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SEMI E30-1103 © SEMI 1992, 2003 40 • A CEID shall be defined for a collection event for the creation, the deleti on, or the modificat ion (completi on of an editing session) of a process program (Process Program Change E…

SEMI E30-1103 © SEMI 1992, 2003

Variable Parameters — Variable parameters are recipe

parameters that are defined in the body of the recipe and

whose run-time values may be set outside of the recipe

when the recipe is selected for execution and/or when

processing is started. Both the host and the operator may

specify new settings as a parameter name/value pair.

Variable Parameter Definition — A variable parameter

definition has three parts: the name of the variable

parameter, its default setting, and restrictions on the

run-time value selected. Variable parameter definitions

are stored in the recipe attribute “Parameters”.

4.6.3 Description

4.6.3.1 Process Program Description

Process programs allow the equipment’s process,

and/or the parameters used by that process, to be set

and modified by the engineer to achieve different

results. Different process programs maybe required for

different products, while often the same process

program will be used for all lots of a given product. The

engineer must be able to create such programs, to

modify current programs, and to delete programs from

equipment storage.

For the host to ensure that the proper process programs

are in place at the equipment, there must be a means of

transferring them from equipment to host and from host

to equipment. The host also may need to delete process

programs from the equipment’s storage to make room

for a process program to be downloaded. In addition,

the host must be kept informed whenever a local

change occurs in the contents or status of a process

program.

Both formatted and unformatted process programs may

be uploaded and downloaded. This capability provides

for both host- and equipment-initiated transfers. The

equipment-initiated transfer may be used at the request

of the process engineer or operator at the equipment.

If a process program exists with the same PPID as the

one given in the SECS-II message, the old process

program must be replaced. The PPID in the e process

program in non-volatile storage.

4.6.3.2 Recipe Description

Specifications in Section 4.6.3.1 apply to recipes as

well as process programs, with the following

differences:

• A recipe contains a body corresponding to a

process program. In addition, it contains attributes

defined for execution recipes in SEMI E42,

Section 6. Recipe attributes are transferred

whenever the recipe is downloaded or uploaded.

• The same SECS-II messages are used for all

execution recipes, regardless of the internal

structure of the recipe body.

• If an execution recipe already exists with the same

identifier as the one given in the SECS-II message,

the downloaded recipe shall be rejected (not

stored) unless the host has specified a “forced

overwrite” in the data item RCPOWCODE.

• A recipe currently being edited shall be protected

from inadvertent change or overwriting by a recipe

with the same identifier that is downloaded during

this time. If the downloaded recipe is accepted

(stored), the equipment shall require the operator

either to save the edited recipe to a new (unused)

identifier or to discard it.

• For the equipment to initiate either an upload or

download of a recipe, it shall request the host to

initiate an upload or download procedure. In

addition, it may be necessary to also specify the

name of the repository (recipe namespace) at the

host.

4.6.3.3 Large Process Programs and Recipes

4.6.3.3.1 Process programs and recipes for certain types

of equipment, such as metrology or inspection

equipment, contain images and are, therefore, very

large. Such process programs and recipes cannot fit into

a single multi-block SECS-II message that has a

maximum theoretical size of 7,995,148 text bytes.

Furthermore, process programs and recipes may also

require some preparation prior to transfer.

4.6.3.3.2 The commonly used Stream 7 and Stream 15

transfer functions require that the entire process

program be sent in a single message. Thus, it is not

possible to send a large process program or recipe with

such messages. However, there is an alternative set of

Stream 7 and Stream 15 functions that supports large

transfers. These messages invoke Stream 13 Data Set

Transfer Protocol messages to transfer large process

programs (or recipes) by using a sequence of read

messages. The completion of such a read transaction is

indicated by “ERROR: End of Data”. The Data Set

Transfer Protocol does not set any limit on the size of

the data set.

4.6.4 Requirements

• The equipment manufacturer shall provide a method

to create, modify, and delete process programs or

recipes. This method shall exist on either the

equipment or on a separate computing system.

SEMI E30-1103 © SEMI 1992, 2003

• A CEID shall be defined for a collection event for

the creation, the deletion, or the modification

(completion of an editing session) of a process

program (Process Program Change Event). For

recipes, there are two separate CEIDs and collection

events, one for the creation of a new recipe (New

Execution Recipe Event) and one when a recipe is

changed or deleted (Execution Recipe Change

Event). A New Execution Recipe Event shall

occur whenever a new recipe identifier is created

through download, edit, copy, or rename operations.

A Execution Recipe Change Event shall occur

whenever the body of an existing recipe is modified.

• The name (identifier) that the engineer or operator

uses to refer to the process program or recipe is the

same as the identifier used by the host.

• Upon request from the host or operator, the

equipment shall perform the following actions with

regard to process programs and recipes stored in

non-volatile storage: upload, download, delete, and

list current equipment process program or recipe

directory.

• The equipment shall be able to store in non-volatile

memory the number of process programs or recipes

sufficient to execute three unique process cycles.

For example, if a wire-bonder requires both an

“ALIGN” process program and a “BOND” process

program for a full process cycle, then it must provide

non-volatile storage for at least three pairs of process

programs. These stored process programs or recipes

may not be modified in any way by the execution

process, nor may the execution process be affected

by the modification of any process program or

recipes in storage, either by downloading or by local

editing, while that process program or recipes

being executed.

• The equipment must provide verification and

validation of all downloaded process programs and

recipes.

• Stream 7 provides for formatted and unformatted

process programs, while Stream 15 provides for

recipes. The equipment must support at least one of

these three methods.

• The equipment supplier shall document any

restrictions on the length or test format of PPID.

The maximum length allowed by equipment may

be less than that allowed by SECS-II.

• Where recipes are supported, the following

requirements also apply:

• The variable PPFormat shall be provided to

indicate to the user the messages supported by

the equipment.

• The recipe and its attributes shall comply to

the requirements for execution recipes as

defined in SEMI E42, Section 6.

4.6.5 Scenarios for Process Programs

4.6.5.1 Process Program Creation, Editing, or Deletion Process Program Created, Edited, or Deleted by Operator

COMMENTS HOST EQUIPMENT COMMENTS

New process program created,

edited, or deleted by operator

at equipment.

PPChangeName = PPID

PPChangeStatus = 1 (Created)

= 2 (Edited)

= 3 (Deleted)

[IF] CEID for Process Program

Change Event enabled

[THEN]

<-- S6,F11 Send Event Report

Event Report Acknowledge S6,F12-->

[END_IF]

Process Program Deletion by the Host:

COMMENTS HOST EQUIPMENT COMMENTS

Delete Process Program Send S7,F17-->

<-- S7,F18 Delete Process Program

Acknowledge.

The process program is removed

from non-volatile storage.

4.6.5.2 Process Program Directory Request

COMMENTS HOST EQUIPMENT COMMENTS

Current EPPD Request S7,F19-->

<-- S7,F20 Current EPPD Data