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SEMI F74-1103 © SEMI 2002, 2003 10 F ACE SEAL NOTE 1: Leak test port(s) and porting are depen den t on seal system/substrat e design configuration. NOTE 2: Material of Construction: 316SS. NOTE 3: Drawing scale is not sp…

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SEMI F74-1103 © SEMI 2002, 2003 9
COMPONENT VIEW; 1.5” VIBRATION/TORQUE TEST FIXTURE
NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.
NOTE 2: Material of Construction: 316SS.
NOTE 3: Drawing scale is not specified.
Figure R1-2a
1.5” Surface-Mount Performance Testing Fixture
SEMI F74-1103 © SEMI 2002, 2003 10
FACE SEAL
NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.
NOTE 2: Material of Construction: 316SS.
NOTE 3: Drawing scale is not specified.
Figure R1-2b
1. 5” Surface-Mount Performance Testing Fixture
SEMI F74-1103 © SEMI 2002, 2003 11
NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.
NOTE 2: Material of Construction: 316SS.
NOTE 3: Drawing scale is not specified.
Figure R1-2c
1. 5” Surface-Mount Performance Testing Fixture