semi合集-English.pdf - 第5544页

SEMI P10-0705 © SEMI 1990, 2005 39 </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="unbounded"> <xs:element name="TitleData" type="TitleDataType"/> </xs:se…

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<xs:element name="Quantity" type="xs:integer"/>

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</xs:sequence>

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<xs:element name="TitleData" type="TitleDataType"/>

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SEMI P10-0705 © SEMI 1990, 2005 40

</xs:sequence>

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<xs:element name="TopPellicleType" type="xs:string"/>

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type="XYRType"/>

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