semi合集-English.pdf - 第6780页

SEMI S2-0703a E © SEMI 1991, 2004 9 and supporti ng inform ation needed t o perform the evaluation. 8.2 Gene ral — The evaluating party (see Section 8.4) should evaluate the equi pment according to this guideline and cre…

SEMI S2-0703a

initiated early in the design phase, and updated as the

design matures.

NOTICE: Section 6.8.1 below will be withdrawn

upon July 1, 2006 publication and replaced by the

new Section 6.8.1 including: figures and tables as

shown in Delayed Revisions Section 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

6.8.1 The hazard analysis should include consideration

of:

 the application or process;

 the hazards associated with each task;

 anticipated failure modes;

 the probability of occurrence and severity of a

mishap;

 the level of expertise of exposed personnel and the

frequency of exposure;

 the frequency and complexity of operating,

servicing and maintenance tasks; and

 safety critical parts.

NOTE 8: EN 1050 contains examples of hazard analysis

methods.

6.8.2 The risks associated with hazards should be

characterized using SEMI S10.

6.9 The order of precedence for resolving identified

hazards should be as follows:

6.9.1 Design to Eliminate Hazards — From the initial

concept phase, the supplier should design to eliminate

hazards.

NOTE 9: It is recommended that the supplier continue to

work to eliminate identified hazards.

6.9.2 Incorporate Safety Devices — If identified

hazards cannot be eliminated or their associated risk

adequately controlled through design selection, then the

risk should be reduced through fixed, automatic, or

other protective safety design features or devices.

NOTE 10: It is recommended that provisions be made for

periodic functional checks of safety devices, when applicable.

6.9.3 Provide Warning Devices — If design or safety

devices cannot effectively eliminate identified hazards

or adequately reduce associated risk, a means should be

used to detect the hazardous condition and to produce a

warning signal to alert personnel of the hazard.

6.9.4 Provide Hazard Warning Labels — Where it is

impractical to eliminate hazards through design

selection or adequately reduce the associated risk with

safety or warning devices, hazard warning labels should

be provided. See Section 10 for label information.

6.9.5 Develop Administrative Procedures and Training

— Where hazards are not eliminated through design

selection or adequately controlled with safety or

warning devices or warning labels, procedures and

training should be used. Procedures may include the use

of personal protective equipment.

6.9.6 A combination of these approaches may be

needed.

7 General Provisions

7.1 This guideline should be incorporated by reference

in equipment purchase specifications. The user and

supplier should agree on deviations from this guideline.

The intent is for the user to purchase equipment

conforming with SEMI S2, not to design the equipment.

7.2 The equipment must comply with laws and

regulations that are in effect at the location of use. All

equipment requiring certification or approval by

government agencies must have this certification or

approval as required by regulations.

NOTE 11: It is recommended that the supplier request from

the user information regarding local laws and regulations.

7.3 The manufacturer should maintain an

equipment/product safety program to identify and

eliminate hazards or control risks in accordance with

the order of precedence (see Section 6.9).

7.3.1 The supplier should provide the user’s designated

representative with bulletins that describe safety related

upgrades or newly identified significant hazards

associated with the equipment. This should be done on

an ongoing basis as needed.

7.4 Model-specific tools and accessories necessary to

operate, maintain, and service equipment safely should

be provided with the equipment or specified by the

supplier.

NOTE 12: The official values in this guideline are expressed

in The International System of Units (SI). Values that:

 are expressed in Inch-Pound (also known as “US

Customary” or “English”) units,

 are enclosed in parentheses, and

 directly follow values expressed in SI units

 are not official, are provided for reference only, and

might not be exact conversions of the SI values.

8 Evaluation Process

8.1 This section describes the evaluation of equipment

to this guideline, the contents of the evaluation report,

SEMI S2-0703a

and supporting information needed to perform the

evaluation.

8.2 General — The evaluating party (see Section 8.4)

should evaluate the equipment according to this

guideline and create a written evaluation report.

NOTE 13: The intent is that the “should” provisions of this

guideline be used as the basis for evaluating conformance.

The intent is also that the “may,” “suggested,” “preferred,”

“recommended,” and “NOTE” provisions of this guideline not

be used for evaluating conformance.

8.2.1 Conformance to specific sections of SEMI S2

may be achieved by instructions included in the

supplier’s equipment installation instructions (reference

SEMI E6) or other documentation.

8.3 Evaluation Report Contents: General — The

evaluation report should include only the manuals

(Section 9.6) and the design-specific sections (Sections

10 through 27). The Appendices should be used in the

evaluation, and referenced in the report, only as they

pertain to the specific application.

8.3.1 For each numbered section, the evaluation report

should state one of the following, and provide

supporting rationale:

 “Conforms” — equipment conforms to the section

or to the intent of the section.

 “Does not Conform” — equipment conforms to

neither the section nor to the intent of the section.

 “N/A” — section is not applicable to equipment.

8.3.1.1 The results of a risk assessment indicating no

significant risk may be used in determining that the

equipment conforms to the intent of a section.

8.3.1.2 The evaluation report should include a

determination per SEMI S10 of the level of risk

associated with nonconformance findings.

8.3.1.3 Supporting rationale may include test data or

documented engineering rationale.

8.4 Evaluation Report Contents: Other Information —

The evaluation report should also include:

 manufacturer’s model number;

 serial number of unit(s) evaluated;

 the date(s) that the equipment was evaluated;

 a system/equipment description including

configuration, options, and essential diagrams; and

 a statement of the qualifications of the evaluating

party. An in-house body, independent laboratory,

or product safety consulting firm (“third party”)

meeting the provisions of SEMI S7 may be used to

supply testing or evaluation of conformance to this

document.

8.5 Supporting Information Provided to Evaluator —

The following documentation should be provided to, or

developed by, the evaluator, as necessary to

demonstrate conformance to the provisions of this

guideline.

NOTE 14: It is recommended that the manufacturer’s typical

configuration and process be used for evaluation purposes.

Alternatively, a process agreed upon between the user and the

supplier may be used.

NOTE 15: Special options or configurations that may pose

additional hazards and are not included in the initial

evaluation may need a separate review. It is recommended

that upgrades, retrofits, and other changes that affect the

safety design of the equipment be evaluated for conformance.

8.5.1 General Information

 Written system description, including hardware

configuration and function(s), power requirements,

power output, and other information necessary to

understand the design and operation of the

equipment.

 Engineering data used to provide the rationale that

the equipment and subassembly seismic

anchorages are designed to satisfy the applicable

design loads (see Section 19, Seismic Protection).

 Descriptions of the purpose and function of safety

devices, such as: emergency off devices (EMOs),

interlocks, pressure relief devices, and limit

controls.

 A hazard analysis (see Section 6.8).

 Ergonomics evaluation (see Section 16).

 A list of safety critical parts and, for each one,

evidence of certification, or documentation

showing that the component is suitable for its

application.

 A residual fire risk assessment as described in

Section 14.2.

 Tests results, certifications, and design

specifications that are necessary to evaluate the

equipment with respect to fire safety. Descriptions

of the fire detection and suppression equipment and

controls should also be provided.

8.5.2 Industrial Hygiene Information

8.5.2.1 An industrial hygiene report, which should

include, as applicable:

 ventilation assessment (see Section 22);

SEMI S2-0703a

 chemical inventory and hazard analysis (see

Section 23);

 ionizing radiation assessment (see Section 24);

 non-ionizing radiation assessment (see Section 25);

 laser assessment (see Section 26); and

 audio sound pressure level assessment (see Section

27).

8.5.3 Environmental Information (see Section 21) —

Documentation substantiating the following:

 consideration or inclusion of features that conserve

resources (e.g., energy, water, deionized water,

compressed gases, chemicals, and packaging);

 consideration of features that would promote

equipment and component reuse or refurbishing, or

material recycling upon decommissioning;

 consideration or inclusion of features for resource

recycling or reuse;

 chemical selection methods and criteria (see

Section 21.2.3);

 consideration of integrating effluent and emission

controls into the equipment; and

 efforts to reduce wastes, effluents, emissions, and

by-products.

NOTE 16: For purposes of Section 8.5.3, documentation may

include design notes, metrics (whether normalized or not),

meeting minutes, pareto evaluations, or other analyses.

9 Documents Provided to User

9.1 This section describes the documents that the

supplier provides to the user.

9.2 Evaluation Report — Upon request by the user, the

supplier should provide the user with a summary of the

SEMI S2 evaluation report (see Section 8) or the full

report.

9.2.1 Nonconformances noted in the report should be

addressed by the supplier, by providing either an action

plan or a justification for acceptance. The justification

should include countermeasures in place and a risk

characterization per SEMI S10.

9.3 Seismic Information — Refer to Section 19 of this

document.

9.4 Environmental Documentation — The

manufacturer should provide the user with the

following environmental documentation as applicable:

9.4.1 Energy consumption information, including idle,

average, and peak operating conditions, for the

manufacturer’s most representative (“baseline”)

process.

9.4.2 Mass balance, including idle, average, and peak

operating conditions, for the manufacturer’s most

representative (“baseline”) process.

NOTE 17: The mass balance may include resource

consumption rates, chemical process efficiencies, wastewater

effluent and air emission characterization, solid and hazardous

waste generation (quantity and quality), and by-products.

9.4.3 Information regarding routes of unintended

release (of effluents, wastes, emissions, and by-

products) and methods and devices to monitor and

control such releases. This should include information

on features to monitor, prevent, and control unintended

releases (see Section 21.2.4).

9.4.4 Information regarding routes of intended release

(of effluents, wastes, and emissions) and features to

monitor and control such releases (see Section 21.2.5).

9.4.5 A list of items that become solid waste as a result

of the operation, maintenance, and servicing of the

equipment, and that are constructed of or contain

substances whose disposal might be regulated (e.g.,

berylium-containing parts, vapor lamps, mercury

switches, batteries, contaminated parts, maintenance

wastes).

9.5 Industrial Hygiene Information — Refer to

Sections 22–27 of this document.

9.6 Manuals

9.6.1 The supplier should provide the user with

manuals based on the originally intended use of the

equipment. The manuals should describe the scope and

normal use of the equipment, and provide information

to enable safe facilitization, operation, maintenance,

and service of the equipment.

9.6.2 The manuals should conform to SEMI S13.

NOTE 18: Fire suppression agents, and chemicals used to

test fire detection or suppression systems, fall under the

MSDS provisions of SEMI S13 when they are provided with

the equipment.

NOTE 19: Hazardous energies within fire detection or

suppression systems fall under the hazardous energy control

provisions of SEMI S13 when fire detection or suppression

systems are provided with the equipment.

9.6.3 In addition to the provisions of SEMI S13, the

manuals should include:

 specific written instructions on routine Type 4

tasks, excluding troubleshooting (refer to Section

13.3);

 instructions for energy isolation (“lockout/tagout”)

(refer to Section 17.2);