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SEMI E40-0705 © SEMI 1995, 2005 10 PROCESSING AGENT SUPERVISOR PR JOB CREATE PR JOB CREATE ACK PR JOB SETUP PR JOB PROCESSING PR JOB PROC COMPLETE PR JOB COMPLETE pre-conditi oning, materi al arriv al processing the mat …

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SEMI E40-0705 © SEMI 1995, 2005 9
7.8 Consecutive Process Jobs — Consecutive process jobs is a situation where multiple process jobs are applied to
material while it is in the processing resource. The process jobs requested on the same material are maintained in the
order received, and a subsequent job becomes active once the previous one has completed material processing.
7.8.1 A process job normally specifies all the processing to be applied to the material during a single visit to the
processing resource. For example, a process job for a cluster tool would specify all the processing in the multiple
sequential steps in the various process modules of the tool. Certain situations may require application of subsequent
process jobs to material without it leaving the processing resource.
7.8.2 Processing management requires that a subsequent process job on the same material does not interrupt the
previous process job processing. The previous process job terminates immediately once it completes active material
processing, even though the material has not left the processing resource, and it is superceded by the subsequent job.
The material becomes associated with the superceding process job. This allows sequential processing and maintains
a single active association between material and process job.
7.9 Process Job without Material — This standard is primarily intended for the management of material processing.
However, it permits application of a process job to a processing resource which contains no processing material.
This may be used to achieve processing resource conditioning which is not related to a specific material.
7.9.1 The process job has the normal control characteristics, except that it has no dependency on material arrival
and terminates at the end of active processing. Support of process jobs without material is not a fundamental
requirement.
8 Behavior
8.1 This section provides a high-level definition of the communications between the supervisor and the processing
resource needed to achieve material processing. It does not define the message detail, concentrating instead on the
concepts. The message detail is addressed in §10, Messaging Services.
8.2 Process Job Communications
8.2.1 Process Job Control Messaging — The control message flow for normal operation is presented in Figure 1.
The arrows represent significant information exchange.
8.2.1.1 A detailed description of each message used in normal operation follows.
8.2.1.2 PR Job Create — The supervisor requests that the processing resource perform the specified process job.
This request may be acted upon immediately, or queued for later execution if the processing resource is busy or the
order of material arrival unknown. If the processing resource does not support queuing or the queue is full, the
request may be rejected. The request shall supply a process specification in which the supervisor supplies such
information as:
identification of the material to be processed,
the recipe defining the processing, and
whether processing will be started manually (optional, normal operation is automatic).
8.2.1.2.1 Upon receipt of the PR Job Create request and before acknowledging, the processing resource checks the
process specifications to ensure that they are valid (i.e., that the specified parameters (recipe, material, manual start)
are sufficient) and have legal values for the capabilities of the processing resource. Depending on its ability to queue
jobs, it may also check such dynamic information as availability of the processing resource to receive the material or
presence of correct material, etc., to determine whether to accept or reject.
8.2.1.2.2 The processing resource sets the process start attribute if automatic start is requested (normal operation).
8.2.1.3 PR Job Create Acknowledge — The processing resource informs the supervisor that the requested job is
accepted or rejected, and if rejected, supplies error codes and textual reasons for the failure.
8.2.1.4
PR Job Setup — The processing resource reports that the process job is active and setting up for process. It
may have been on the queue or have just been created. If the material is not already present, the processing resource
performs any pre-conditioning required then awaits material arrival. Upon arrival of all the material, it prepares for
processing and automatically initiates processing if the process start attribute is set.
SEMI E40-0705 © SEMI 1995, 2005 10
PROCESSING AGENT
SUPERVISOR
PR JOB CREATE
PR JOB CREATE ACK
PR JOB SETUP
PR JOB PROCESSING
PR JOB PROC COMPLETE
PR JOB COMPLETE
pre-conditioning,
material arrival
processing
the material
material departure,
post-conditioning
queued
Figure 2
Process Job Message Flow
8.2.1.5 PR Job Processing — The processing resource reports that material processing has commenced.
8.2.1.6 PR Job Processing Complete — The processing resource reports that material processing is completed and
that the material is available for removal.
8.2.1.7 PR Job Complete — The processing resource declares the process job to be complete once it has completed
processing the material, the material has departed, and any required processing resource post-conditioning has
completed. This message is also used when a process job ends abnormally. The message provides information on the
success or failure of the processing and, if failed, supplies error codes and textual reasons for the failure.
8.2.2 Process Job Informational Events — There are process job related events which may be of significance to the
service-user. These are designated as “collection events” and shall be available for event reporting. This section
describes those collection events and shows how they fit into the chronology of a process job. These collection
events, as specified by the PRJobEvent service, shall be implemented per definition of one of the following
standards, SEMI E30, SEMI E40, SEMI E53 or similar style events, as required by the service-user. The equipment
may also optionally implement the collection events per the remaining standards. However, the service-user shall
only utilize one of the standards for collection event implementations. The selection mechanism by the service-user
is equipment specific. For example, it may be part of an equipment power-on process or via an equipment specific
equipment constant.
8.2.2.1 If SEMI E30, SEMI E53 or similar style collection events are used for PRJobEvent, the equipment may also
implement equivalent events for the process job milestones as defined by the PRJobAlert service.
8.2.2.2 Collection event messages provide valuable information but are not strictly required to perform material
processing. Therefore, it is expected that some message protocol implementations will provide a method by which
the service-user may disable those events which are not needed in a particular implementation. For SEMI E40 style
events, the activation for disabling the events is user specific. For SEMI E30, SEMI E53 or similar style events, the
activation is as defined in those standards.
8.2.2.3 PR Job Waiting for Material — The processing resource reports that all required pre-conditioning has
completed and that it cannot proceed until the process job material arrives. It is considered to be awaiting material
arrival if it is not aware of activities in progress with the aim of receiving all or part of the material. This event may
be generated only during process job setup. This event requires, at a minimum, PRJobID and Timestamp as its data.
8.2.2.4 PR Job State Change — The processing resource reports that it has changed state. All state transitions in the
state model Figure 4 shall trigger this collection event. These events require, at a minimum, variables PRJobID,
PRJobState, and TimeStamp (SEMI E30).
8.2.3 Process Job Extended Messaging — In this section, the extended messaging of Abort/Stop/Cancel,
Pause/Resume and manual Start Process is added to the normal messaging described above. The only extended
functionality required to be supported in processing management is Abort.
8.2.3.1 A detailed description of each message used in extended operation follows.
SEMI E40-0705 © SEMI 1995, 2005 11
8.2.3.2 PR Job Abort — The supervisor may command the processing resource to abort a process job at any time.
The goal of the abort command is to end the process job activities as quickly as possible. This includes halting all
processing of material in progress, which may result in an unknown material condition. Abort is intended for use
when serious problems are detected and further damage needs to be prevented. The abort command terminates the
process job. In many cases, error recovery may be required before normal operation may continue and subsequent
jobs can be executed. For processing equipment a part of the error recovery procedure may require the removal of
substrates belonging to the aborted process job that still reside in the equipment. This is determined by the
processing agent, which may use applicable service standards to handle the exception.
8.2.3.2.1 The abort command takes precedence over the stop, cancel, and pause commands. If the specified process
job is queued, the abort command acts identically to a cancel command.
8.2.3.3 PR Job Stop — The supervisor may command the processing resource to stop a process job at any time. The
stop command terminates the job in an orderly manner. The object of the stop command is to cease the current
activity at the next safe, convenient point, preserving material integrity. In the situation of processing equipment,
this convenient point may require that all related substrates are sent to their output destination. This implies that each
material is either processed as specified in the recipe or not at all. As stop terminates the job, a new process job is
needed to continue processing the material in the processing resource. If restart of the same job is needed, pause and
resume should be used instead of stop. A new job is required if additional processing is needed after a job is stopped.
8.2.3.3.1 If the specified process job is queued, the stop command acts identically to a cancel command.
8.2.3.4 PR Job Cancel — The supervisor may cancel a process job which has not yet become active (e.g., a job
which is queued). Cancel is used when the supervisor would like to remove a process job — to reschedule, for
example — but does not want to affect process job activities already in-progress. A cancelled job is removed from
the queue and ceases to exist. No physical action is associated with canceling a process job. If the specified process
job is active, the processing resource shall reject this command.
8.2.3.5 PR Job Pause — The supervisor may issue a command to pause a process job at any time. A pause
command shall cause the processing resource to continue to the first safe, continual, pausing place and then cease
activity. The activity may cease only at points that allow for resumption of the activity (see the resume command)
such that material integrity is maintained and the processing goals are accomplished. Note that a paused process job
may be aborted or stopped as an alternative to the resume command. In this case, the stop command may cause the
equivalent of a resume in order to ensure material integrity (either fully processed or not processed at all) upon
termination of the process job.
8.2.3.6 PR Job Resume — The resume command is used to continue a previously paused process job activity.
8.2.3.7 PR Job Create — The PR Job Create request as previously described is for normal automatic process job
operation. If the process start attribute is not set, the processing resource waits for a manual start from the supervisor
before processing the material. The control message flow for manual start is presented in Figure 3.
8.2.3.8 PR Job Waiting for Start — The processing resource is ready to process once the material has arrived and
has been prepared for processing. The processing resource reports that it is ready to process and is waiting for start,
if the process job PRProcessStart attribute is not set. The PRProcessStart attribute is not set if the job is defined to
start manually and the start command has not yet been received. The WAITING FOR START state shall be a safe
condition which maintains material integrity. If the process job is stopped or aborted while in this state, the material
will not have been altered.
8.2.3.9 PR Job Start Process — The supervisor which has defined a process job to start manually issues a PR Job
Start Process to allow processing of the material to proceed when the processing resource is ready. The start may be
issued at any time after process job creation. On receiving the start command, the processing resource sets the
process start attribute and starts processing if it is already in the WAITING FOR START state.