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SEMI F51-0200 © SEMI 2000 6 Categories fo r Consideratio n PLASMA CVD SiN Oxid e HDP PSG, BPSG BSG ETCH PVD (Hi Temp) TEO S Cleaning Tec h C 2 F 6 , NF 3 F Cl Br O 2 H x C y H 2 BPSG BSG Figure 4 Plasm a C hart NOTICE: S…

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SEMI F51-0200 © SEMI 20005
Categories for Consideration
LIQUID
CHEMICALS
CORROSIVES OXIDIZERS SOLVENTS
Figure 2
Liquid Chemical Chart
Categories for Consideration
THERMAL
ION
IMPLANT
(Hi Vac)
RTPLPCVDATM
ATM
POCI
3
O
2
,
N
2
CI
MOCVDTEOSNITPOLY
LTO,
HTO
TiN W
H
2
O
CVD
Figure 3
Thermal Chart
SEMI F51-0200 © SEMI 2000 6
Categories for Consideration
PLASMA
CVD
SiN
OxideHDP
PSG,
BPSG
BSG
ETCH
PVD
(Hi Temp)
TEOS
Cleaning
Tech
C
2
F
6
,
NF
3
F
Cl
Br
O
2
H
x
C
y
H
2
BPSG
BSG
Figure 4
Plasma Chart
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f
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SEMI F52-1101 © SEMI 2000, 20011
SEMI F52-1101
DIMENSIONAL SPECIFICATION FOR METRIC PFA TUBES FOR
LIQUID CHEMICAL DISTRIBUTION IN SEMICONDUCTOR AND FLAT
PANEL DISPLAY MANUFACTURING
This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee
and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current
edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on
www.semi.org August 2001; to be published November 2001. Originally published June 2000.
1 Purpose
1.1 This document defines sizes and their measurement
methods of metric PFA tubes for liquid chemical
distribution in semiconductor and flat panel display
manufacturing equipment and facilities.
2 Scope
2.1 This document applies to metric tubes made from
PFA.
2.2 This specification does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Referenced Standards
3.1 ISO Standards
1
ISO 4397 — Fluid Power System and Components –
Connectors and Associated Components – Outside
Diameters of Tubes and Inside Diameters of Hoses
3.2 JASO Standards
2
JASO F 409-91 — Fittings for Polyamide (Nylon) Tube
JASO M 317-73 — Nylon Tube for Automobile Air
Brake Piping
3.3 JIS Standards
3
JIS B 7502 — External Micrometer
JIS B 8381 — Fittings for Flexible Tube Used at
Atmospheric Pressure
JIS K 6890 — Tube Made from Tetra-fluoroethylene
Resin
1 International Organization for Standardization, 1, rue de Varembe,
Case postale 56 CH-1211 Geneve.
2 Japanese Automobile Standards Organization / Society of
Automotive Engineers of Japan, Goban-cho Center Bldg., 10-2
Goban-cho, Chiyoda-ku, Tokyo 102-0076.
3 Japan Standards Association, 4-1-24 Akasaka, Minato-ku, Tokyo
107-8440.
3.4 SAE Standards
4
SAE J 844 — Nonmetallic Air Brake System Tubing
SAE J 1394 — Metric Nonmetallic Air Brake System
Tubing
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 ID — Inside Diameter
4.1.2 ISO — International Organization for Standard-
ization
4.1.3 JASO — Japan Automobile Standard
4.1.4 JIS — Japanese Industrial Standard
4.1.5 OD — Outside Diameter
4.1.6 PFA — Tetrafluoroethylene Perfluoroalkylvinyl-
ether Copolymer
4.1.7 SAE — Society of Automotive Engineers
4.2 Definitions
4.2.1 dial thickness gauge — an instrument used to
measure wall thickness with a dial meter.
4.2.2 liquid chemical — acid, alkali, organic solvent,
and pure water used for wet stations; resists and
developers used for track system; and other chemicals
used for process or maintenance (such as slurry of
chemical-mechanical polishing) of equipment or
facilities.
4.2.3 outside diameter tolerance — allowable
deviation of the outside diameter of PFA tube from the
specified dimension.
4.2.4 projector — an instrument used to measure shape
and dimension of an object by optically projecting it at
a given magnification. Also referred to as a measuring
projector or profile projector.
4 Society of Automotive Engineers, 400 Commonwealth Drive,
Warrendale, PA 15096-0001.