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SEMI E58-0703 © SEMI 1997, 2003 14 # Table 1 Current State Trigge r New State Action(s) Comment 4 1 INITIALIZING Sy stem initialization is complete. IDLE Begin normal internal activities. Wait for input. Normal. Equipmen…

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8.3 General Equipment Operations Model — The
equipment has various state models that it maintains in
addition to the ARAMS State Model. The state model
presented in this section (Figure 3) is provided as a
high-level example of one such model to clarify the
relationship between ARAMS and the equipment’s
operations. For purposes of ARAMS, it is referred to as
the General Equipment Operations Model.
Figure 3
Example of General Equipment Operations Model
1.14.6 ARAMS assumes that a similar model, either
formal or implicit, exists, although it may differ in
detail depending upon the equipment type and the
application. Formal implementation of the General
Equipment Operations Model is not required for
ARAMS compliance.
1.14.6.1 The states of the General Equipment
Operations Model are not SEMI E10 states or substates.
NOTE 12: To minimize confusion between references to
states and events, the events of losing power and recovering
power are termed powerdown and powerup respectively.
8.3.1 State Definitions — The General Equipment
Operations Model uses the following states:
8.3.1.1 POWER-OFF — The equipment has no power
and is unable to function. While this state is only valid
from a view external to the equipment, it is required to
cover all periods of time to match the ARAMS model.
8.3.1.2 POWER-ON — The POWER-ON state includes
all the functions of the equipment. It has two substates,
INITIALIZING and READY.
8.3.1.3 INITIALIZING — When equipment is first
powered on or recovers from a reset, it must initialize
its hardware and software subsystems and components,
including its different internal state models. This
process takes time, which is represented by the
INITIALIZING state.
8.3.1.4 READY — When all initializations are
complete, the equipment enters the READY state and is
able to interact with the user. The READY state has
two substates, IDLE and BUSY.
8.3.1.5 IDLE — In the IDLE state, the equipment is
inactive and able to accept a command for automatic
processing or manual operations.
NOTE 13: IDLE is not the same as the SEMI E10
STANDBY state. (See Section 8.5.3.)
8.3.1.6 BUSY — In the BUSY state, the equipment is
active. BUSY includes all operations of the equipment.
NOTE 14: BUSY is not the same as the SEMI E10
PRODUCTION state. (See Section 8.5.3.)
8.3.2 General Equipment Operations Model Table of
Transitions — Table 2 defines the triggers for each
transition shown in Figure 3. The second column,
labeled Table 1, shows the corresponding transition in
the ARAMS state model.
Table 2 Table 2 Table of Transitions for General Equipment Operations Model
# Table 1 Current State Trigger New State Action(s) Comment
1 None (undefined) Equipment is
installed.
POWER-OFF None New equipment
2 None POWER-OFF Power is turned on
(powerup).
INITIALIZING Begin system
initialization.
Initialization of hardware
and software.
3 11 POWER-ON Power is turned of
f
(powerdown).
POWER-OFF None Equipment does not
function.
SEMI E58-0703 © SEMI 1997, 2003
14
# Table 1 Current State Trigger New State Action(s) Comment
4 1 INITIALIZING System
initialization is
complete.
IDLE Begin normal
internal activities.
Wait for input.
Normal. Equipment is able
to interact with the user.
5 11 READY(any
substate)
Internal error, or
soft re-boot by
request.
INITIALIZING Re-initialize
system.
This is treated in the same
way as Transition 2.
6 1 (any substate of)
POWER-ON
System reset. INITIALIZING Re-initialize
system.
A reset is done through
hardware.
7 Conditional IDLE Equipment
receives
instructions to
perform an
automated or
manual function.
BUSY
(See NOTE 1.)
Perform the
requested function.
Equipment may be capable
of performing multiple
functions while in BUSY.
8 Continued
Conditional
BUSY
(See NOTE 1.)
The equipment has
completed all
requested
functions.
IDLE Wait for new
instructions.
Equipment may be capable
of performing non-hardware-
related functions in IDLE.
NOTE 1: The PROCESSING ACTIVE state of the Processing State Model example in SEMI E30 would be a substate of BUSY. Other substates
may exist for maintenance and diagnostics.
8.4 State Model Relationships — Figure 4 shows the ARAMS State Model and the General Equipment Operations
Model as both simultaneously active. Certain relationships exist between the two models.
Figure 4
ARAMS State Model and General Equipment Operations Model
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1.14.7 Both models cover all time, twenty-four hours
each day. The ARAMS State Model describes how the
equipment is used in the factory. The General
Equipment Operations Model describes the
equipment’s activities, including the time when it has
no power and is completely inactive.
1.14.7.1 The General Equipment Operations Model is
provided to clarify two specific areas of relationship:
• The transitions related to powerup (#2),
powerdown (#3), soft re-boot (#5), and reset (#6).
• The IDLE and BUSY activity states.
1.14.7.2 The term “reset” is used in this document to
collectively represent both the soft re-boot and the
hardware reset where no powerdown occurs.
1.14.7.3 Requirements related to powerup,
powerdown, re-boot, and reset are specified in Section
16.
NOTE 15: Although the equipment is unable to detect a
condition of no power, it is able to detect when the
INITIALIZING state has been entered and is able to
differentiate between a hard reset (Transition 6) and a soft re-
boot (Transition 5).
8.4.1 IDLE and BUSY — By definition, the equipment
is not in the IDLE state and in the PRODUCTIVE state
at the same time, and it is not intended to be in the
BUSY state while in STANDBY. The PRODUCTIVE
and STANDBY states correspond to implicit substates
of the BUSY and IDLE states only for the time the
equipment is within the MANUFACTURING
superstate — that is, it is scheduled for manufacturing
(non-engineering factory operations) and is in a
condition to perform its intended function.
1.14.7.4 Occasional exceptions may occur due to
improper timing of a user request to change to a
manufacturing state before the equipment completes a
non-processing activity started in another state. For
example, the equipment may be performing an
automatic calibration during routine maintenance in a
downtime state. In this case, the equipment determines
that its production criteria are not satisfied and shall
transition to STANDBY, as it is busy performing a
function other than its intended function.
8.4.2 Non-Manufacturing States — The equipment
may be in any of the POWER-OFF, INITIALIZING,
IDLE, or BUSY states in the General Equipment
Operations Model while in any of the non-
manufacturing states: ENGINEERING,
UNSCHEDULED DOWNTIME, SCHEDULED
DOWNTIME, or NON-SCHEDULED TIME. For
example, it may be powered off while being installed
(NON-SCHEDULED TIME) or repaired
(SCHEDULED or UNSCHEDULED DOWNTIME). It
may be required to perform its normal processing cycle
(its intended function) in ENGINEERING, NON-
SCHEDULED TIME or in a downtime state.
9 ARAMS Substate Codes
1.15 This section defines the format for ARAMS
Substate Codes and a set of reserved values for generic
substates based on the descriptions in SEMI E10. The
format is defined specifically to allow further resolution
of the six basic SEMI E10 equipment states by both the
factory and equipment supplier.
1.15.1 An ARAMS Substate Code consists of four
ordered alphanumeric text characters, where the first
two characters are reserved digits. The first character
indicates the primary ARAMS state as follows:
1. PRODUCTIVE
2. STANDBY
3. ENGINEERING
4. SCHEDULED DOWNTIME
5. UNSCHEDULED DOWNTIME
6. NON-SCHEDULED TIME
1.15.2 The second character of the code, if non-zero,
indicates a substate of the primary state. A zero in the
second position indicates no substate has been selected.
This may also be referred to as a substate of “default”.
1.15.3 Codes of the form “n000” indicate no substates
of a basic state have been selected. This is the “default
code” for that basic state. For example, a code of
“1000” indicates the PRODUCTIVE state with no
substates.
1.15.4 Descriptive formatted text is defined to
correspond to each ARAMS code. The first three
characters of this text represent the basic state. If the
next character is a forward slash “/”, then subsequent
text represents a substate of the basic state.
9.1 Reserved Codes — States and substates referenced
by the reserved text in this section are based on SEMI
E10 specifications. For further definition of
terminology, see SEMI E10.
1.15.5 The following ARAMS Substate Codes, and
the corresponding descriptive text strings for the
English language (delimited by quotes), are reserved.
Descriptive text with a substate of “Reserved” indicates
the corresponding code is reserved for future expansion
by this standard.
1.15.6 In the future, text strings in other languages
may also be reserved. Equipment supporting other
languages shall provide a method for the user to define