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SEMI F57-0301 © SEMI 200 0, 2001 7 responsibility of the purchaser to m aintain traceability records. 11 Packaging Requirements 11.1 Double bagging using a clear m a t e rial that will allow inspection is required for po…

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SEMI F57-0301 © SEMI 2000, 2001 6
Table 6 Surface Roughness Requirements
Description Qualification Test Method Units Ra max. Value Notes
Extruded (See NOTE 1.) µm (µin) ≤ 0.25 (≤ 10) Section 7.6
Injection Molded (See NOTE 1.) µm (µin) ≤ 0.38 (≤ 15) Section 7.6
Machined (See NOTE 1.) µm (µin) ≤ 0.62 (≤ 25) Section 7.6
NOTE 1: See Related Documents Section 12.5 for an applicable surface roughness test method.
8 Mechanical Requirements
8.1 Upon request, suppliers shall provide data and/or
information for the following polymer components
mechanical requirements. This information is typically
found in product catalogs and component data sheets.
• dimensional tolerances
• flow characteristics
• leak integrity
• mechanical strength characteristics
8.2 All polymer components will c onform to supplier's
provided data and/or information regarding dimensional
tolerances, flow characteristics, leak integrity, and
mechanical strength characteristics.
8.3 Temperature/Pressure Rating
8.3.1 Polymer components are required to be
manufactured in such a manner so as to meet the
temperature and internal pressure requirements of ISO
1167, ISO 12162, or other superseding local regulations
as applicable.
8.4 Chemical Resistance Rating
8.4.1 Polymer components are required to be
manufactured to meet the chemical resistance
requirements specified by the component suppler,
and/or other superseding local regulations as applicable.
8.5 Reliability
8.5.1 Upon request, the manufacturer should provide
component reliability data accompanied by the
associated test and failure analysis methods. This
typically involves life cycle testing of components to
include results expressed in cycles (e.g. >1,000,000
cycles for valves). The test media used for life cycle
testing of polymer components can effect life cycle
testing results and should be considered when
comparing and selecting polymer components.
9 Certification
9.1 The component supplier is responsible for
defining, establishing, and executing a testing program
for polymer components based on the requirements
outlined within this document.
9.2 Such a program will specify th e frequency of
testing, the test component(s) and any necessary
corrective action plan in the event that a test component
fails to meet these requirements during testing.
9.3 To avoid the inefficiencies inv olved in testing
every size of every product type, test polymer
components shall be selected by the component
supplier which will be representative product of similar
processing, or production techniques.
9.4 Upon request, the component s upplier is
responsible for maintaining and supplying
documentation that proves their polymer components
consistently meet the requirements of this document.
9.5 The supplier is not required to perform all tests on
each individual lot or product type of polymer
components shipped. Instead, the product will be
certified as meeting the requirements in this document
based on the outcome of the representative component
tests and periodic testing program. However, if the
purchaser performs the test(s) and the product fails to
meet the requirement(s), the product may be subject to
rejection.
9.6 Qualification tests and certific ation documents
shall reflect current production capabilities.
10 Traceability Requirements
10.1 It will be the responsibility of the component
supplier to establish and maintain an incoming raw
material certification, inspection, and traceability
process, which will ensure that manufactured polymer
components meet the requirements of this document.
10.2 Every deliverable item shall ha ve some scheme
of identification on the exterior bag or box so that
traceability is provided from the raw material supplier
to the final finished, packaged product.
10.3 In addition, piping, tubing, valves, gauge guards,
pressure transducers, and pressure regulators shall have
permanent, non-contaminating identification (e.g. laser
marking, heat stamping, or chemical resistant label) on
the product itself to provide traceability.
10.4 In the event that component installation by the
purchaser obliterates such identification, it becomes the
SEMI F57-0301 © SEMI 2000, 20017
responsibility of the purchaser to maintain traceability
records.
11 Packaging Requirements
11.1 Double bagging using a clear material that will
allow inspection is required for polymer components
specified in this document. Both the inner and outer
bags will be heat-sealed and shall prevent damage from
normal handling. Vacuum sealing, air evacuation,
and/or dry inert gas purging are optional on the inner
bag.
11.2 The ends of valves, gauge guards, pressure
regulators, and tubing will be protected using some
non-contaminating method before bagging.
11.3 The outer bag will have a label affixed which
clearly identifies the component, part number, lot
number and any other necessary traceability
characteristics (see Section 10).
11.4 Shipping containers and cartons must provide
adequate protection of polymer components so those
articles will meet the requirements contained within this
document upon delivery to the purchaser.
11.5 It should be noted that some p ackaging materials
could release substantial amounts of TOC when they
are heat-sealed. This might lead to an organic
deposition on the polymer component.
12 Related Documents
NOTE 2: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
12.1 SEMI Standards
SEMI E49.2 — Guide for High Purity Deionized Water
and Chemical Distribution Systems in Semiconductor
Manufacturing Equipment
SEMI E49.3 — Guide for Ultrahigh Purity Deionized
Water and Chemical Distribution Systems in
Semiconductor Manufacturing Equipment
12.2 ASTM Standards
1
ASTM D1784 — Rigid Poly (Vinyl Chloride) (PVC)
Compounds and Chlorinated Poly (Vinyl Chloride)
(CPVC) Compounds
ASTM D3222 — Unmodified Poly (Vinylidene
Fluoride) (PVDF) Molding, Extrusion, and Coating
Materials
ASTM D3275 — E-CTFE-Fluoroplastic Molding,
Extrusion, and Coating Materials
ASTM D3307 — PFA-Fluorocarbon Molding and
Extrusion Materials
ASTM D3915 — Rigid Poly (Vinyl Chloride) (PVC)
and Chlorinated Poly (Vinyl Chloride) (CPVC)
Compounds for Plastic Pipe and Fittings Used in
Pressure Applications
ASTM D4101 — Propylene Plastic Injection and
Extrusion Materials
12.3 DIN Standards
4
DIN 16774-1 — Plastic Moulding Materials;
Polypropylene And Propylene Copolymer
Thermoplastics; Classification and Designation
DIN 3442-1 — Fittings of PP (Polypropylene);
Requirements and Testing
DIN 3442-2 — Fittings of PP (Polypropylene); Ball
Valves, Dimensions
DIN 3442-3 — Polypropylene (PP) Valves; Diaphragm
Valves; Dimensions
DIN 8077 — Polypropylene (PP) Pipes PP-H 100, PP-
B 80; PP-R 80 - Dimensions
DIN 8078 — Polypropylene (PP) Pipes - PP-H (Type
1), PP-B (Type 2), PP-R (Type 3) - General Quality
Requirements and Testing
12.4 CEN Standards
5
PREN 1452-1 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 1: General
PREN 1452-2 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 2: Pipes
PREN 1452-3 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 3: Fittings
PREN 1452-4 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 4: Valves and Ancillary Equipment
PREN 1452-5 — Plastics Piping Systems for Water
Supply - Unplasticized Poly(Vinyl Chloride) (PVC-U)
Part 5: Fitness for Purpose of the System
PREN 12202-1 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 1: General
PREN 12202-2 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 2: Pipes
4 Deutsches Institut fur Normung e.v., available from Beuth Verlag,
Burggrafenstrasse 6, D-10787 Berlin, Germany
5 European Committee For Standardization, 36, rue de Stassart, B-
1050 Brussels, Belgium
SEMI F57-0301 © SEMI 2000, 2001 8
PREN 12202-3 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 3: Fittings
PREN 12202-5 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 5: Fitness for
Purpose of the System
12.5 ISO Standard
2
ISO 10931-1 — Plastic piping systems for industrial
applications - PVDF - Part 1: General
ISO 10931-2 — Plastic piping systems for industrial
applications - PVDF - Part 2: Pipes
ISO 10931-3 — Plastic piping systems for industrial
applications - PVDF - Part 3: Fittings
ISO 10931-4 — Plastic piping systems for industrial
applications - PVDF - Part 4: Valves
ISO/FDIS 10931-5 — Plastic piping systems for
industrial applications - PVDF - Part 5: Fitness for
Purpose of the System
ISO/DIS 15874-1 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 1: General
ISO/DIS 15874-2 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 2: Pipes
ISO/DIS 15874-3 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 3: Fittings
ISO/DIS 15874-5 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 5: Fitness for
purpose of the system
12.6 SEMATECH Documents
6
SEMASPEC 92010936B-STD — Provisional Test
Method for Determining Leachable Trace Inorganics in
Ultra Pure Water Distribution System Components”
SEMASPEC 92010950B-STD — Provisional Test
Method for Visual Characterization of Surface
Roughness for Plastic Surfaces of UPW Distribution
System Components
6 SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741, USA