currently occupied,
then the ZoneCapacity is 75.
ZoneData CV Information associated
with a particular zone.
DVVAL L,2
1. <ZoneName>
2. <ZoneCapacity>
ZoneData
i
CV Information associated
with a particular zone.
SV L,2
1. <ZoneName
i
>
2. <ZoneCapacity
i
>
ZoneName CV Alphanumeric name of a
particular zone.
DVVAL A[1–64]
ZoneName
i
CV Alphanumeric name of a
particular zone.
SV A[1–64]
ZoneSize
i
CV Size (in carriers) of a
particular zone.
SV U2 The physical size of the zone.
ZoneType
i
CV Type of the Zone. SV U2 1: Shelf
2: Port
3: Other
11 Alarm List
11.1 Since each model of Stocker SEM equipment differs in configuration, it is not practical to provide an
exhaustive list of all possible alarms. Instead, the Stocker SEM is requiring the two tables provided as described in
SEMI E30 (Section 8.4). Alarm List Table which is intended to provide for equipment configuration specific alarms
and Alarm ID, Alarm Set/Cleared Event Table. Any alarm that is displayed locally at the equipment, if enabled, is
required to be sent to the host. To be compliant, Tables 9 and 10 must be completed by the supplier, documenting
all alarms.
11.2 Alarm List Table
11.2.1 The alarm list table contains examples of alarms that pertain to various configuration aspects of equipment.
These examples are intended to illustrate that alarms pertain to situations in which there exists a potential for
exceeding physical safety limits associated with people, equipment, and material being transported as per the SEMI
E30 definition of an alarm. See SEMI E30 for further reference. The supplier is responsible for supplying
documentation associated with these alarm definitions. Each alarm will have an associated alarm text (ALTX) and
alarm identifier (ALID). Table 9 contains an example of alarm list information that is intended to be augmented
when the Stocker SEM equipment supplier documents their interface. Examples highlighted by (*) are required by
Stocker SEM.
Table 9 Alarm List Table
Danger Affected
Equipment Cfg. Alarm Text ALID
Potential Imminent Operator Equipment Material
Stocker stocker unit error* X X X
handoff error* X X X X
database error* X X
11.3 Alarm ID, Alarm Set/Cleared Event Table
11.3.1 The Alarm ID, Alarm Set/Cleared Event table documents the association of each ALID to a set and cleared
event as required by SEMI E30. See SEMI E30 for further reference. The supplier is responsible for supplying
documentation associated with these alarm definitions. Each alarm will have associated alarm set and cleared
collection event identifiers (CEID
set
and CEID
clear
).